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pump Product List

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Roots vacuum pump

Mechanical booster pump

A vacuum pump that performs compression and exhaust by rotating a crescent-shaped rotor. 【Features】 ○ Installed in front of oil rotary vacuum pumps to increase exhaust speed, also referred to as a mechanical booster due to its mechanical vacuum pump nature. ○ Used in combination with vacuum pumps that can compress to atmospheric pressure, such as dry vacuum pumps, oil rotary vacuum pumps, and liquid-sealed vacuum pumps. ○ Compact design makes it easy to integrate into a system. ○ A belt-driven large Roots vacuum pump (R series) is also available in the lineup, suitable for applications requiring high exhaust, such as large chambers for space testing. ○ Inverter control allows operation from atmospheric pressure and pressure control under low intake pressure conditions. ● For other functions and details, please contact us.

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Compound Molecular Pump TG203

Oil-lubricated spherical bearing type turbo molecular pump

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

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Compound Molecular Pump TG1003

Oil-lubricated spherical bearing type turbo molecular pump

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

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  • Vacuum Equipment
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Compound Molecular Pump TG1810/1813

Oil-lubricated spherical bearing type turbo molecular pump

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

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  • Vacuum Equipment
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Compound Molecular Pump TG3413

Oil-lubricated turbo molecular pump with a ball bearing type.

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

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  • Vacuum Equipment
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Posture-flexible composite molecular pump TG70F

Versatile mounting posture integrated power supply turbo molecular pump

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation and compact design with integrated power supply. It has a structural design that is strong against atmospheric entry.

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Posture-flexible composite molecular pump TG50F

Versatile installation posture grease-lubricated bearing type turbo molecular pump

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation. It has a structural design that is resistant to atmospheric intrusion.

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Posture-flexible composite molecular pump TG450F

Versatile installation posture grease-lubricated bearing type turbo molecular pump

Since it is a grease-lubricated bearing type turbo molecular pump, it can be installed in any orientation. It has a structural design that is resistant to atmospheric intrusion.

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Posture-flexible composite molecular pump TG2400F

A turbo molecular pump that is strong against atmospheric entry and allows for flexible mounting positions.

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation. It has a structural design that is resistant to atmospheric intrusion.

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Magnetic Bearing Type Composite Molecular Pump TG1300M

Magnetic bearing turbo molecular pump compatible with a wide range of exhaust from low to ultra-high vacuum.

You can choose from various special specifications according to your application. Specifications for reaction byproduct measures, ultra-low vibration, ultra-high vacuum, radiation resistance, and high-temperature resistance.

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Ultra-high vacuum magnetic bearing composite molecular pump (high compression type) TG-MU

Ultra-high vacuum specification turbo molecular pump

Ultra-high vacuum magnetic bearing composite molecular pump (high compression type) TG-MU series

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  • Vacuum Equipment
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Ultra-low vibration magnetic bearing type molecular pump TG-ML series

A low-vibration pump that suppresses the vibration value to below 1nm. By installing an anti-vibration damper, it can be further reduced by one order of magnitude (0.1nm)!

It is ideal for high-performance electron microscopes, fine drawing devices, and analytical instruments.

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Radiation-resistant specification magnetic bearing composite molecular pump TG-MR series

Turbo molecular pump developed for use in radiation environments!

Increased durability against radiation, enabling operation in harsh environments. Delivered to facilities such as the Japan Proton Accelerator Research Complex (J-PARC)!

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  • Vacuum Equipment
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Power supply unit and pump integrated turbo molecular pump

New product TGkine4200M released!! No unnecessary wiring needed, improving work efficiency and maintainability!

Power Unit and Pump Integrated Turbo Molecular Pump New Product TGkine4200M Released!! We have successfully developed the new product TGkine4200M. It features a large flow rate despite its compact size compared to other products. We plan to showcase the actual unit at the Vacuum Exhibition 2015 scheduled for September, where we will explain the specifications through panels and other materials. We will display the TGkine series (TGkine2200M/3300M/4200M) including the TGkine4200M and introduce it to everyone. For more details, please check our company website. (Link to our company website) We invite you to visit our booth during this opportunity. The compact design also contributes to cost reduction. It is widely adopted in manufacturing industries such as medical devices, semiconductors, and analytical/testing equipment. 【Features】 ■ Cost reduction possible with flexible design! ■ Improved work efficiency by consolidating various access points at the front! ■ Standard IP54 (dustproof and splashproof) compliant, usable even in harsh environments! *For more details, please contact us or download the catalog to view.

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Grease-lubricated bearing type turbo molecular pump TG60F

The installation position is flexible! A compact-sized combined molecular pump with an integrated controller!

The TG60F turbo molecular pump with grease-lubricated bearing is a compact size with an integrated controller. Its installation orientation is flexible, allowing for greater freedom in equipment design. It is ideal for applications such as electron gun evacuation, analytical instruments, and research and development. 【Features】 ■ Rapid vent stop capability. ■ Strong structure against atmospheric intrusion. ■ Compliance with safety standards: NRTL/SEMI-S2/CE (only for TG60F-20) *For more details, please contact us or download the catalog to view.

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