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seal×三菱電線工業 - List of Manufacturers, Suppliers, Companies and Products

seal Product List

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Chemical-resistant fluorine rubber seal "San Elast I"

Chemical-resistant fluororubber seal! Significantly improved chemical resistance compared to conventional fluororubber.

● In industries such as semiconductors, liquid crystals, chemical plants, food, and painting, many fluids such as solvents, chemicals, and corrosive gases are used. ● Traditionally, fluororubber has been used to seal these fluids, but its application range has been limited due to issues such as swelling or dissolution. ● Sanerast (3301-70) significantly improves chemical resistance compared to conventional fluororubber, while also providing sealing and heat resistance equivalent to that of traditional fluororubber. ● Therefore, the application range has greatly expanded, allowing for the use of rubber alone in areas where composite seals were previously used, significantly enhancing sealing performance and ease of installation. 【Features】 ◆ It can be used with water-glycol-based fluids, non-flammable hydraulic oils, methanol, ethylene diamine, sodium hydroxide, ammonia water, and lacquer thinner, which traditionally cause dissolution or significant swelling in conventional fluororubber. ◆ Heat and oil resistance are equivalent to that of conventional fluororubber, while durability has greatly improved. ◆ It has excellent wear resistance (approximately five times that of conventional fluororubber). ◆ It is lower in price than perfluoroelastomers.

  • Other painting machines
  • Other semiconductor manufacturing equipment
  • Analytical Equipment and Devices

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Mitsubishi Electric Wire & Cable's metal seal "Sunri-Mes" series

High-performance metal seals!! Ideal for various vacuum equipment and semiconductor manufacturing devices!

●With the diversification of machine specifications, there are increasing cases where seals made from conventional rubber or resin materials cannot withstand use due to their material properties. ●In such cases, metal seals represented by metal O-rings are chosen, but due to their weaknesses of high tightening force and low recovery amount, replacing seals made from rubber or resin materials is not easily achievable. ●To solve these problems, we have developed a completely new metal seal, "Sunrimess®," which possesses the advantages of metal seals while having a large recovery amount with a small tightening force.

  • Oxidation/Diffusion Device
  • CVD Equipment
  • Sealing

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Fluororesin composite seal "Sunfron U Seal" *Low friction and long lifespan!

From vacuum to high pressure, excellent sealing performance across a wide range! A fluororesin composite seal combining a U-shaped cross-section fluororesin ring and a stainless steel spring.

The fluoropolymer composite seal "Sunfron U Seal" excels in heat resistance, cold resistance, chemical resistance, and wear resistance, making it suitable for both dynamic and static applications. It is a fluoropolymer composite seal ideal for harsh conditions where rubber seals cannot be used. 【Features】 ■ Proven performance in equipment requiring cleanliness, low friction, and long lifespan! ■ Self-sealing seal that adjusts its tightening force according to the pressure of the sealed fluid! ■ Unique shape and structure ■ Excellent performance across a wide pressure range from vacuum to high pressure! ■ Usable in a wide temperature range from -200°C to +250°C! ■ Can be used in the same groove as JISB2401 P series O-rings! *For more details, please download the catalog or contact us directly.

  • Hydraulic Equipment
  • Analytical Equipment and Devices
  • Sealing

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Large-diameter seal

Large-diameter seal

As a comprehensive seal manufacturer, we are committed to meeting various demands by combining our years of experience, abundant materials, and unique optimal shape design. In particular, for the LCD industry, we offer seal products that excel in low particle generation and chemical resistance, as well as products that accommodate larger substrates.

  • CVD Equipment
  • Evaporation Equipment
  • Other semiconductor manufacturing equipment

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Sanfron RL Seal

Sanfron RL Seal

【Features】 1. Usable over a wide temperature range of -60 to +200°C. 2. Suitable for high-speed rotation, usable even at a maximum peripheral speed of 55 m/s. 3. The sealing material is Sanflon(R), allowing use with almost all liquids. 4. Excellent durability under pressure. 5. Possesses very good wear resistance, usable not only with lubricating liquids but also as a non-lubricated pneumatic seal. 6. The hydrodynamic groove design offers excellent durability and good compliance to shaft eccentricity. 7. Superior dust resistance compared to rubber oil seals.

  • others

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Mitsubishi Electric Wire & Cable's heat-resistant fluororubber seal "Sunelast K"

Fluororubber with excellent long-term durability!! It can withstand high temperatures (200-220°C) compared to conventional fluororubber.

■ Long-term compressive permanent deformation at high temperatures is small ■ Mass loss at high temperatures is less compared to conventional materials ■ Excellent vacuum retention performance ■ Lower price than perfluoroelastomers

  • Oxidation/Diffusion Device
  • CVD Equipment
  • Vacuum Equipment

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Slit valve seal

Slit valve seal

● We provide solutions to various demands by combining our long-standing experience as a comprehensive seal manufacturer, abundant materials, and unique optimal shape design for sealing materials used in vacuum equipment across a wide range of industries, including semiconductors and liquid crystals. ● For the semiconductor industry, we manufacture and sell products that excel in low dust generation, plasma resistance, chemical resistance, and low adhesion properties. For the liquid crystal industry, we produce products that accommodate larger substrates. ● As part of our product lineup for these industries, we offer chamber slit valve seals (gate valve seals) that can be used at the entrance (gate) for transporting wafers within processing chambers, such as in the film formation process of manufacturing equipment. 【Features】 ★ [Design and Shape] By optimizing the cross-sectional shape, our products have the following advantages compared to O-rings: - Excellent fit for grooves - Less prone to issues caused by twisting - Less likely to fall out of grooves ★ [Materials] We can manufacture using various materials to meet diverse requirements such as low dust generation, wear resistance, and plasma resistance.

  • CVD Equipment
  • Etching Equipment
  • Other semiconductor manufacturing equipment

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Adhesion prevention seal

Adhesion prevention seal

As a comprehensive seal manufacturer, we have combined our years of experience, abundant materials, and unique optimal shape design to respond to various demands and provide solutions for sealing materials used in vacuum equipment across a wide range of industries, including semiconductors, liquid crystals, and solar cells. For semiconductor and liquid crystal manufacturing equipment, we manufacture and sell products that not only have low dust generation, plasma resistance, and chemical resistance but also excel in low adhesion characteristics.

  • Oxidation/Diffusion Device
  • CVD Equipment
  • Pneumatic Equipment

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Cap seal *Reduces friction resistance in rotational and reciprocating motion!

"Cap Seal," a sealing material that combines fluororesin rings and rubber O-rings, has achieved extended lifespan for seals!

A cap seal is a seal that combines a fluororesin ring and a rubber O-ring, demonstrating excellent characteristics of long life and low friction compared to using only an O-ring for reciprocating or rotating motion. 【Features】 ■ Achieves long lifespan! ■ Almost no stick-slip occurs. ■ Can reduce dynamic friction resistance. ■ Starting resistance and dynamic friction resistance are nearly the same. ■ Can be used with conventional O-ring groove dimensions. ■ Usable at high pressures (reciprocating motion: 20.6MPa [210kgf/cm²], rotating motion: 4.9MPa [50kgf/cm²] without backup rings). *For more details, please download the catalog or contact us directly.

  • Sealing
  • Other machine elements

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Rotary shaft seal

Rotary shaft seal

【Features】 1. Leakage of lubricating oil and grease from the rotating shaft can be prevented with a compact groove. 2. The semi-circular seal ensures a reliable seal on the outer circumference. 3. Easy to install as it does not use a metal retainer. 4. Allows for larger dimensional tolerances of the groove compared to oil seals. 5. Grooving is easy to perform. 6. Can be used at higher pressures compared to rubber oil seals.

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