Slit valve seal
● We provide solutions to various demands by combining our long-standing experience as a comprehensive seal manufacturer, abundant materials, and unique optimal shape design for sealing materials used in vacuum equipment across a wide range of industries, including semiconductors and liquid crystals. ● For the semiconductor industry, we manufacture and sell products that excel in low dust generation, plasma resistance, chemical resistance, and low adhesion properties. For the liquid crystal industry, we produce products that accommodate larger substrates. ● As part of our product lineup for these industries, we offer chamber slit valve seals (gate valve seals) that can be used at the entrance (gate) for transporting wafers within processing chambers, such as in the film formation process of manufacturing equipment. 【Features】 ★ [Design and Shape] By optimizing the cross-sectional shape, our products have the following advantages compared to O-rings: - Excellent fit for grooves - Less prone to issues caused by twisting - Less likely to fall out of grooves ★ [Materials] We can manufacture using various materials to meet diverse requirements such as low dust generation, wear resistance, and plasma resistance.
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basic information
● As a comprehensive sealing manufacturer, we combine years of experience, a wealth of materials, and unique optimal shape design to respond to various demands for sealing materials used in vacuum equipment across a wide range of industries, including semiconductors and liquid crystals, and provide solutions. ● For the semiconductor industry, we manufacture and sell products that excel in low dust generation, plasma resistance, chemical resistance, and low adhesion properties, while for the liquid crystal industry, we produce products that accommodate larger substrates. ● As one of the product groups for these industries, we offer chamber slit valve seals (gate valve seals) that can be used at the entrance (gate) for transporting wafers within processing chambers, such as those in film deposition processes of manufacturing equipment. 【Features】 ★ [Design and Shape] By optimizing the cross-sectional shape, our products have the following advantages compared to O-rings: - Excellent fit for grooves - Less prone to problems caused by twisting - Less likely to fall out of grooves ★ [Materials] We can manufacture using various materials to meet diverse requirements such as low dust generation, wear resistance, and plasma resistance.
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Applications/Examples of results
Applications and Examples of Achievements ■ Slit valve seals for various vacuum devices (Gate valve seals) ■ Seals for vacuum chambers Industries Frequently Used ■ Semiconductors, LCDs, Vacuum
Company information
Since our founding in 1907, we have been dedicated to the development of products such as wires and cables, leveraging our technology to provide high value-added products and services, including high-performance sealing components, across a wide range of industrial sectors.
