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seal Product List

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Magnetic Fluid Dust Seal "Exclusion Seal"

Magnetic Fluid Dust Seal "Exclusion Seal"

Perfect for semiconductors, LCDs, and clean environments! Magnetic fluid dust seal with perfect sealing effect.

The basic principle of the "Exclusion Seal" consists of a unit that forms a magnetic circuit, made up of permanent magnets, with N and S poles, and ball pieces for the two magnetic poles. By passing a magnetic shaft through this magnetic circuit unit, the magnetic flux concentrates in the radial gap between the shaft and the ball pieces. When a magnetic fluid is filled in that gap, a liquid O-ring seal is formed. Applying this technology, it is now used not only in OA and FA equipment but also in various robotic transport systems in clean rooms. The perfect sealing effect has achieved an ultra-clean environment. 【What is a magnetic fluid?】 - A magnetic fluid is a colloidal liquid in which magnetic nanoparticles of about 10 nanometers are dispersed in a liquid. - Even in the presence of an external magnetic field, there is no separation or aggregation of the particles and the base liquid. *For more details, please refer to the catalog or feel free to contact us.

  • Sealing
  • magnet

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Vacuum Seal "Solid Shaft Fellow Seal"

Vacuum Seal "Solid Shaft Fellow Seal"

Set models according to a wide range of applications! High-quality seals compatible with all vacuum processing equipment.

At FerroTec Corporation, we provide high-quality seals compatible with all types of vacuum processing equipment. The "Solid Shaft Ferro Seal" comes in various models to suit a wide range of applications, including miniature type, through-hole type, flange type, and heavy-duty type. The shapes of the power connection end and the process end of the shaft, except for small diameter ones, are standardized with a key groove mechanism, and other options such as flat surfaces, threaded, and hole configurations are also available. 【Features】 - Water-cooled types are available that can handle high temperatures, high loads, and high-speed rotation (excluding some miniature and through-hole types). - Hermetic sealing is possible. - Prevents undetectable leaks. - Long life. For more details, please refer to the catalog or feel free to contact us.

  • Sealing

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Vacuum Seal "Multi-Process Fellow Seal"

Vacuum Seal "Multi-Process Fellow Seal"

Fellow seal for multi-axis mechanism compatible with wafer transport robots in a vacuum environment.

The "Multi-Process Fellow Seal" is equipped with a multi-axis mechanism that supports wafer transport robots in a vacuum environment for various current semiconductor processes, and we also offer linear motion compatibility. Furthermore, we have products that can accommodate ultra-high vacuum processes of 10⁻⁶ Pa. 【Features】 [Coaxial 2-Axis Type] ■ A compact, lightweight type that achieves high vibration and rotational accuracy. [3-Axis Type] ■ A high-rigidity type that achieves high vibration and rotational accuracy. [Coaxial 3-Axis Linear Motion Type] ■ A high-rigidity type that achieves high vibration and rotational accuracy while maintaining a coaxial 3-axis structure. For more details, please refer to the catalog or feel free to contact us.

  • Sealing

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Fluid O-ring vacuum seal Fellowseal (R)

Fluid O-ring vacuum seal Fellowseal (R)

A vacuum rotary introducer that utilizes the property of magnetic fluids to respond to magnetic fields. No contamination.

【Product Description】 A vacuum rotary feedthrough that utilizes the property of magnetic fluid responding to a magnetic field. It has a longer lifespan and does not generate contamination compared to contact-type devices. ◆Contents◆ ~A wide range of high-quality seals compatible with all vacuum processing equipment~ - Miniature ferro seal - Snow hole ferro seal - Flanged ferro seal - Heavy-duty ferro seal - Multifunctional ferro seal - Robot seal and more ◆For those who wish to receive a catalog, please inquire through the request form◆ ~Some of the lineup can be viewed from the download section~

  • others

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Vacuum Seal "Hollow Shaft Fellow Seal"

Vacuum Seal "Hollow Shaft Fellow Seal"

Adopts a cartridge mechanism! A vacuum seal that can be combined with existing shafts.

At FerroTec Co., Ltd., we provide high-quality seals compatible with all types of vacuum processing equipment. The "Hollow Shaft Ferro Seal" features a cartridge mechanism that can be integrated with existing shafts. It is available in through-hole type, flange type, and cantilever type (compatible with active gases). Additionally, we offer a version without a clamp for fixing the shaft as an option. 【Features】 ■ The rotating shaft and the sleeve shaft of the cartridge are sealed statically by an O-ring. ■ The shaft and sleeve are fixed by a clamp. ■ Hermetic sealing is possible. ■ Prevents unmeasurable leaks. ■ Long life. For more details, please refer to the catalog or feel free to contact us.

  • Sealing

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