Gas switching + humidification/vaporizer unit for evaluating firing, reaction, and thermal CVD with a single device.
The "Multi-Atmosphere Furnace" is a versatile atmosphere furnace that can be heated while switching between multiple atmosphere gases such as H2, NH3, and O2, in addition to vacuum and inert atmospheres.
It is suitable for material development, surface treatment, powder sintering, and reaction evaluation, as it can reproduce complex reaction conditions such as oxidation, reduction, nitriding, and sintering in humid atmospheres with just one unit.
Additionally, not only can it accommodate humid atmospheres through a Wetter humidification line, but it can also be configured as a thermal CVD furnace by combining it with a vaporizer to introduce liquid raw materials or organometallic solutions.
It can be utilized for advanced process development beyond conventional atmosphere sintering, including thin film formation, surface modification, coating, and precursor reaction evaluation.
【Features】
■ Supports vacuum, inert, oxidation, reduction, and nitriding atmospheres
■ Capable of switching between various gases such as H2, NH3, O2, N2, and Ar
■ Compatible with humid atmosphere sintering through Wetter connection
■ Expandable to thermal CVD processes via vaporizer connection
■ Maximum temperature of 1700°C and heating rate of 10°C/min
■ Collaboration with exhaust, detoxification, and safety equipment can also be considered
*For more details, please download the materials or contact us.