Multi-Atmosphere Furnace | Supports everything from atmosphere sintering to thermal CVD processes.

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last updated：Jun 05, 2026

サーモニックENG

Gas switching + humidification/vaporizer unit for evaluating firing, reaction, and thermal CVD with a single device.

The "Multi-Atmosphere Furnace" is a versatile atmosphere furnace that can be heated while switching between multiple atmosphere gases such as H2, NH3, and O2, in addition to vacuum and inert atmospheres. It is suitable for material development, surface treatment, powder sintering, and reaction evaluation, as it can reproduce complex reaction conditions such as oxidation, reduction, nitriding, and sintering in humid atmospheres with just one unit. Additionally, not only can it accommodate humid atmospheres through a Wetter humidification line, but it can also be configured as a thermal CVD furnace by combining it with a vaporizer to introduce liquid raw materials or organometallic solutions. It can be utilized for advanced process development beyond conventional atmosphere sintering, including thin film formation, surface modification, coating, and precursor reaction evaluation. 【Features】 ■ Supports vacuum, inert, oxidation, reduction, and nitriding atmospheres ■ Capable of switching between various gases such as H2, NH3, O2, N2, and Ar ■ Compatible with humid atmosphere sintering through Wetter connection ■ Expandable to thermal CVD processes via vaporizer connection ■ Maximum temperature of 1700°C and heating rate of 10°C/min ■ Collaboration with exhaust, detoxification, and safety equipment can also be considered *For more details, please download the materials or contact us.

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basic information

【Basic Specifications】 ■ Maximum Temperature: Up to 1700℃ ■ Heating Rate: 10℃/min ■ Atmosphere: Vacuum, Inert Gas, Oxidizing Atmosphere, Reducing Atmosphere, NH3, etc. ■ Furnace Body: Alumina Shell Modular Furnace Body ■ Required Utilities: Electricity, Cooling Water, Process Gas 【Compatible Processes】 ■ H2 Reduction, NH3 Nitriding, O2 Oxidation, N2/Ar Inert Sintering ■ Humid Atmosphere Sintering with Wetter ■ Introduction of Liquid Raw Materials and Organometallic Precursors via Vaporizer ■ Thermal CVD, Surface Modification, Coating Condition Examination ■ Exhaust, Decontamination, and Safety Design for Reactive Gas Usage *Specifications can be customized according to application, gas type, precursor, and temperature conditions.

Price information

*Please feel free to contact us for more details, as prices may vary depending on the specifications of the equipment.

Delivery Time

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※*Please feel free to contact us for more details, as delivery times may vary depending on the equipment specifications.

Applications/Examples of results

【Applicable Fields】 ■ Reduction sintering, oxidation treatment, and nitriding of metal materials ■ Atmosphere sintering of powder materials, catalysts, ceramics, and battery materials ■ Catalyst treatment, oxidation reactions, and surface reaction evaluation in humid atmospheres ■ Material evaluation using reactive gases such as NH3, H2, and O2 ■ Thermal CVD, surface modification, and coating studies through vaporizer connection ■ Exploration of thin film formation conditions using liquid raw materials and organometallic precursors ■ Comparative testing of conditions in research and development 【For such challenges】 ■ I want to compare oxidation, reduction, nitriding, and humid conditions with one machine ■ I want to switch between humid and dry atmospheres for evaluation ■ I want to introduce liquid raw materials through vaporization and examine thermal CVD conditions ■ I want to confirm the vaporization, decomposition, reaction, and film formation conditions of precursors ■ I want to consider the furnace including exhaust, waste removal, and safety measures Even at the stage where gas types, precursors, temperatures, flow rates, and exhaust treatment are not yet determined, you can consult us according to your application.