Industry-leading basic performance
A100L / A200L
• Ideal dry pump for use in transfer chambers for load locks and clean processes
• Low vibration, high throughput: capable of 300 cycles per hour in a 20L L/L chamber
• Achieves low power consumption through the use of a high-efficiency motor
• Compact design with a footprint of 0.17m²; can be positioned vertically or horizontally
• Can be stacked in two layers (horizontal only with the intake facing)
A103P
• For medium processes (etchers, ion implantation, PVD, etc.)
• Energy-saving and space-saving
A4 Series
• Achieves low power consumption through a multi-root structure and high-efficiency motor
• Suppresses the accumulation of by-products through heater temperature control
• Long pump life due to corrosion-resistant nickel coating (XN model)
• Extends the operating time of process equipment with excellent particle exhaust capability
• Enhanced monitoring features for better control of pump status (cooling water sensor, vibration box, etc.)
• Prevents clogging in the pump and exhaust piping with hot N2
• Complies with IP33, SEMI S2, and UL standards
- Company：伯東 本社
- Price：Other
