Feedback Stage - List of Manufacturers, Suppliers, Companies and Products

5nm Feedback Stage FS-1040SPX/XY

Precision positioning device with an integrated linear encoder, operating with a resolution of 5nm.

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 40mm with a resolution of 5nm (*1). Due to the combination of our self-developed linear scale and our unique feedback control circuit, it performs full closed-loop control, ensuring high resolution, high positioning reproducibility, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

Company：シグマ光機
Price：Other

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5nm Feedback Stage FS-1050SPX/XY

"Precision positioning device" with 5nm high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of 5nm (*1). Thanks to our proprietary linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

Company：シグマ光機
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10nm Feedback Stage FS-1100PX/XY

Built-in encoder, 10nm resolution, high positioning repeatability, and excellent position retention after positioning stage!

An optical linear encoder is built into the center of the stage to reduce position detection errors, and by feeding back position information to the controller, it achieves high resolution, high positioning repeatability, and position holding capability after positioning. The stroke is '100mm' with a resolution of '10nm' (*1). Due to the long operating range, both movement and positioning can be performed with this single stage. (*1) In combination with the feedback stage controller FC-511.

Company：シグマ光機
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Vacuum-compatible 1nm feedback stage FS-1020UPX(V)

【Usable in a vacuum】High-performance positioning stage with 1nm high resolution, high reproducibility, and high retention.

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be used inside a vacuum chamber. Due to the built-in linear encoder, it has high-precision repeat positioning performance through closed-loop control.

Company：シグマ光機
Price：Other

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Vacuum-compatible 1nm feedback stage FS-1050UPX(V)

[Vacuum Compatible] High-performance positioning stage with 1nm high resolution, high reproducibility, and high retention.

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be directly introduced into a vacuum chamber. It features a built-in linear scale developed in-house, allowing for a slim and lightweight design, as well as high-precision repeat positioning performance through full closed-loop control, possessing characteristics equivalent to those for atmospheric use.

Company：シグマ光機
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How to Choose a Feedback Stage (Positioning)

Optical linear scale! A system for positioning with nanometer resolution.

Feedback refers to a system that monitors position information from a linear scale through closed-loop control to improve the reproducibility of positioning. The feedback stage system is composed of a linear scale, a stage, and a controller. The selection guide introduces methods for selecting stages based on three points: "operating type," "resolution," and "stroke," tailored to the customer's specifications. 【Features of the Feedback Stage Controller】 - Full closed-loop control - Built-in motor driver - Various error detection functions - Communication via RS-232C standard / GPIB For more details, please contact us or download the catalog.

Company：シグマ光機
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1nm Feedback Stage FS-1020SPX(MD)/XY

"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position holding stability after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 20mm with a resolution of 1nm (*1). Thanks to our self-developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1020SPX(MD) and the high-speed type is FS-1020UPX. (*1) In combination with the feedback stage controller FC-911.

Company：シグマ光機
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1nm Feedback Stage FS-1040SPX(MD)/XY

"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a resolution of "1nm" and a stroke of "40mm." Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1040SPX(MD) and the high-speed type is FS-1040UPX. (*1) In combination with the feedback stage controller FC-911.

Company：シグマ光機
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Submicron Feedback Stage FS-3200X/XY

"Precision positioning device" with high resolution, high positioning repeatability, and excellent position holding capability after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 200mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. Equipped with a slowdown sensor, it minimizes the impact during stops at the stroke end. (*1) In combination with the feedback stage controllers FC-414 or FC-114.

Company：シグマ光機
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Vacuum-compatible submicron feedback stage, lift type

Usable in a vacuum! Positioning stage for the Z-axis with built-in linear encoder and sub-micron resolution!

This is a high-resolution Z-axis positioning stage equipped with an optical linear scale. It achieves a stroke of either 5mm or 10mm with a resolution of either 50nm (*1) or 100nm (*2). It has been treated for outgassing and can be used in a vacuum. Thanks to its unique design, it minimizes changes in the tilt of the table surface, which is common in Z-axis configurations, and is equipped with a self-developed linear scale and proprietary feedback control circuit, providing high resolution, excellent positioning repeatability, and position retention after positioning. (*1) Combination with feedback stage controller FC-411 (*2) Combination with feedback stage controller FC-111

Company：シグマ光機
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Vacuum-compatible 10nm feedback stage with 20mm operation.

High-performance positioning stage with a built-in linear encoder operating at 10nm resolution, usable in a vacuum.

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be directly introduced into a vacuum chamber. It has a built-in optical linear encoder, and based on the position information detected by the encoder, it performs full closed-loop control, resulting in high-precision repeatability in positioning. It can achieve positioning with a 20mm stroke and a resolution of 10nm.

Company：シグマ光機
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Vacuum-compatible submicron feedback stage with 40mm operation.

High-resolution positioning stage with built-in encoder for use in a vacuum.

The built-in optical linear encoder detects the position of the stage and performs full closed-loop control, resulting in high resolution and excellent position reproducibility. Since it is driven by a stepping motor and ball screw, it has excellent position holding capability. Due to the use of components that are less likely to outgas in the vacuum chamber, the stage can be placed inside the vacuum chamber. It can operate within a range of 40mm and can be controlled with a resolution of "50nm" or "100nm" (depending on the controller).

Company：シグマ光機
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Vacuum-compatible submicron feedback stage with 20mm operation

Feedback stage with submicron resolution usable in a vacuum.

The built-in optical linear encoder detects the position of the stage table and feeds the position information back to the controller, resulting in high resolution and excellent position reproducibility. Since it is driven by a stepping motor and ball screw, it has excellent position retention. As a countermeasure against outgassing, lubricants, wires, and motors have been replaced with vacuum-compatible products, allowing for use within a vacuum chamber. It can operate within a range of 20mm and can be controlled with a resolution of "50nm" or "100nm" (depending on the controller).

Company：シグマ光機
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Vacuum-compatible submicron feedback stage, micro-rotation type

Usable in a vacuum! Stage for adjusting rotation direction

It is equipped with an optical linear encoder, allowing it to detect the position of the movable parts of the stage, which enables the controller to perform closed-loop control based on that position information, resulting in excellent position reproducibility. The resolution can be operated at "0.00005" or "0.0001" resolution, depending on the controller. It has been treated for outgassing, making it usable in a vacuum.

Company：シグマ光機
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10nm Feedback Stage FS-3150X/XY

"Precision positioning device" with high resolution, excellent positioning reproducibility, and strong position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 150mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-511.

Company：シグマ光機
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Feedback Stage - List of Manufacturers, Suppliers, Companies and Products

Feedback Stage Product List