Syringe Pump Product List and Ranking from 20 Manufacturers, Suppliers and Companies

Presentation of the new edition of the syringe pump comprehensive catalog (Japanese version)

Which pump should I choose... Free gift included. Comparison chart provided. Popular uses and applications are also listed. Simple to select.

Includes a comparison table that clearly shows the features of the pumps. You can easily search for suitable pumps for product development by quickly understanding the valve and syringe options, as well as the specifications. It features pipette modules for simple device configurations, world-class syringe pumps with proven performance, and cost-effective piston pumps with high durability. *For more details, please download the PDF or contact us.*

Company：テカンジャパン
Price：Other

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【Case Study Collection】XCalibur Pump

Practical Case Studies of Compact and High-Precision Syringe Pumps for Device Integration

*Please download the practical examples from the images of the cases listed in the "catalog" below.* ＝＝＝＝＝ About the XCalibur Pump ＝＝＝＝＝ The Techan Cavro XCalibur is a compact, lightweight OEM syringe pump with high dispensing accuracy. In recent years, the Excalibur has been applied to analytical devices and clinical diagnostic equipment worldwide due to its performance and robustness, and it is actively incorporated into our automatic dispensing devices. It is suitable for product development that requires space-saving and high dispensing accuracy. It is fully RoHS compliant. The valve supports various liquid path switching. The photo shows a model equipped with a specially customized valve. (*Demonstration and rental available) *For detailed specifications, please click "Download Catalog" below.*

Company：テカンジャパン
Price：Other

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Development of an automatic management system for plating solution - Syringe Pump XLP6000

Ideal management of plating solutions for semiconductors and electronic components with high reproducibility and precise flow control of the liquid delivery.

Fully compatible with semi-additive manufacturing methods, achieving high reproducibility and easy precise flow rate adjustment, realizing CV of 0.05% at a low cost. Flow rate control from the start with a liquid delivery unit that does not depend on external pressure! Liquid delivery volume range per operation: 1nl to 50ml Volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec) (※) ※ Depends on the capacity of the installed syringe Example: When a 250μl syringe is installed Volume adjustment unit: minimum 5nl Flow rate range: 1.6μl/min to 12.5ml/min (26nl/sec to 208μl/sec) Flow rate adjustment unit: 313nl/min to (5nl/sec) Example: When a 10ml syringe is installed Volume adjustment unit: minimum 0.2μl Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution of 6000 or 48,000 steps. Three-way valves to switch liquid paths and up to 12-port valves can be installed.

Company：テカンジャパン
Price：100,000 yen-500,000 yen

Syringe Pump
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Special Pump
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Fluid control syringe pump XLP6000 that does not waste EUV resist.

The flow rate of the ejected liquid can be adjusted to 0.3 μl/min, minimizing the use of expensive photoresist with nanoliter-level liquid volume adjustments!

Ideal for dispensing resist liquid droplets for spin coaters and slit coaters. Affordable with high reproducibility (CV value: 0.05%). Flow rate control from the dispensing unit that does not depend on external pressure and flow controllers! Liquid volume range per dispensing: 1nl to 50ml Liquid volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec) (※) ※ Depends on the capacity of the installed syringe Example: When a 10ml syringe is installed Liquid volume adjustment unit: minimum 0.2μl to Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Equipped with a thorough management function for discharge amount and speed using an encoder, as well as a reporting function to notify errors during abnormal conditions. Easy operation linkage with I/O terminals. Simple management of maintenance timing with operating amount memory function. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution command with 6000 or 48,000 steps. Three-way valves to switch liquid paths and up to 12-port valves can be installed.

Company：テカンジャパン
Price：100,000 yen-500,000 yen

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Syringe Pump
Positive Displacement Pump
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Fluid control of EUV resist without waste - Syringe pump Excalibur

Tekan's syringe pump, known for its proven track record in the development of coating equipment requiring high precision and accuracy. Compact yet designed to be extremely robust.

Fluid control syringe pump that does not waste expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) at a low cost. It allows for easy control of flow rate from the start, independent of unstable external pressure and flow controllers. Volume range for a single delivery: 2nl to 5ml (*) Volume adjustment unit: minimum 2nl (*) Flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min (*) *Dependent on the capacity of the installed syringe. Example: When a 2.5ml syringe is installed Volume adjustment unit: minimum 104nl Flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, and a report function to notify errors during abnormal conditions. Easy operation linkage via I/O terminals. It has a working volume memory function. Built robustly to reduce service costs for embedded devices and contributes to lowering the failure occurrence rate of the equipment.

Company：テカンジャパン
Price：Other

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半導体の製造と薬液管理に　シリンジポンプ総合カタログ

半導体関連の製造装置開発に！　コーティング、エッチング、パルス送液、薬液管理や滴定、廃液管理で精密送液を実現するシリンジポンプ

ポンプの特徴が一目でわかる比較表付。バルブやシリンジオプション、スペックが一目でわかり、製品開発の際の好適ポンプを簡単に検索。多分岐バルブで様々な薬液を様々な液路へ分配可能。精密分注はCV0.05％を確実に実現。次世代の半導体製造プロセスに役立つシリンジポンプ類。フッ酸耐性のシリンジも近日供給可能。シリンジポンプの流量と流速の仕様： 1回の送液の液量範囲：0.3nl～50ml 液量調節単位：最少0.3nl～　流速範囲：17μl/分～３L/分　（0.3nl/秒～50ml/秒、ポンプ稼働可能域）流速調整単位：　17nl/分～　（0.3nl/秒） ※シリンジポンプの種類と装着しているシリンジ容量(50ul～50ml)により液量と流速は異なります。シリアル通信とCAN通信下で簡単なコマンドで稼働と微調整が容易。PLC制御に最適衝撃に強いシャーシを採用。接液部はPTFE。 ※詳しくはPDFをダウンロード、もしくはお問合せください。

Company：テカンジャパン
Price：100,000 yen-500,000 yen

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Precision dispenser pump Excalibur for quarter developers.

Tekan's dispensing pump, which has a proven track record in the development of coating equipment that requires high precision and accuracy. It is compact yet designed to be extremely robust.

Fluid control syringe pump that prevents waste of expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) while being cost-effective. It allows for easy flow rate control from the start, independent of unstable external pressure and flow controllers. Volume range for a single delivery: 2nl to 5ml Volume adjustment unit: minimum 2nl and above Adjustable flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min and above (2nl/sec) *Depends on the syringe capacity used Example: When using a 2.5ml syringe Volume adjustment unit: minimum 104nl and above Adjustable flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min and above (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, as well as a reporting function to notify errors during abnormal conditions. Easy operation linkage via I/O terminals. Memory function for operating volume. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment.

Company：テカンジャパン
Price：Other

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Analytical Equipment and Devices
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Ultra-compact lightweight high-performance syringe pump Excalibur

A Techan syringe pump with proven performance suitable for product development requiring 24,000 steps and high dispensing precision. Compact yet ultra-durable design.

＝＝＝＝＝ Overview ＝＝＝＝＝ The Tekan Cavro XCalibur is a compact, lightweight OEM syringe pump with high dispensing accuracy. In recent years, the Excalibur has been applied to analytical devices and clinical diagnostic equipment worldwide due to its performance and robustness, and it is actively incorporated into our automatic dispensing systems. It is suitable for product development that requires space-saving and high dispensing accuracy. It is fully compliant with RoHS III. The valve supports various liquid path switching (from 3-way valves to 12-port valves). The photo shows a model equipped with a specially designed valve. Additionally, a new solenoid valve type has also been released. Usage examples: Blood sample pretreatment devices, in vitro diagnostic reagent analytical devices, analytical devices involving titration processes, coating and dispensing of semiconductor wafers, plating solution management, solid-phase extraction, automatic elemental analyzers, manufacturing of stick-type test reagents, and more. Features for continuously monitoring flow rate and flow speed are included. Compatible syringe capacities: 50μl to 5ml (please refer to the catalog). (*Demo and pump rental (including evaluation kits) are available.) For detailed specifications, please click "Download Catalog" below.

Company：テカンジャパン
Price：Other

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Multi-channel Syringe Pump XMP6000 (Catalog Information)

Tekan's proud multi-syringe pump boasts numerous achievements worldwide. Suitable for applications handling a variety of solutions. 48,000 steps.

A multi-channel syringe pump for device integration, renowned for its reliability. It can accommodate arrangements of 2, 4, 6, or 8 syringes. By consolidating high-precision syringe pumps, it provides more space within the measurement device and contributes to miniaturization. It also helps reduce the dead volume of precious reagents. The pump address is unified for operation. It is optimal for automatic measurement devices for in vitro diagnostic reagents, reactions that require the addition of various reagents, and handling various applications with a single unit. It can be controlled with minimal space and the fewest commands relative to the number of liquid types. Usage examples: Simultaneous dispensing into multi-well plates, manufacturing systems requiring simultaneous discharge, blood cell processing systems, analytical devices handling multiple solutions, and analytical devices for in vitro diagnostic reagents. Please refer to the catalog for available syringe capacities.

Company：テカンジャパン
Price：Other

Syringe Pump
Lab metering pump
Lab Syringe Pump
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<Suitable for slow liquid delivery> Syringe Pump Cavro Centris

One stroke of the syringe takes 50 hours.

Long-lasting New Concept Syringe Pump Now Available ＝＝＝＝＝ Overview ＝＝＝＝＝ The Centris Pump is a compact syringe pump module for laboratory equipment that offers high accuracy, reliability, and reproducibility. The new Centris Pump features a simple yet robust mechanical design that requires minimal maintenance. It has the smallest footprint among OEM syringe pumps and is fully RoHS compliant. ★ For the technical specifications of the Centris Pump, please download the catalog ★ ＝＝＝＝＝ Features ＝＝＝＝＝ - Utilizes long-life ceramic valves and ceramic syringes Capable of handling high liquid temperatures - High reproducibility: below 0.05% CV/FS - High resolution: 181,490 steps - Programmable flow rate: 5 nl/s to 5 ml/s - Compact size (installation space: 69×45 mm) * For more details, please download the PDF or contact us.

Company：テカンジャパン
Price：Other

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Lab metering pump
pump
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【Semiconductor Manufacturing Process】Low Pulsation / Micro / Ultra High Resolution Syringe Pump

It enables extremely precise flow control, achieving a very low pulsation and smooth flow of liquid.

The optimal solution for the needs of "uniform film thickness," "constant concentration of trace components," and "accurate liquid cut-off at the nozzle tip" in semiconductor manufacturing! Please consider our low-pulse, high-reproducibility syringe pump. ＝＝＝＝＝　Overview　＝＝＝＝＝ The Centris Pump is a compact syringe pump module with high accuracy, reliability, and reproducibility. Its simple yet robust mechanical design requires minimal maintenance. It has the smallest footprint among OEM syringe pumps and is fully RoHS compliant. ★ Please download the catalog to view the technical specifications of the Centris Pump ★ ＝＝＝＝＝　Features　＝＝＝＝＝ - Long-life ceramic valves and ceramic syringes Capable of handling high liquid temperatures - High reproducibility: less than 0.05% CV/FS - High resolution: 181,490 steps - Programmable flow rate: 5 nl/s to 5 ml/s - Compact size (installation space: 69×45 mm) * For more details, please download the PDF or contact us.

Company：テカンジャパン
Price：Other

Coater
Etching Equipment
CMP Equipment
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[Problem-Solving Case] Development and Research Institute Related - Company F

"There is no pump that meets the research conditions." By communicating the details of the issues and research content, we were able to repeatedly review and solve the problem!

【Until now】 At Company F, related to development and research, there has been no high-precision syringe pump that meets the research conditions, and the research results have not been satisfactory. 【Issues】 ● There are hardly any syringe pumps for new research that meet the conditions. ● The standard products from various companies did not provide satisfactory performance or results. *For more details, please refer to the PDF document or feel free to contact us.

Company：CSP（シーエスピー）
Price：Other

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Information about the Cavro XLP6000 series

Change in the shape of the D-sub15 adapter part.

We have decided to change the D-sub 15 adapter for the Syringe Pump XLP6000 series to enhance convenience. The affected serial numbers are as follows. Please note that there are no changes to the shape of the D-sub 15 adapter or the assignment of each pin. We apologize for any inconvenience this may cause and appreciate your understanding.

Company：テカンジャパン
Price：Other

Syringe Pump
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Syringe pump capable of accurate and precise liquid delivery for semiconductor manufacturing equipment.

Applying chemicals in semiconductor manufacturing 'more accurately and precisely.' Easily meet the equipment specifications.

In semiconductor manufacturing, where precise pattern formation and advanced process control are required, accurate dispensing of chemicals is essential. The Cavro pump series from Tecan provides optimal solutions for precise liquid delivery in the range of 1μl to 50ml, making it easy to integrate into customers' equipment. Syringe Pumps: Centris, Xcalibur, XLP6000 Multi-channel Syringe Pump: XMP6000 Delivery Speed: 17nl/min to 2.4L/min (actual dispensing volume monitored via encoder) Reliable liquid delivery at actual capacity without relying on flow controller adjustments. [Application Scenes] - Spin coating - Spray coating - Precise droplet dispensing of photoresist onto wafers - Slurry addition in chemical mechanical polishing (CMP) - Chemical formulation in cleaning and etching processes - Automatic titration adjustment - Automatic dilution - Additive management in plating processes (electrolytic and non-electrolytic) - Packaging processes, etc.

Company：テカンジャパン
Price：100,000 yen-500,000 yen

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Syringe Pump
Positive Displacement Pump
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Development of superior coating equipment: Syringe Pump XLP6000

The flow rate of the expelled liquid can be adjusted to 0.3 μl/min, minimizing the use of expensive photoresist with nanoliter-level liquid volume adjustments!

Optimal for dropping resist liquid with spin coaters and slit coaters. Affordable with high reproducibility (CV value: 0.05%). Flow rate control from the start by a delivery unit that does not depend on external pressure and flow controllers! Single delivery volume range: 1nl to 50ml Volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec) (※) ※ Depends on the capacity of the installed syringe Example: When a 10ml syringe is installed Volume adjustment unit: minimum 0.2μl to Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Equipped with a thorough management function for discharge volume and speed using an encoder, as well as a reporting function to notify errors in case of abnormalities. Easy operation linkage with I/O terminals. Maintenance timing is easily managed with the operation amount memory function. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution command with 6000 or 48,000 steps. Three-way valves to switch liquid paths and 12-port valves can be installed.

Company：テカンジャパン
Price：100,000 yen-500,000 yen

dispenser
Syringe Pump
Positive Displacement Pump
Syringe Pump

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Development of superior coating equipment: Syringe Pump Excalibur

Tekan's syringe pump, known for its proven track record in the development of coating devices that require high precision and accuracy. It is compact yet designed to be extremely robust.

Fluid control syringe pump that does not waste expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) while being cost-effective. It allows for easy control of flow rate from the start with a delivery unit that does not depend on unstable external pressure and flow controllers. Volume range per delivery: 2nl to 5ml (*) Volume adjustment unit: minimum 2nl (*) Flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min (*) * Depends on the capacity of the installed syringe. Example: When using a 2.5ml syringe Volume adjustment unit: minimum 104nl Flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, and a report function to notify errors during abnormal conditions. Easy linkage operation with I/O terminals. Has a working volume memory function. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment.

Company：テカンジャパン
Price：Other

Other physicochemical equipment
Analytical Equipment and Devices
Syringe Pump
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Low-flow application compatible ultra-high resolution syringe pump Centris

High-precision syringe pump capable of adjusting liquid delivery volume and flow rate from the nanoliter unit.

The Centris Pump is a compact syringe pump module for device integration that offers high accuracy, reliability, and reproducibility, with extremely low pulsation. The new Centris Pump features a simple and robust mechanical design that requires minimal maintenance. It has the smallest footprint among OEM syringe pumps and is fully RoHS compliant. Applications: Flow cytometers, micro-dosing in wafer manufacturing, titration devices, microfluidics, thin-layer chromatography production, pathogen detection devices, atmospheric analysis devices, and more. ★ Please download the catalog to view the technical specifications ★ ＝＝＝＝＝ Features ＝＝＝＝＝ - Can be equipped with long-life ceramic valves - High reproducibility: 0.05% CV or less/FS - High resolution: 181,490 steps (liquid delivery volume and flow rate can be adjusted in increments of 0.3 nl) - Programmable flow rate: 5 nl/s to 12.5 ml/s (up to one stroke possible in 50 hours) - Compact size (installation space: 69×45 mm) * For more details, please download the PDF or contact us.

Company：テカンジャパン
Price：100,000 yen-500,000 yen

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【臨床検査装置向け】マルチチャネルシリンジポンプ XMP6000

テカンが誇るマルチシリンジポンプ全世界でたくさんの実績。多様な溶液を扱うアプリケーションへ 48000ステップ

テカンで定評ある装置組み込み用マルチチャンネルシリンジポンプ２，４，６，８本シリンジのアレンジが可。高精度シリンジポンプを集約化して測定器の内部の空間にゆとりをもたらし、装置の小型化にも貢献。貴重な試薬のデッドボリュームを減らすことへ貢献。ポンプアドレスを単一にして操作。体外診断薬自動測定装置、多様な反応液を添加する反応、さらに1台で様々なアプリケーションをこなすには最適。液種の数に対して、最小限のスペース、最少のコマンド数で制御可能使用例：マルチウェルプレートへの同時分注、同時吐出を必要とする製造システム、血球処理システム、複数の溶液を処理する分析装置、体外診断薬用分析装置搭載可能なシリンジ容量はカタログをご参照ください。

Company：テカンジャパン
Price：Other

Syringe Pump
Lab metering pump
Lab Syringe Pump
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It won't break even if it discharges! High-voltage resistant syringe pump.

This is a syringe pump that is active in fields such as electrospinning.

【Features】 ■ Insulation structure that does not break even when discharged under high voltage ■ Real-time display of the total amount and delivery amount of the solution ■ Ability to change the delivery amount during operation and quickly set the optimal delivery amount ■ Capable of delivering high-viscosity solutions with a high-torque motor

Company：メックナノファイバー事業
Price：Other

Syringe Pump
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[Research Material] Global Market for Micro Syringe Pumps

World Market for Micro Syringe Pumps: 1 Channel, 2 Channels, Hospitals, Clinics, Laboratories, Others

This research report (Global Micro Syringe Pump Market) investigates and analyzes the current state and future outlook of the global micro syringe pump market over the next five years. It includes information on the overview of the global micro syringe pump market, trends of major companies (sales, selling prices, market share), market size by segment, market size by major regions, and distribution channel analysis. The segments by type in the micro syringe pump market focus on 1-channel and 2-channel, while the segments by application target hospitals, clinics, laboratories, and others. The regional segments are divided into North America, the United States, Europe, Asia-Pacific, Japan, China, India, South Korea, Southeast Asia, South America, the Middle East, and Africa to calculate the market size of micro syringe pumps. It also includes the market share of major companies in the micro syringe pump sector, product and business overviews, and sales performance.

Company：マーケットリサーチセンター
Price：Other

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Syringe Pump Product List and Ranking from 20 Manufacturers, Suppliers and Companies | IPROS GMS

Syringe Pump Manufacturer, Suppliers and Company Rankings

Syringe Pump Product ranking