Syringe pump capable of accurate and precise liquid delivery for semiconductor manufacturing equipment.
Applying chemicals in semiconductor manufacturing 'more accurately and precisely.' Easily meet the equipment specifications.
In semiconductor manufacturing, where precise pattern formation and advanced process control are required, accurate dispensing of chemicals is essential. The Cavro pump series from Tecan provides optimal solutions for precise liquid delivery in the range of 1μl to 50ml, making it easy to integrate into customers' equipment. Syringe Pumps: Centris, Xcalibur, XLP6000 Multi-channel Syringe Pump: XMP6000 Delivery Speed: 17nl/min to 2.4L/min (actual dispensing volume monitored via encoder) Reliable liquid delivery at actual capacity without relying on flow controller adjustments. [Application Scenes] - Spin coating - Spray coating - Precise droplet dispensing of photoresist onto wafers - Slurry addition in chemical mechanical polishing (CMP) - Chemical formulation in cleaning and etching processes - Automatic titration adjustment - Automatic dilution - Additive management in plating processes (electrolytic and non-electrolytic) - Packaging processes, etc.
- 企業:テカンジャパン
- 価格:100,000 yen-500,000 yen