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  6. 【Semiconductor Manufacturing Process】Low Pulsation / Micro / Ultra High Resolution Syringe Pump

【Semiconductor Manufacturing Process】Low Pulsation / Micro / Ultra High Resolution Syringe Pump

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Cavro Centris pump

last updated:Jun 18, 2026

テカンジャパン
テカンジャパン
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It enables extremely precise flow control, achieving a very low pulsation and smooth flow of liquid.

The optimal solution for the needs of "uniform film thickness," "constant concentration of trace components," and "accurate liquid cut-off at the nozzle tip" in semiconductor manufacturing! Please consider our low-pulse, high-reproducibility syringe pump. ===== Overview ===== The Centris Pump is a compact syringe pump module with high accuracy, reliability, and reproducibility. Its simple yet robust mechanical design requires minimal maintenance. It has the smallest footprint among OEM syringe pumps and is fully RoHS compliant. ★ Please download the catalog to view the technical specifications of the Centris Pump ★ ===== Features ===== - Long-life ceramic valves and ceramic syringes Capable of handling high liquid temperatures - High reproducibility: less than 0.05% CV/FS - High resolution: 181,490 steps - Programmable flow rate: 5 nl/s to 5 ml/s - Compact size (installation space: 69×45 mm) * For more details, please download the PDF or contact us.

    CoaterEtching EquipmentCMP Equipment
Tec009111_Cavro

【Semiconductor Manufacturing Process】Low Pulsation / Micro / Ultra High Resolution Syringe Pump

Tec009111_Cavro Centris Pump.png
Tec009111_Cavro Centris Pump.png
  • Related Link - https://partnering.tecan.co.jp/cavro-centris-pump-…
  • Special site - Product/service details - https://pr.mono.ipros.com/tecan_oem/product/

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Applications/Examples of results

Achieves ultra-high precision in small-volume pipetting. ■ Management of chemical solutions in semiconductor manufacturing processes (coating, cleaning, etching, etc.) ■ Microfluidics ■ Chromatography ■ Flow cytometry ■ Surface plasmon resonance (SPR) devices

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[Case Study] Examples of Use in Remote Analysis Devices Requiring High Precision and Toughness

[Case Study] Examples of Use in Remote Analysis Devices Requiring High Precision and Toughness

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[Case Study] The Most Accurate and Durable Syringe Pump: Centris Pump

[Case Study] The Most Accurate and Durable Syringe Pump: Centris Pump

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[Case Study] Example of Utilizing Centris Syringe Pump and OEM Robot Arm in Molecular Interaction Analysis Device

[Case Study] Example of Utilizing Centris Syringe Pump and OEM Robot Arm in Molecular Interaction Analysis Device

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Long-lasting syringe pump

Long-lasting syringe pump

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Comprehensive catalog of the trusted Cavro brand pumps and dispensing modules that enable ultra-micro to large volume, ultra-slow to high-speed high-precision liquid dispensing.

Comprehensive catalog of the trusted Cavro brand pumps and dispensing modules that enable ultra-micro to large volume, ultra-slow to high-speed high-precision liquid dispensing.

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Cavro Liquid Handling Components Catalog

Cavro Liquid Handling Components Catalog

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Company information

テカンジャパン

テカンジャパン

Pharmaceuticals and Biotechnology

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Tecan is a company that was established in Switzerland in 1980, specializing in the manufacturing and development of life science research support equipment. With the support of many customers, we were able to celebrate our 30th anniversary in Japan in 2022. Tecan Japan operates two businesses. One is the life sciences business, which delivers Tecan-branded products such as automated pipetting systems and microplate readers to end-users. The other is the partnering business, which provides components and equipment as OEM products for partner companies. Our customers span a wide range of fields, including disease research, drug discovery, biotechnology, clinical testing (such as cancer diagnosis, infectious disease diagnosis, and testing centers), scientific analysis, and robotic surgery. Our mission is to improve people's lives and health. Tecan Japan aims to contribute to global health care innovation from the life sciences industry to clinics by supporting our customers' daily activities.

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