Last Updated： Aggregation Period:Dec 10, 2025～Jan 06, 2026
This ranking is based on the number of page views on our site.
Last Updated： Aggregation Period:Dec 10, 2025～Jan 06, 2026
This ranking is based on the number of page views on our site.
Last Updated： Aggregation Period:Dec 10, 2025～Jan 06, 2026
This ranking is based on the number of page views on our site.
631～645 item / All 989 items
This is a vacuum drying device that meets the demands of various research and development needs with a pressure of 10^1 Pa.
The exterior features a beautiful hairline finish made of all stainless steel, and it can be connected to a vacuum pump tailored to the installation location. It is a vacuum drying device that effectively utilizes space, such as on a laboratory bench.
Solve the issues with dry vacuum pumps! High-capacity jacket-type Roots vacuum pump. No waste liquid disposal costs!
【Features】 - Supports solidification and polymerization inside the pump - Addresses scale adhesion in the jacket section - No waste liquid treatment costs as it does not use sealing liquid - Ideal for environmental measures such as ISO14001 and PRTR - Compact design with direct cooling method, eliminating the need for multiple coolers - Supports cleaning inside the casing - Optimal for CO, PSA, and solvent recovery
Reliable VP-type vacuum pumps that continue to meet the diverse needs of the industry.
The VP-type vacuum pump is a multi-stage roots dry vacuum pump that employs a cooling technology unmatched by other companies. The YKS direct inlet-target cooling method, which achieves tight operation in a roots configuration and enables high vacuum pumping, is a new cooling technology developed based on unique technology. In a roots vacuum pump, the rotors and the casing rotate without contact while maintaining a slight clearance. This results in the significant feature of being a "dry, oil-free type." However, the slight clearance necessary for non-contact rotation can decrease due to thermal expansion caused by gas compression heat, leading to eventual contact unless the rotors can remove the compression heat. Our developed direct inlet-target cooling method adopts a structure that directly cools the interior of the rotor with a coolant, thereby maintaining a constant clearance and stable vacuum level while providing numerous excellent features. In traditional cooling methods, the production of stainless steel vacuum pumps was impossible due to the large thermal expansion rate. By leveraging the excellent features of the direct cooling method, we have successfully developed a stainless steel vacuum pump that offers outstanding performance for the suction of corrosive gases.
Our Roots-type vacuum pump is a multi-stage Roots vacuum pump that utilizes unique cooling technology.
Exhaust can achieve a clean vacuum without containing sealing water or sealing oil, similar to a sealed liquid vacuum pump. It operates across the entire range from atmospheric pressure to the inlet shut-off using a Roots type, pursuing ease of use.
Our Roots-type vacuum pump is a multi-stage Roots vacuum pump that utilizes unique cooling technology.
Exhaust can achieve a clean vacuum without containing sealing water or sealing oil, similar to a sealed liquid vacuum pump. It operates over the entire range from atmospheric pressure to the inlet shut-off using a Roots type, focusing on ease of use.
Our Roots-type vacuum pump is a multi-stage Roots vacuum pump that utilizes unique cooling technology.
Exhaust can achieve a clean vacuum without containing sealing water or sealing oil, similar to a sealed liquid vacuum pump. It operates throughout the entire range from atmospheric pressure to the inlet shut-off using a Roots type, focusing on ease of use.
The fluororesin lining construction for the gas connection section is optimal for the inhalation of halogen-based gases and strongly acidic gases.
The Roots-type dry vacuum pump VP series features a fluororesin lining in the gas contact area. The thickness of the fluororesin lining is over 150μm, providing durability against halogen gases and strong acidic gases. It can be utilized in applications such as reagents, agriculture, chemicals, and high-performance materials. 【VP4 Series Lineup】 ■VP4-501 ■VP4-651 ■VP4-801 For more details, please contact us or download the catalog.
Prevent the deterioration of vacuum pump oil and damage to the internal mechanisms of the pump! Remove harmful water vapor.
The JRS series vacuum separator/filter protects vacuum pumps from harmful water vapor and liquids that can degrade vacuum pump oil or damage the internal mechanisms of the pump. The removal of harmful water vapor involves cooling it from a gaseous state to a liquid state for discharge. Additionally, solid particles such as dust contained in the fluid are removed by the final stage filter. 【Features】 - Easily cleanable fin-type heat exchanger that can be used for long periods under optimal conditions - Robust structure made of carbon steel - Efficient inlet accuracy - 25A cooling water supply port *For more detailed specifications, please download the catalog or contact us directly.
High-durability dry vacuum pump suitable for all processes! Specialized for process performance.
The "SDE Series" is a dry vacuum pump from Kashiyama Industry, which has gained high trust in a wide range of fields, including semiconductor and liquid crystal manufacturing. It employs a vertical screw with excellent anti-deposition performance, demonstrating high corrosion resistance due to structural materials and temperature settings. The unique screw design achieves energy savings. 【Examples of Compatible Processes】 ■ Metal-Etch ■ SA-CVD ■ Metal-CVD ■ PE-CVD ■ LP-CVD ■ ALD *For more details, please refer to the PDF document or feel free to contact us.
Large displacement pumps that accommodate the increase in diameter of wafers and FPDs.
The "SDL Series" is a dry vacuum pump from Kashiyama Industries, which has gained high trust in a wide range of fields, including semiconductor and LCD manufacturing. It accommodates the increasing size of wafers and FPDs. By combining units, it can achieve a large exhaust capacity, meeting requests for over 150,000 L/min. Furthermore, by ensuring exhaust speed on the atmospheric side, it shortens the cycle time through rapid exhaust of large load lock chambers. There is also a solvent exhaust specification available, so please inquire for details. 【Features】 ■ Accommodates the increasing size of wafers and FPDs ■ Shortens cycle time *For more details, please refer to the PDF materials or feel free to contact us.
TW-05A does not have an electromagnetic valve, while TW-05AS comes with an electromagnetic valve (anti-backflow).
The vacuum pump "TW-05A・TW-05AS" has the TW-05A without an electromagnetic valve and the TW-05AS with an electromagnetic valve (anti-backflow). The suction port diameter of the vacuum pump is 7/16-20UNF (1/4). The hose attachment screw size is M10×1.5 (with attachment) and can be used for both R12 and R134. The compression method is rotary vane. The weight is 6.9 kg. For more details, please download the catalog.
