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Tabletop Lamp Heating Device MILA-5000 Series

The semiconductor manufacturing process is gaining attention for RTP as an important heating technology due to advancements in high density and miniaturization.

The MILA-5000 series features high-speed heating and cooling, as well as clean heating, characteristic of infrared gold image furnaces. It is a compact and low-cost infrared lamp heating device that allows heating under flexible atmospheres, integrating a temperature controller and an atmosphere-variable chamber. Heating operations can be performed via USB connection on a computer, making data management easy.

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