The semiconductor manufacturing process is gaining attention for RTP as an important heating technology due to advancements in high density and miniaturization.
The MILA-5000 series features high-speed heating and cooling, as well as clean heating, characteristic of infrared gold image furnaces. It is a compact and low-cost infrared lamp heating device that allows heating under flexible atmospheres, integrating a temperature controller and an atmosphere-variable chamber. Heating operations can be performed via USB connection on a computer, making data management easy.
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basic information
【Features】 ○ Selection of any atmosphere: vacuum, gas, gas flow, or ambient air ○ Precise temperature control ○ Compact tabletop design ○ Easy execution of temperature program settings and external signal input from your personal computer ○ Ability to display temperature data during heating on your computer ● For other functions and details, please contact us.
Price information
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Delivery Time
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Applications/Examples of results
【Applications】 ○ Crystallization annealing of ferroelectric thin films ○ Diffusion annealing after ion implantation, oxidation film formation annealing ○ Sintering and alloying treatment of Si and compound wafers ○ Homogeneous heat annealing of glass substrates ○ Thermal cycling, thermal shock, thermal fatigue testing ○ Heating furnace for temperature ramping desorption tests ○ Catalytic effect testing ● For other applications and details, please contact us.
Detailed information
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【Option】CCD Camera Unit for Sample Observation Observation of samples during heating By installing the CCD camera unit for sample observation, you can capture real-time changes in the sample during heating onto a PC.
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【Option】Electrical Resistance Measurement Unit Electrical resistivity measurement during heat treatment By replacing the unit with the Electrical Resistance Measurement Unit and connecting it to your digital multimeter, you can measure electrical resistivity while heating the sample.
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【Option】Liquid Nitrogen Mist Rapid Cooling Unit Rapid cooling via liquid nitrogen mist spraying Rapid cooling from 1000°C to 0°C can be achieved in just two seconds.
Line up（3）
| Model number | overview |
|---|---|
| MILA-5000-P-F | (uniform temperature type)Temperature Range：RT ～ 800 °C |
| MILA-5000-P-N | (high temperature type)Temperature Range：RT ～ 1200 °C |
| MILA-5000-UHV | (high temperature type)Temperature Range：RT ～ 1000 °C |
Company information
Since its founding, Advance Riko has contributed to the development of science and technology in Japan and around the world, as well as to production activities, based on the spirit of customer-first principles, focusing on thermal property measurement devices across a wide temperature range from ultra-low to ultra-high temperatures, and infrared heating and cooling systems. We aim to provide better products, faster, at lower costs, with the best service. Under our unwavering corporate philosophy, Advance Riko will continue to make tireless efforts and dedicate ourselves to providing the best products and services to our customers, ensuring that we remain a company of value for our customers and society.
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