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[Case Study] 3D Analysis of the "Particle-PLUS" CCP Device

Introduction to Particle-PLUS Analysis Case: "Three-Dimensional Analysis of Capacitively Coupled Plasma (CCP)" Simulation Case

"Particle-PLUS" is a simulation software suitable for the research, development, and manufacturing of devices and materials using plasma. - It specializes in low-pressure plasma analysis. - By combining axisymmetric models with mirror-symmetric boundary conditions, it can quickly obtain results without the need for a full simulation of the entire device. - It excels in plasma simulation for low-pressure gases, where calculations using fluid models are challenging. - It supports 2D (two-dimensional) and 3D (three-dimensional) analyses, allowing for efficient analysis of complex models. - As a strength of our in-house developed software, customization to fit the customer's device is also possible. ◆ Supports various cases ◆ - Magnetron sputtering - PVD, plasma CVD - Capacitively coupled plasma (CCP) - Dielectric barrier discharge (DBD) - Electrophoresis, etc. ◆ Outputs various calculation results ◆ - Potential distribution - Density distribution/temperature distribution/generation distribution of electrons and ions - Particle flux and energy flux to the wall - Energy spectrum of electrons and ions at the wall - Density distribution/temperature distribution/velocity distribution of neutral gas, etc. *For more details, please feel free to contact us.

Company：ウェーブフロント本社
Price：Other

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Simerics MP+ is also used for cooling analysis of motors and batteries.

Not only applicable to hydraulic circuits such as engines and transmissions, but also has numerous application results in the analysis of oil cooling, water cooling, and air cooling circuits for motors and batteries!

PumpLinx is a fluid analysis software designed to calculate the transient characteristics of various volumetric pumps, compressors, and valves. It is developed based on the thermal fluid analysis software Simerics MP and utilizes all the features of Simerics MP. 【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsation and water hammer effects ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variation of flow field (velocity vectors, pressure), flow rate, fluid forces, and torque The biggest strength is the ability to automatically create meshes for clearances in the µm range, which is difficult with other general-purpose fluid analysis software!! Recently, there has been an increase in achievements with oil pumps for automobiles and construction machinery, with examples such as vane pumps for power steering and CVTs, and trochoidal pumps for engine lubrication. *There is a lot of information that cannot be posted online. Especially, please see a demo presentation for the actual mesh creation and movement!

Company：ウェーブフロント本社
Price：5 million yen-10 million yen

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Simerics MP+ is also used for motor cooling analysis.

Not only applicable to hydraulic circuits such as engines and transmissions, but also has numerous applications in the analysis of oil cooling, water cooling, and air cooling circuits for motors and batteries!

PumpLinx is a fluid analysis software designed to calculate the transient characteristics of various volumetric pumps, compressors, and valves. It is developed based on the thermal fluid analysis software Simerics MP and utilizes all the features of Simerics MP. 【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsation and water hammer effects ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variation of flow field (velocity vectors, pressure), flow rate, fluid forces, and torque Recently, there has been an increase in projects for oil cooling analysis of motors for automobiles, and when solving the VOF method with other CFD software, we have received inquiries such as: - Analysis time is too long - It is difficult to create fine calculation meshes - The solution diverges and does not converge Development source's SAE presentation paper on motor oil cooling: https://saemobilus.sae.org/content/2020-01-0168/

Company：ウェーブフロント本社
Price：5 million yen-10 million yen

Thermo-fluid analysis
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Cooling analysis of batteries also uses 'Simerics MP+'.

Not only applicable to hydraulic circuits such as engines and transmissions, but also has numerous achievements in the analysis of oil-cooled, water-cooled, and air-cooled circuits for motors and batteries!

PumpLinx is a fluid analysis software designed to calculate the transient characteristics of various positive displacement pumps, compressors, and valves. It is developed based on the thermal fluid analysis software Simerics MP, and utilizes all the features of Simerics MP. 【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsations and water hammer effects ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variation of flow field (velocity vectors, pressure), flow rate, fluid forces, and torque The greatest strength is the ability to automatically create meshes with clearances in the µm range, which is difficult for other general-purpose fluid analysis software!! Recently, there has been an increase in achievements with oil pumps for automobiles and construction machinery, such as vane pumps for power steering and CVTs, and trochoidal pumps for engine lubrication. *There is a lot of information that cannot be posted online. Especially, the actual mesh creation and movement should definitely be demonstrated in a demo presentation!!

Company：ウェーブフロント本社
Price：5 million yen-10 million yen

Thermo-fluid analysis

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Strong fluid analysis software for valves, 'Simerics MP+'.

Simulate the flow characteristics of valves and volumetric pumps! A CFD software specialized for valves and pumps that other CFD software struggles with!

PumpLinx is a fluid simulation tool for calculating the transient characteristics of various valves, volumetric pumps, and compressors. It is developed based on the thermal fluid simulation tool Simerics MP and utilizes all the features of Simerics MP. 【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsations and water hammer effects ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variations of flow field (velocity vectors, pressure), flow rate, fluid forces, and torque The biggest strength is the ability to automatically create meshes even for clearances in the µm range, which is difficult with other general-purpose fluid analysis software!! In addition to valve analysis, there has been an increase in achievements with oil pumps for automotive and construction machinery applications, such as vane pumps for power steering and CVTs, and trochoidal pumps for engine lubrication. *There is a lot of information that cannot be posted online. Especially, we encourage you to see the actual mesh creation and movement through a demo presentation!!

Company：ウェーブフロント本社
Price：5 million yen-10 million yen

Thermo-fluid analysis
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SimericsMP+: A powerful fluid analysis software for trochoidal pumps.

Simulating the flow characteristics of positive displacement pumps such as gear pumps and vane pumps! A CFD software specialized for pumps that other CFD software struggles with!

SimericsMP+ is a fluid simulation tool designed to calculate the transient characteristics of various volumetric pumps, compressors, and valves. It is developed based on the thermal fluid simulation tool Simerics MP and utilizes all the features of Simerics MP. 【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsations and water hammer effects ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variation of flow field (velocity vectors, pressure), flow rate, fluid forces, and torque The biggest strength is the ability to automatically create meshes even for clearances in the micrometer range, which is difficult with other general-purpose fluid analysis software!! Recently, there has been an increase in achievements for oil pumps used in automobiles and construction machinery, with examples such as vane pumps for power steering and CVT, and trochoidal pumps for engine lubrication. *There is a lot of information that cannot be posted online. Especially, please see the actual mesh creation and movement in a demo presentation!!

Company：ウェーブフロント本社
Price：5 million yen-10 million yen

Thermo-fluid analysis

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SimericsMP+: A Fluid Analysis Software Strong in Roots-Type Compressors

Simulating the flow characteristics of positive displacement pumps such as gear pumps and vane pumps! A CFD software specialized for pumps that other CFD software struggles with!

SimericsMP+ is a fluid simulation tool designed to calculate the transient characteristics of various volumetric pumps, compressors, and valves. It is developed based on the thermal fluid simulation tool Simerics MP and utilizes all the features of Simerics MP. 【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsation and water hammer effects ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variation of flow fields (velocity vectors, pressure), flow rate, fluid forces, and torque The biggest strength is the ability to automatically create meshes even for clearances in the µm range, which is difficult with other general-purpose fluid analysis software!! Recently, there has been an increase in achievements with oil pumps for automotive and construction machinery, with examples such as vane pumps for power steering and CVTs, and trochoidal pumps for engine lubrication. *There is a lot of information that cannot be posted online. Especially, we encourage you to see the actual mesh creation and movement through a demo presentation!

Company：ウェーブフロント本社
Price：5 million yen-10 million yen

Thermo-fluid analysis

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SimericsMP+ strong in twin-screw compressors

Simulating the flow characteristics of positive displacement pumps such as gear pumps and vane pumps! A CFD software specialized for pumps that other CFD software struggles with!

SimericsMP+ is a fluid simulation tool designed to calculate the transient characteristics of various volumetric pumps, compressors, and valves. It is developed based on the thermal fluid simulation tool Simerics MP and utilizes all the features of Simerics MP. 【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsation and water hammer effects ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variations of flow field (velocity vectors, pressure), flow rate, fluid forces, and torque The greatest strength is the ability to automatically create meshes even for clearances in the micrometer range, which is difficult for other general-purpose fluid analysis software!! Recently, there has been an increase in applications for oil pumps used in automobiles and construction machinery, with examples such as vane pumps for power steering and CVTs, and trochoidal pumps for engine lubrication. *There is a lot of information that cannot be posted online. Especially, we encourage you to see the actual mesh creation and movement through a demo presentation!!

Company：ウェーブフロント本社
Price：5 million yen-10 million yen

Thermo-fluid analysis

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SimericsMP+, the fluid analysis software for planetary gear systems.

Simulating the flow characteristics of positive displacement pumps such as gear pumps and vane pumps! A CFD software specialized for pumps that other CFD software struggles with!

SimericsMP+ is a fluid simulation tool designed to calculate the transient characteristics of various volumetric pumps, compressors, and valves. It is developed based on the thermal fluid simulation tool Simerics MP and utilizes all the features of Simerics MP. 【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsation and water hammer effects ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variation of flow field (velocity vectors, pressure), flow rate, fluid forces, and torque The biggest strength is the ability to automatically create meshes even for clearances in the µm range, which is difficult with other general-purpose fluid analysis software!! Recently, there has been an increase in achievements for oil pumps used in automobiles and construction machinery, with examples such as vane pumps for power steering and CVTs, and trochoidal pumps for engine lubrication. *There is a lot of information that cannot be posted online. Especially, please see a demo for the actual mesh creation and movement!!

Company：ウェーブフロント本社
Price：5 million yen-10 million yen

Thermo-fluid analysis

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[Case Study] Plasma Analysis of "Particle-PLUS" Dual Frequency CCP

Introduction to Particle-PLUS Analysis Case: "Plasma Analysis of Dual Frequency CCP" Simulation Case

This is a case study on plasma analysis of CCP (Capacitively Coupled Plasma) devices. Particle-PLUS specializes in plasma analysis within vacuum chambers and can perform high-speed simulations even when there are multiple electrodes or when applying overlapping frequencies. ◇ Features of 'Particle-PLUS' - Excels in low-pressure plasma analysis. - By combining axisymmetric models with mirror-symmetric boundary conditions, it can quickly obtain results without the need for full device simulations. - Specializes in plasma simulations for low-pressure gases, where fluid modeling is challenging. - Supports 2D (two-dimensional) and 3D (three-dimensional) analyses, efficiently handling complex models. - As a strength of our in-house developed software, customization to fit customer devices is also possible. ◆ Various calculation results can be output ◆ - Potential distribution - Density distribution/temperature distribution/generation distribution of electrons and ions - Particle flux and energy flux to the walls - Energy spectrum of electrons and ions at the walls - Density distribution/temperature distribution/velocity distribution of neutral gas and more. *For more details, please feel free to contact us.

Company：ウェーブフロント本社
Price：Other

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[Case Study] Cleaning Process Using Particle-PLUS: CCP

Introduction of Particle-PLUS Analysis Case: "Cleaning Process by CCP" Simulation Case

This is an analysis case regarding CCP (Capacitively Coupled Plasma) etching, which is one of the representative dry etching methods. Particle-PLUS specializes in plasma analysis within vacuum chambers and can perform simulations of etching rates and other parameters at high speed. ◇ Features of 'Particle-PLUS' - Excels in low-pressure plasma analysis. - By combining axisymmetric models with mirror-symmetric boundary conditions, results can be obtained quickly without the need for full device simulations. - Specializes in plasma simulations for low-pressure gases, where fluid modeling is challenging. - Supports both 2D and 3D, allowing for efficient analysis even with complex models. - As a strength of our in-house developed software, customization to fit customer devices is also possible. ◆ Various calculation results can be output ◆ - Potential distribution - Density distribution/temperature distribution/generation distribution of electrons and ions - Particle flux and energy flux to the walls - Energy spectrum of electrons and ions at the walls - Density distribution/temperature distribution/velocity distribution of neutral gas and more. *For more details, please feel free to contact us.

Company：ウェーブフロント本社
Price：Other

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Example: Particle-PLUS: GEC-CCP Device Plasma Analysis

Introduction to Particle-PLUS Analysis Case: "Plasma Analysis of GEC-CCP Device" 3D Simulation Case

This is a 3D analysis case related to CCP (Capacitively Coupled Plasma) etching, which is one of the representative dry etching methods. Particle-PLUS specializes in plasma analysis within vacuum chambers and can perform simulations of etching rates and other parameters at high speed. ◇ Features of 'Particle-PLUS' - Excels in low-pressure plasma analysis. - By combining axisymmetric models with mirror-symmetric boundary conditions, it can obtain results quickly without the need for full device simulations. - Specializes in plasma simulations for low-pressure gases, where fluid modeling is challenging. - Supports both 2D and 3D, allowing efficient analysis even for complex models. - As a strength of our in-house developed software, customization to fit customer devices is also possible. ◆ Outputs various calculation results ◆ - Potential distribution - Density distribution/temperature distribution/generation distribution of electrons and ions - Particle flux and energy flux to the walls - Energy spectrum of electrons and ions at the walls - Density distribution/temperature distribution/velocity distribution of neutral gas and more. *For more details, please feel free to contact us.

Company：ウェーブフロント本社
Price：Other

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[Example] Particle-PLUS: 3D Opposing Target Type Putter

Introduction to Particle-PLUS Analysis Case: "Counter Target Type Putter (3D Analysis)" Simulation Case

This is an analysis case of a counter-target sputtering method, which is one of the film deposition techniques that causes low damage to the substrate. 3D calculations have a higher computational cost compared to 2D calculations, but they allow for simulations that take into account more complex shapes and their effects. ◇ Features of 'Particle-PLUS' - Specializes in low-pressure plasma analysis. - By combining axisymmetric models with mirror-symmetric boundary conditions, results can be obtained quickly without the need to simulate the entire device. - Excels in plasma simulations in low-pressure gases, where calculations using fluid models are challenging. - Supports both 2D and 3D, allowing for efficient analysis even with complex models. - As a strength of our in-house developed software, customization to fit the customer's equipment is also possible. ◆ Various calculation results can be output ◆ - Potential distribution - Density distribution/temperature distribution/generation distribution of electrons and ions - Particle flux and energy flux to the walls - Energy spectrum of electrons and ions at the walls - Density distribution/temperature distribution/velocity distribution of neutral gas and more. *Please feel free to contact us for more details.

Company：ウェーブフロント本社
Price：Other

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Simerics MP+ is also used for oil cooling analysis of e-axles.

Analyze the oil cooling of the e-axle with Simerics, which has strong rotation and VOF capabilities! It's also suitable for switching from other general-purpose CFD solvers and particle methods.

【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in the liquid ■ Pressure pulsation, water hammer effect ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variation of flow field (velocity vectors, pressure), flow rate, fluid forces, and torque Recently, there has been an increase in projects for oil cooling analysis of e-axles for automobiles, and when solving the VOF method with other CFD software, we have received inquiries regarding: - Excessive analysis time - Difficulty in creating fine computational meshes - Divergence and failure to converge Additionally, even when analyzing with particle methods, we have received feedback that accurate thermal analysis cannot be performed, and it is only possible to determine the areas where oil is present. Our company has gained know-how that cannot be obtained solely from software sales by actually undertaking contracted work from Tier 1 customers. SAE presentation paper on motor oil cooling from the developer: https://saemobilus.sae.org/content/2020-01-0168/

Company：ウェーブフロント本社
Price：5 million yen-10 million yen

Thermo-fluid analysis
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Cooling analysis of the eAxle also uses "Simerics MP+".

Analyze the cooling of eAxle with Simerics, which has strong rotation and VOF capabilities! It's also suitable for switching from other general-purpose CFD solvers or particle methods.

【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsation, water hammer effect ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variation of flow field (velocity vectors, pressure), flow rate, fluid forces, and torque Recently, there has been an increase in projects for cooling analysis of eAxles for automobiles, and when solving the VOF method with other CFD software, we have received inquiries such as: - Analysis time is too long - It is difficult to create fine computational meshes - The solution diverges and does not converge Additionally, even when analyzing with particle methods, we have received feedback that accurate thermal analysis cannot be performed, and it can only determine the areas where oil is present. Our company undertakes actual contracted work from Tier 1 customers, gaining know-how that cannot be obtained solely from software sales. Development source's SAE presentation paper on motor oil cooling https://saemobilus.sae.org/content/2020-01-0168/

Company：ウェーブフロント本社
Price：5 million yen-10 million yen

Thermo-fluid analysis
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