We have compiled a list of manufacturers, distributors, product information, reference prices, and rankings for Dry Pump.
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Dry Pump Product List and Ranking from 5 Manufacturers, Suppliers and Companies

Last Updated: Aggregation Period:Oct 08, 2025~Nov 04, 2025
This ranking is based on the number of page views on our site.

Dry Pump Manufacturer, Suppliers and Company Rankings

Last Updated: Aggregation Period:Oct 08, 2025~Nov 04, 2025
This ranking is based on the number of page views on our site.

  1. 伯東 本社 Tokyo//Electronic Components and Semiconductors
  2. null/null
  3. 神港精機 東京支店 Tokyo//Industrial Machinery
  4. 4 エドワーズ Chiba//Industrial Machinery
  5. 5 協和コーポレーション Tokyo//Other manufacturing

Dry Pump Product ranking

Last Updated: Aggregation Period:Oct 08, 2025~Nov 04, 2025
This ranking is based on the number of page views on our site.

  1. Dry Pump MVP Series 伯東 本社
  2. Dry pump (dry vacuum pump) SST/SSX series 神港精機 東京支店
  3. Dry Pump A Series 伯東 本社
  4. 4 ドライポンプ 小型標準KRFシリーズ
  5. 4 Dry Pump ACP Series 伯東 本社

Dry Pump Product List

16~22 item / All 22 items

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New Dry Pump EDO Series Exhaust Speed 72–85 m³/h

This is a scroll-type vacuum pump that can be used in the low vacuum range for general industrial applications.

The EDO series is a scroll-type dry pump. The vacuum chamber consists of two scrolls, one fixed and the other rotating in an eccentric state, which traps, compresses, and exhausts the target gas, achieving a pressure capability of 150 Pa. It can operate continuously across all pressure ranges and features a simple structure that allows for maintenance at the customer site. It achieves high water vapor exhaust capability through a gas ballast function and reduces power consumption with a blow-off valve that bypasses gases with high motor loads near atmospheric pressure. The motor is air-cooled and supports frequencies of 50/60 Hz.

  • Vacuum pump
  • Vacuum Equipment

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Dry Pump ACP Series

Industry-leading basic performance

• Clean application use • Long maintenance cycle, approximately 2.5 years (22,000 hours) of continuous operation *ACP15 is 20,000 hours • Particle-free and clean exhaust • Air-cooled: no cooling water required *Only ACP120G is water-cooled • He leak rate 5×10-9 Pa m3/s ⇒ Ideal for gas recovery and gas circulation *For CP version • A diverse lineup available for various applications 1. Standard model: For clean processes 2. G version: For corrosive gas exhaust 3. CV version: For steam exhaust 4. CP version: For gas circulation 5. R version: Radiation-resistant specification • A variety of options available: Particle filters, external silencers, low-noise covers, etc. • Single-phase/three-phase motor options available

  • Vacuum pump

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Dry Pump A Series

Industry-leading basic performance

A100L / A200L • Ideal dry pump for use in transfer chambers for load locks and clean processes • Low vibration, high throughput: capable of 300 cycles per hour in a 20L L/L chamber • Achieves low power consumption through the use of a high-efficiency motor • Compact design with a footprint of 0.17m²; can be positioned vertically or horizontally • Can be stacked in two layers (horizontal only with the intake facing) A103P • For medium processes (etchers, ion implantation, PVD, etc.) • Energy-saving and space-saving A4 Series • Achieves low power consumption through a multi-root structure and high-efficiency motor • Suppresses the accumulation of by-products through heater temperature control • Long pump life due to corrosion-resistant nickel coating (XN model) • Extends the operating time of process equipment with excellent particle exhaust capability • Enhanced monitoring features for better control of pump status (cooling water sensor, vibration box, etc.) • Prevents clogging in the pump and exhaust piping with hot N2 • Complies with IP33, SEMI S2, and UL standards

  • A4-Serie.jpg
  • Vacuum pump

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