Dry Vacuum Pump Product List and Ranking from 17 Manufacturers, Suppliers and Companies

Vertical Dry Vacuum Pump for Chemical Processes "TRV Series"

Extremely robust against condensate! Vertical dry vacuum pump for chemical processes.

The "TRV Series" is a versatile dry vacuum pump (Roots vacuum pump) uniquely developed as a vacuum pump that is strong against condensable gases. The gas flow path is arranged to flow from the top to the bottom in a Down-Flow manner, allowing mist and liquids condensed inside the pump, which are drawn in with the gas, to easily flow down to the discharge port and be expelled or collected under atmospheric pressure. Therefore, it is an extremely robust pump against the inflow of mist and condensate from gases. In addition to the standard FC material, corrosion-resistant materials are also available for selection. 【Features】 ○ Strong against liquids ○ Energy-saving and high-performance design ○ Low temperature rise ○ Capable of drawing high-temperature gases ○ Small installation footprint For more details, please contact us or download the catalog.

Company：Unozawa-gumi Iron Works, Limited
Price：Other

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Dry Vacuum Pump for Chemical Processes "TRM Series"

Ideal for the suction of condensable gases! General-purpose dry vacuum pump for chemical processes.

The "TRM Series" is a general-purpose dry vacuum pump (Roots vacuum pump) with many years of experience and numerous achievements. It can operate efficiently and stably at a consistent temperature thanks to the intermediate cooler. Additionally, it is capable of recovering condensates such as solvents and is suitable for suctioning condensable gases in vacuum drying, distillation, and degassing processes. The dry vacuum pump can cover a wide exhaust speed range from approximately 2m³/min to 35m³/min, and it can also accommodate special specifications made of corrosion-resistant materials such as stainless steel. 【Features】 ○ Wide operating range ○ Completely dry ○ No water contamination ○ Long-term continuous operation For more details, please contact us or download the catalog.

Company：Unozawa-gumi Iron Works, Limited
Price：Other

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TRV Series Vertical Dry Vacuum Pumps Compatible with Thick Film Fluororesin Coating

For the suction of highly corrosive acidic and alkaline gases. Adopts a thick film fluororesin coating (200μm). The unique vertical structure facilitates the recovery of condensed liquids.

The lineup of the vertical dry vacuum pump "TRV Series," suitable for chemical processes, has been enhanced with a thick film fluororesin coating. It can handle hard processes that involve highly corrosive acidic and alkaline gases that cannot be managed with stainless steel. Its unique vertical structure is designed so that the gas flow path runs from the top to the bottom, allowing mist and liquids condensed inside the pump, which are drawn in with the gas, to flow down to the discharge port and be easily expelled and recovered under atmospheric pressure. Additionally, its small footprint makes it suitable for integration into equipment. 【Features】 ■ Compatible with 200μm thick film fluororesin coating ■ Stable operation possible from atmospheric pressure to cutoff operation ■ Capable of drawing high-temperature gases up to 120°C ■ Wide vacuum range supported by combination with mechanical boosters ■ Electric motor can be explosion-proof *For more details, please download the PDF or feel free to contact us.

Company：Unozawa-gumi Iron Works, Limited
Price：Other

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Dry Vacuum Pump "TRM Series" for Vacuum Distillation and Vacuum Concentration

Compatible with high vacuum and large airflow specifications depending on the combination! General-purpose dry vacuum pump for chemical plants.

The "TRM Series" is a general-purpose dry vacuum pump with a roots design, backed by years of experience and numerous achievements. It can operate efficiently at a stable temperature thanks to an intermediate cooler. Additionally, it is capable of recovering condensed liquids such as solvents and is ideal for suctioning condensable gases in processes like vacuum drying, distillation, and degassing. This versatile dry vacuum pump covers a wide range of pumping speeds from approximately 2m³/min to 35m³/min and can be customized to special specifications using corrosion-resistant materials such as stainless steel. 【Features】 ○ Wide operating range ○ Completely dry ○ No water contamination ○ Long-term continuous operation For more details, please contact us or download the catalog.

Company：Unozawa-gumi Iron Works, Limited
Price：Other

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Dry Vacuum Pump GR Series

This is a pump with a simple structure designed for general industrial use. 【ULVAC】

The GR Series dry vacuum pumps are designed with a simple structure for general industry, based on the proven and reliable LR and HR series. They can be used for high-load applications such as repeated exhaust from atmospheric pressure to vacuum and continuous operation in high-pressure areas. They are ideal for exhausting load lock chambers that require high throughput. 【Product Lineup】 ○ GR60A ○ GR90A ○ GR180A For more details, please contact us or download the catalog.

Company：アルバック／ULVAC, Inc.
Price：Other

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Dry Vacuum Pump LR/HR/UR Series

Achieved high durability in hard processes such as CVD and dry etching. [ULVAC]

The LR/HR/UR series has achieved high durability in hard processes such as CVD and dry etching through the effective utilization of compression heat, thanks to its unique high-temperature uniform heating technology. In light processes, it is possible to reduce power consumption by up to approximately 70% in combination with ECO-SHOCK. Additionally, it improves maintainability and reduces noise, and all models are CE compliant (optional). 【Product Lineup】 ○ LR/HR60 ○ LR/HR90 ○ LR180 ○ LR421 ○ LR421-T, etc. For more details, please contact us or download the catalog.

Company：アルバック／ULVAC, Inc.
Price：Other

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Dry vacuum pump Rocker 300C

It is a small vacuum pump suitable for reduced pressure filtration and reduced pressure drying.

This is a solvent-resistant specification of the Rocker 300 dry vacuum pump. The pump head and diaphragm are coated with PTFE, making them resistant to corrosive gases except for strong acids and strong alkalis. It can be used for a wide range of applications, including distillation, concentration, and vacuum filtration using solvents. A vacuum regulator and trap bottle are included as standard.

Company：柴田科学
Price：10,000 yen-100,000 yen

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Standard Type Dry Vacuum Pump KRF Series

Orion Machinery / Vacuum Pump. Achieves safe design, low operating noise, and long lifespan. Environmentally friendly next-generation pump.

■Safe design, environmentally friendly, CE marking compliant. ■Low operating noise, with a noise reduction of 3dB (compared to conventional models) due to quiet design. ■30% longer lifespan due to the adoption of new material blades (compared to conventional models). ■Compliant with RoHS directive.

Company：TOEI KAISHA, LTD.
Price：Other

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Large Standard Dry Vacuum Pump KRF Series

Orion Machinery/Vacuum Pump. Safe design and low operating noise achieved. Environmentally friendly next-generation pump.

■Safe design, environmentally friendly, CE marking compliant. ■Low operating noise, with a noise reduction of 3dB (compared to conventional models) due to quiet design. ■10% increase in lifespan due to the adoption of new material blades (compared to conventional models). ■Compliant with RoHS directive.

Company：TOEI KAISHA, LTD.
Price：Other

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Combination Package Type Dry Vacuum Pump CBXP Series

Orion Machinery/Vacuum Pumps. Enhanced product lineup through packaging series. Various combinations such as vacuum-blower, vacuum-vacuum, blower-blower, etc.

■Enhanced product lineup through package series. We have prepared 19 models with various combinations such as vacuum-blower, vacuum-vacuum, and blower-blower. ■Achieved low operating noise. Reduced by 3 to 5 dB compared to our previous models. ■Equipped with proven standard pumps, improving maintainability.

Company：TOEI KAISHA, LTD.
Price：Other

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High Vacuum Dry Vacuum Pump KHA Series

Orion Machinery/Vacuum Pump. Continuous operation is possible at a pressure of 8 kPa or lower.

■Continuous operation is possible at a pressure of 8 kPa or lower. ■The operating vacuum level is high, making it ideal for automatic machines (such as mounting machines) for small components like electronic parts.

Company：TOEI KAISHA, LTD.
Price：Other

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High Vacuum Dry Vacuum Pump KHH

Orion Machinery/Vacuum Pump. Achieves continuous operation at high vacuum of 1.3 kPa [abs] in a dry state.

■Can be continuously used under conditions of an absolute pressure of 1.3 kPa or lower, making it ideal for various industries that require high vacuum. ■It is a compact type directly connected to the motor flange. ■It operates quietly and has a long lifespan.

Company：TOEI KAISHA, LTD.
Price：Other

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Roots-type dry vacuum pump

Gas connection section fluororesin lining construction! Suitable for the intake of halogen-based gases and strongly acidic gases.

The "Roots-type dry vacuum pump" is a product that features fluororesin lining in the gas contact area. The thickness of the fluororesin lining is over 300μm, providing durability against halogen gases and strong acidic gases. Precision finishing allows for thick lining and extremely small clearances. It can be utilized in applications such as semiconductors, pharmaceuticals, chemicals, and high-performance materials. 【Features】 ■ Fluororesin lining in the gas contact area ■ Fluororesin lining over 300μm ■ Suitable for the intake of halogen gases and strong acidic gases *For more details, please feel free to contact us.

Company：サーフ工業
Price：Other

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Dry pump (dry vacuum pump) for vacuum sintering furnace

The best dry pump for replacing an oil rotary vacuum pump.

In vacuum sintering furnaces, the binder that scatters can accumulate in oil rotary vacuum pumps, leading to failures, and the oil can become contaminated, necessitating frequent oil changes. Our dry pumps have a structure that minimizes binder accumulation inside, preventing failures and significantly reducing the running costs associated with oil changes. ● Replacing oil rotary vacuum pumps with dry pumps in vacuum sintering furnaces is currently a trend. ● Our uniquely designed screw rotor discharges the sucked binder. In typical dry pumps, binders accumulate inside, causing failures. ● With the optional cleaning set, it is possible to wash away any remaining binder inside while the unit is installed. ● By introducing seal gas and purge gas, contamination of bearings, gears, etc., is prevented. ● Disassembly work (condition checks, consumable replacements, internal cleaning) can be easily performed on-site, minimizing running costs.

Company：神港精機東京支店
Price：Other

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High-performance screw-type dry pump SCREWLINE

The new design screw rotor demonstrates excellent exhaust performance!

**Main Features** ◆ Environmentally friendly, completely oil-free ◆ Exhaust speed: 250 m³/h (SP250), 630 m³/h (SP630) ◆ Excellent exhaust performance achieved with newly designed screw rotor (maximum achievable vacuum: below 1 Pa) ◆ Newly designed flushing kit (optional) dramatically reduces internal cleaning time and costs ◆ Completely air-cooled (water cooling available as an option) ◆ Unique bearing structure eliminates the need for bearing removal during maintenance, significantly reducing regular maintenance time ◆ Energy-efficient design ◆ Equipped with a purge gas function that fully protects the sealing area from particle intake, such as binders ◆ Features a unique monitoring function, SP Guard, which continuously displays operating conditions (vibration, internal temperature, back pressure, etc.) on an LCD monitor

Company：ライボルト
Price：Other

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Exchange Service: Managing Downtime

A sustainable and comprehensive maintenance solution that minimizes downtime during the maintenance period at a fixed cost.

Rivolt's exchange service for preventive maintenance. It allows for easy implementation of preventive maintenance, and the costs are fixed expenses only.

Company：ライボルト
Price：Other

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Dry vacuum pump "Auto Drain Trap AADT"

Proposal for switching from a water-sealed vacuum pump to a dry vacuum pump.

The "Auto Drain Trap AADT" is a dry vacuum pump that prevents liquid from reaching the vacuum pump even when gas and liquid (drain) are simultaneously suctioned. It removes 99% of liquids such as water, allowing for the discharge of drains without compromising vacuum levels during vacuum pump operation, enabling long hours of continuous operation. 【Features】 ■ Compared to water-sealed pumps, electricity and water costs are about 30% lower. ■ Drain discharge is possible while operating continuously (Vacuum level: -50 to -90 kPa). ■ Drain discharge rate: - 50Hz regions: 20L/min - 60Hz regions: 25L/min *For more details, please refer to the PDF document or feel free to contact us.

Company：アンレット
Price：Other

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Compact Dry Vacuum Pump DSP250/DSP500

No cooling water needed, compact custom design! Over 20,000 hours of long lifespan!

The compact dry vacuum pump is a small, lightweight, and portable type of vacuum pump that is resistant to disturbances. Its compact design makes it convenient for transportation and allows for flexible installation without taking up much space. The bearing life exceeds 20,000 hours, ensuring long-lasting performance. It is widely used in various applications such as SEM, medical devices, analytical instruments, and accelerators. 【Product Features】 ○ Exhaust speeds of 230L/min and 500L/min available ○ Achievable pressure of 0.5Pa ○ Easy to move with a compact design (15-20kg) ○ Completely oil-free with no lubricating oil used ○ Can be used as an auxiliary pump for TMP ● For more features and functions, please refer to the catalog or contact us.

Company：Osaka Vacuum, Ltd.
Price：Other

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Energy-saving dry vacuum pump ER100D/ER100DC

Achieving top-class energy efficiency, compact size, and lightweight even among the same class!

The energy-saving dry vacuum pump ER100D/ER100DC has achieved top-class energy efficiency, compactness, and lightweight design among dry vacuum pumps in the same class. It is energy-efficient, with a power consumption of 400W at the target pressure. It is compact and lightweight, with a footprint of 0.11m² (230×450mm) and a weight of 60kg. It also reduces cooling water and purge gas usage, resulting in lower utility costs. Compliant with international standards, we offer product specifications tailored to various applications. The ER100D is ideal for exhaust in light-load, clean processes, while the ER100DC uses highly corrosion-resistant materials to handle exhaust of corrosive gases. For more details, please contact us or refer to the catalog.

Company：Osaka Vacuum, Ltd.
Price：Other

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Air-cooled dry vacuum pump FR060D

Continuous operation is possible under atmospheric pressure! Ideal for drying, road lock chambers, and exhaust in transport chambers!

Air-cooled dry vacuum pumps are designed for continuous operation under atmospheric pressure. They can handle water vapor intake and maintain a constant exhaust speed up to the point of reach. They are widely used for applications such as exhaust in load lock chambers and transport chambers, as auxiliary pumps for high vacuum pumps, exhaust for analysis and measurement equipment, and exhaust for accelerators. 【Product Features】 ■ Exhaust speed during open operation: 800 L/min ■ Water vapor handling capacity: 500 g/hr ■ Exhaust speed: 1000 L/min *For more details, please contact us or download the catalog for further information.

Company：Osaka Vacuum, Ltd.
Price：Other

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Rotary vane dry vacuum pump KVT3 series

A medium-sized dry vacuum pump that achieves low maintenance and running costs with a long lifespan. 【Features】 ○ Completely dry and oil-free ○ Lightweight and compact design with integrated or direct-coupled motor ○ Maintenance-free ○ Quiet operation (low operating noise) with exceptional durability ○ Continuous operation at the desired pressure is possible ○ Optional rust-resistant type available, capable of handling humid air intake ● For other functions and details, please download the catalog.

Company：ベッカーエアーテクノ東京本社、大阪営業所、東関東サービスセンター
Price：Other

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Becker Dry Vacuum Pump Comprehensive Catalog

This is the comprehensive catalog of rotary vane dry pumps handled by Becker Aerotech.

We have a wide variety of completely dry, oil-free vacuum blower combination dry pumps listed. 【Featured Products】 ○ Dry Vacuum Pump KVT3 Series ○ Dry Vacuum Pump VT4 Series ○ Dry Vacuum Pump VTLF Series ○ Drive Blower Pump DT4 Series ○ Drive Blower Pump KDT3 Series ○ Drive Blower Pump DTLF Series ○ Dry Combination Pump T4 Series ○ Dry Combination Pump DVT3 Series, and more ◆◆ If you would like a catalog, please contact us through the inquiry form ◆◆ ? You can view part of the lineup from the download ?

Company：ベッカーエアーテクノ東京本社、大阪営業所、東関東サービスセンター
Price：Other

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Teflon diaphragm type dry vacuum pump MD/MZ series

Outstanding corrosion resistance and ease of handling.

The use of Teflon-based components in the vacuum chamber demonstrates excellent corrosion resistance against the suction of organic solvent gases and corrosive gases.

Company：佐藤真空
Price：Other

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Roots Type Dry Vacuum Pump VP4 Series

The fluororesin lining construction for the gas connection section is optimal for the inhalation of halogen-based gases and strongly acidic gases.

The Roots-type dry vacuum pump VP series features a fluororesin lining in the gas contact area. The thickness of the fluororesin lining is over 150μm, providing durability against halogen gases and strong acidic gases. It can be utilized in applications such as reagents, agriculture, chemicals, and high-performance materials. 【VP4 Series Lineup】 ■VP4-501 ■VP4-651 ■VP4-801 For more details, please contact us or download the catalog.

Company：四葉機械製作所
Price：Other

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Dry vacuum pump "SDE series"

High-durability dry vacuum pump suitable for all processes! Specialized for process performance.

The "SDE Series" is a dry vacuum pump from Kashiyama Industry, which has gained high trust in a wide range of fields, including semiconductor and liquid crystal manufacturing. It employs a vertical screw with excellent anti-deposition performance, demonstrating high corrosion resistance due to structural materials and temperature settings. The unique screw design achieves energy savings. 【Examples of Compatible Processes】 ■ Metal-Etch ■ SA-CVD ■ Metal-CVD ■ PE-CVD ■ LP-CVD ■ ALD *For more details, please refer to the PDF document or feel free to contact us.

Company：樫山工業
Price：Other

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Dry Vacuum Pump Product List and Ranking from 17 Manufacturers, Suppliers and Companies | IPROS GMS

Dry Vacuum Pump Manufacturer, Suppliers and Company Rankings

Dry Vacuum Pump Product ranking