Dry vacuum pump for semiconductors, FPD, and solar power generation.
Ingersoll Rand Vacuum Pumps: Screw Type / Claw Type / Roots Type / Combination Type
Dry vacuum pumps ideal for semiconductor and FPD/solar power applications!
Our company has a variety of vacuum pumps available in-house, allowing us to propose the optimal solution. - Screw type - Claw type - Roots type - Combination type We also have numerous delivery records for the electronics and semiconductor industries in countries around the world.
Inquire About This Product
basic information
Please make an inquiry. Centralization through the operation of multiple units and systemization incorporating various accessories such as frames is also possible.
Price range
Delivery Time
Applications/Examples of results
Optimal Applications - Lithium-ion - Solar power generation - Pharmaceuticals - Semiconductors - Electronics - Food & Beverage
catalog（1）
Download All Catalogs
Company information
This is the Japan branch of Gardner Denver Ingersoll Rand. We have a wide range of air compression equipment and respond to various needs. We have a service factory in Yashio City, Saitama Prefecture, and also provide repair and service support domestically. If you have any of the following requests, we can make proposals from our company. ◎ Energy saving and reduced operating costs ◎ Low noise and low pressure pulsation ◎ Modularization ◎ Small or large products
