It is possible to capture molecular information of inorganic substances in the depth direction using TOF-SIMS.
In depth-direction analysis of molecular information obtained by TOF-SIMS, (1) the depth resolution is good, (2) it is possible to distinguish the chemical states of inorganic materials such as oxides, nitrides, fluorides, carbides, alloys, and metals, (3) evaluation of trace states is possible, (4) monitoring of OH is possible, (5) relative comparisons between samples (film thickness, composition) are possible, and (6) image analysis allows for a visual capture of the distribution of states at the surface level of a few nanometers.
We will summarize the results of natural oxide films and oxide films.
Measurement method: TOF-SIMS
Product field: LSI, memory
Analysis purpose: evaluation of chemical bonding states, evaluation of composition distribution, thickness of corrosion layers
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