Electron beam deposition equipment for high melting point metals | Clean film formation with magnetic field deflection type
To the site troubled by film contamination of high melting point metals! With a magnetic field deflection mechanism and a zero oil exhaust system, we prevent the contamination of evaporated materials and form high-purity thin films.
The "YEG Series" electron beam evaporation device is a vacuum deposition system designed to prevent film formation defects caused by contamination from evaporated materials and the intrusion of oil vapor in the thin film formation process. It provides stable film quality through magnetic deflection beam control and dry exhaust using a turbo molecular pump (TMP), addressing issues such as "impurities mixing during the deposition of high melting point metals, leading to unstable film quality" in experimental and prototype environments. 【Recommended for these concerns】 ◆ Concerned about contamination from oil vapor from oil rotary pumps, etc. ◆ Materials mixing during the deposition of high melting point metals ◆ Limited space in the laboratory for large deposition equipment <Reasons for selection> - Maintains a clean vacuum environment free of oil vapor through TMP main exhaust - Capable of multilayer film deposition with support for both single and four-element switching hearths - Flexible response to the addition of load lock chambers and substrate heating mechanisms *For any questions regarding hearth capacity or custom specifications, please download the catalog or feel free to contact us. (We can also assist with inquiries about vacuum levels and deposition conditions.)
- Company：ヤシマ
- Price：Other
