エア・ウォーター・メカトロニクス List of Products and Services

The "Deep Cryogenic Adsorption Gas Purification Device Model-TKA" adsorbs and removes various impurities at liquid nitrogen temperatures (-196°C). It can also adsorb and remove N2 and CH4, which do not adsorb at room temperature. This product is applicable to gases that do not liquefy at -196°C. 【Features】 ■ Adsorbs and removes various impurities at liquid nitrogen temperatures (-196°C) ■ Can also adsorb and remove N2 and CH4, which do not adsorb at room temperature ■ Applicable to gases that do not liquefy at -196°C ■ Optional gas purification filter can be added *For more details, please refer to the PDF document or feel free to contact us.

• Gas Generator

The "Getter-type Gas Purification Device Model-UHG・URT" enables high-purity gas purification through our unique getter technology. It is capable of removing nitrogen (N2), which is difficult to eliminate using conventional room temperature adsorption methods. The device displays the cumulative purified gas flow rate and cumulative purification time of the reaction tube (getter), allowing you to check the remaining purification capacity of the reaction tube. We offer the "UHG series" for hydrogen gas purification and the "URT series" for rare gas purification. 【Features】 ■ Enables high-purity purification ■ Capable of removing nitrogen (N2), which is difficult to eliminate using conventional room temperature adsorption methods ■ Allows confirmation of the remaining purification capacity of the reaction tube *For more details, please refer to the PDF document or feel free to contact us.

• Gas Generator

This document is a comprehensive catalog featuring products handled by Air Water Mechatronics, which manufactures and sells various gas purification devices and exhaust gas treatment systems. It includes the "VPE Series," a room temperature adsorption purification device capable of high-purity gas purification using a unique catalyst, as well as the "WGC Series," a dry exhaust gas treatment device that combines a simple flow design with a high processing capacity pieo-clin cartridge. We contribute to advanced industries and the environment through technology and trust. [Contents] ■ Purification devices ■ Exhaust gas treatment devices ■ Horiba Stec products *For more details, please refer to the PDF document or feel free to contact us.

• Other process controls
• Gas recovery/treatment equipment
• Gas Generator

"Paioquin" chemically adsorbs various harmful components and completely removes multiple harmful substances from exhaust gases. Additionally, being a dry-type decontaminant, it is extremely easy to handle and comes with numerous excellent features and benefits. 【Features】 - It chemically adsorbs harmful substances, including hydrohalic gases and hydrolyzable chlorine and fluorine gases, reducing them to below permissible concentration levels. - The cartridge is compact and lightweight, significantly enhancing space efficiency and allowing for quick installation. - The cartridge is available in stainless steel and FRP options, allowing for selection based on usage requirements. - Since it uses a dry-type decontaminant, it has low pressure loss and does not require the installation of a dedicated suction blower. - The detection agent changes color in the viewing window, allowing for visual confirmation of when the cartridge needs to be replaced. - A valve is standardly equipped at the inlet and outlet to improve safety during attachment and detachment. *For more details, please refer to the PDF document or feel free to contact us.*

• Gas Generator

By using a catalyst developed independently, it demonstrates excellent performance in the purification of various semiconductor gases. 【Features】 - Achieves compactness through an integrated structure of the purification tube, high-performance filter, and diaphragm valve, enabling purification closer to the point of use. - Comprehensive measures against particles and outgassing are implemented through a high-performance filter and pre-shipping baking treatment. - No special utilities are required. (Type N and Type B are renewable.) *For more details, please refer to the PDF document or feel free to contact us.

• Other physicochemical equipment

This device can completely decompose PFCs such as CF4, C2F6, and C5F8, as well as SF6 and HFCs. Additionally, it does not require combustion fuels like propane due to its heater heating method, which minimizes CO2 emissions. 【Features】 - It does not require auxiliary equipment, achieving space-saving and low running costs. - High safety is ensured as flames and fuels are unnecessary. - There is no generation of thermal NOx due to the relatively low decomposition temperature. - The catalytic component also absorbs and fixes fluorine compounds, eliminating the need for post-treatment devices like wet scrubbers. *For more details, please refer to the PDF materials or feel free to contact us.

• Separation device

This device is a waste gas treatment system primarily designed for the exhaust gas processing in GaN manufacturing processes. It efficiently combines room temperature dry treatment and catalytic decomposition treatment, enabling improved maintenance, reduced running costs, and lower environmental impact. 【Features】 - This device decomposes NH3 into nitrogen and hydrogen through catalytic decomposition, achieving complete harmlessness. - It efficiently and safely removes toxic gases from exhaust gases containing MO in the GaN manufacturing process. - There is no generation of NOx, which is a problem in NH3 removal by oxidation methods. - Since it is not flame-based (combustion type), there is no need for propane supply or drainage facilities. (However, the A20 decomposition tube uses water cooling.) - The gas after treatment guarantees that the concentration of target gases is below the ACGIH/TLV-TWA values. - The adsorption regeneration type does not require the replacement of the treatment agent in the post-processing tube, allowing for reduced running costs. *For more details, please refer to the PDF document or feel free to contact us.

• Separation device

This device is a wet scrubbing system for the etching process. It can remove target gases such as Cl2, HBr, BCl3, HCl, HF, SiF4, etc., to levels below the TLV values, which conventional wet scrubbing could not achieve. 【Features】 - The adsorption tube is regenerated with water, resulting in a long cartridge lifespan. - Only water is used, eliminating alkaline contamination. - The low water usage reduces running costs. - The structure minimizes clogging at the gas-liquid contact area. - Continuous scrubbing is possible due to the automatic alternating operation of the adsorption tubes. *For more details, please refer to the PDF document or feel free to contact us.

• Separation device
• Gas Generator

This is a safety device designed to eliminate harmful components below permissible concentrations in the event of an accidental discharge from toxic gas cylinders or leaks of toxic gas from semiconductor manufacturing equipment (such as piping, fittings, valves, etc.) by drawing in the surrounding atmosphere. 【Features】 - The emergency safety Pyoclean has an exceptionally high processing capacity even under large airflow conditions. - It can eliminate highly toxic gases to below permissible concentrations in a short time. - This device has extremely low pressure loss, allowing for reduced blower power. - The entire unit is compact, requiring a small installation area. - It comes standard with an inverter, enabling automatic switching from normal exhaust to emergency exhaust based on leakage signal input. - The emergency safety Pyoclean® is easily replaceable. - This device is equipped with a sampling cartridge, allowing for verification of the remaining capacity of the emergency safety Pyoclean. *For more details, please refer to the PDF document or feel free to contact us.

• Gas Generator

The "VP Series Gas Purification Equipment," developed by the pioneer of purification devices, Japan Pionics, utilizes the world's highest gas purification technology and a variety of techniques cultivated over many years. It pursues ultimate purity and environmentally friendly and safe product creation, providing "safety" and "trust." 【Features】 - High-purity gas purification is possible due to our proprietary catalyst developed in-house. - The switching of purification series can be set to the optimal switching time adapted to the flow rate of the raw gas and the concentration of impurities. - Series switching can also be done based on the cumulative flow value of the purified gas, allowing for extended switching times when used at low flow rates, resulting in energy savings. - Space-saving installation has been achieved. - Maintenance space is primarily at the front and back of the device, while the sides can be installed closely. (However, space for seismic brackets is required.) - Complies with various standards (SEMI, ASME, ML, etc.) *For more details, please refer to the PDF document or feel free to contact us.

• Other process controls

**Features** - This is a purification method using a palladium alloy membrane that completely prevents the passage of substances other than hydrogen, allowing for the acquisition of ultra-high purity hydrogen gas free from dust. - Our palladium cells have a long lifespan. They utilize a uniquely developed palladium alloy capillary, which possesses high strength, durability, and significant hydrogen permeability. - No regeneration operation is required, ensuring a consistently stable supply of high-purity hydrogen gas. - The equipment operates automatically. *For more details, please refer to the PDF materials or feel free to contact us.*

• Gas Generator

The JAR-type air purification device is primarily a purification system designed for stepper motors, zero gas for automotive exhaust measurement, and gas purification for fuel cells. 【Features】 - It is a room temperature adsorption-type gas purification device. (However, the reaction tube is used in a heated state.) - Thanks to our uniquely developed catalyst, the concentration of each impurity is below 1 ppb. - By automatically switching between two or more tubes, it continuously supplies highly purified air in a stable manner. - It achieves low running costs with a self-regenerating adsorption tube. - It is also capable of removing NOx, THC, and VOCs. - The oxygen concentration before and after purification remains unchanged. - Large-scale units can also be manufactured. *For more details, please refer to the PDF document or feel free to contact us.

• Gas Generator

【Features】 - The combination of a simple flow design and the highly efficient PAIKLINK cartridge allows for the economical and safe removal of toxic gases. - By installing options such as gas detectors, safety can be enhanced. - In the case of a two-tube system, the downtime of the equipment during cartridge replacement can be reduced. *For more details, please refer to the PDF document or feel free to contact us.

• Gas Generator

This device processes exhaust gases such as hydrogen compounds like SiH4, and fluorinated compounds like C2F6 and SF6, which are emitted by semiconductor manufacturing equipment, by utilizing the thermal exhaust from a combustion burner for thermal decomposition. Additionally, the products generated after thermal decomposition (such as SiO2 powder and acidic gases) are further processed in a wet scrubber within the same package. 【Features】 - By separating the combustion nozzle and the secondary combustion chamber, stable combustion is possible during flow rate fluctuations. - It can handle exhaust gases with a maximum processing flow rate of 500 L/min (capable of supporting up to 4 ports). - Wall air prevents the adhesion of by-products inside the combustion chamber. - The adoption of a direct cooling method using water spray immediately after the combustion tube has achieved space-saving design. - Continuous stirring of the circulating water in the wet scrubber tank prevents circulation pump troubles caused by SiO2 powder slurry. - Equipped with various sensors, ensuring comprehensive safety measures. - The touch panel allows for easy operation and monitoring of the operating status. *For more details, please refer to the PDF materials or feel free to contact us.*

• Gas Generator