This is a pollution control device aimed at exhaust gas treatment in the GaN manufacturing process.
This device is a waste gas treatment system primarily designed for the exhaust gas processing in GaN manufacturing processes. It efficiently combines room temperature dry treatment and catalytic decomposition treatment, enabling improved maintenance, reduced running costs, and lower environmental impact. 【Features】 - This device decomposes NH3 into nitrogen and hydrogen through catalytic decomposition, achieving complete harmlessness. - It efficiently and safely removes toxic gases from exhaust gases containing MO in the GaN manufacturing process. - There is no generation of NOx, which is a problem in NH3 removal by oxidation methods. - Since it is not flame-based (combustion type), there is no need for propane supply or drainage facilities. (However, the A20 decomposition tube uses water cooling.) - The gas after treatment guarantees that the concentration of target gases is below the ACGIH/TLV-TWA values. - The adsorption regeneration type does not require the replacement of the treatment agent in the post-processing tube, allowing for reduced running costs. *For more details, please refer to the PDF document or feel free to contact us.
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