Silicon-based dry etching wet exhaust gas treatment system

Store the Clean S Z decontamination tube inside a box with functions for safe use as a system.

The silicon-based dry etching wet gas treatment device "Clean S F100" houses the Clean S Z series exhaust tube within a functional BOX, allowing for safe use as a system. (Includes pressure detection bypass system, color detection system, heating system, weight detection system, etc.) The gases to be treated include HBr, HF, SiF4, SF4, HCl, etc. The chemical exchange method employs a breakthrough detection system that continuously measures pH, and alerts the user via an alarm when the endpoint is reached. The semi-automatic method allows for easy and safe replacement without the use of tools. The extracted old chemicals will be responsibly processed if returned. The new chemicals are filled into the returned containers and sent back as part of a safe exchange system. For more details, please download the catalog.

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