Store the Clean S Z decontamination tube inside a box with functions for safe use as a system.
The silicon-based dry etching wet gas treatment device "Clean S F100" houses the Clean S Z series exhaust tube within a functional BOX, allowing for safe use as a system. (Includes pressure detection bypass system, color detection system, heating system, weight detection system, etc.) The gases to be treated include HBr, HF, SiF4, SF4, HCl, etc. The chemical exchange method employs a breakthrough detection system that continuously measures pH, and alerts the user via an alarm when the endpoint is reached. The semi-automatic method allows for easy and safe replacement without the use of tools. The extracted old chemicals will be responsibly processed if returned. The new chemicals are filled into the returned containers and sent back as part of a safe exchange system. For more details, please download the catalog.
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【Features】 ○ Acidic gases are removed through neutralization reactions. ○ Waste gases are reacted and absorbed by a chemical solution in the absorption tower. ○ Oxidizing gases are removed through reduction reactions. ○ The absorption liquid used has the capabilities of both points 1 and 2. ○ Special catalysts and basic aqueous solutions are added to select and adjust optimal conditions for waste gas absorption. ● For more details, please contact us or download the catalog.
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In recent years, technological innovations in the industrial sector have been remarkable. We provide manufacturing and maintenance services for equipment and devices with speedy and flexible responses and cost reductions.