エスクラフト Product Lineup

We have adopted a compact power matching method, achieving faster plasma matching. By reducing the matching time, we have minimized charge-up damage to the device during plasma ignition. Additionally, we have achieved space-saving design with only the PUMP outside of the main unit.

WLP has realized the application of RF power to the lower electrode (RIE method) or to the upper electrode (DP method) to accommodate diversified applications. It can be used for a variety of processes such as etching of 6-8 inch Si, Poly-Si, etching of polyimide-based resins, and ashing of photoresists.

This product is a parallel plate type plasma treatment device. With just the operation on the control panel, you can switch between two plasma modes: DP (Direct Plasma) mode and RIE (Reactive Ion Etching) mode, making it suitable for various process applications such as improving adhesion and sealing in die attach during assembly processes like BGA.

This product is a parallel plate type plasma treatment device. It allows switching between two plasma modes, DP (Direct Plasma) mode and RIE (Reactive Ion Etching) mode, using only the controls on the panel. It can be used for various process applications, such as improving adhesion and sealing in die attach during assembly processes like BGA.

The WLP600S is a plasma processing device using a parallel plate method. It supports 6-inch and 8-inch wafers, achieving low cost and space-saving design. The two types of plasma modes, DP (Direct Plasma) mode and RIE (Reactive Ion Etching) mode, can be switched using only the controls on the panel, making it suitable for various applications such as etching polyimide-based resins and surface modification of photoresists. 【Features】 ○ Easy plasma mode switching ○ High-speed responsiveness ○ Space-efficient footprint ○ Compatibility with a wide variety of processes ○ High customization options For more details, please contact us or download the catalog.

We perform plasma treatment on various materials according to their intended use. We can accommodate small lots and short delivery times. 【Examples of Applications】 We will process according to your company's needs, such as "cleaning," "surface modification," and "increased adhesion effects." If your company is considering processing for prototypes or small lots, please feel free to contact us. ★For more details, please contact us or download the catalog.