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The "Equalizer Control Valve" is a vacuum valve that allows for pressure control. It can be installed with the exhaust pump on the inside, contributing to space-saving and is suitable for processes that require uniform gas flow. We provide custom valves that meet your requirements, including delivery time and budget. Please let us know your needs regarding opening size, pressure, fluid used, temperature, and more. 【Features】 ■ Capable of pressure control ■ Suitable for processes that require uniform gas flow ■ Contributes to space-saving by allowing the exhaust pump to be installed on the inside *For more details, please refer to the PDF document or feel free to contact us.
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Free membership registrationWe would like to introduce the 'APC Pendroll Valve' handled by VITEX Corporation. It can be controlled with a low gas flow rate during zero conductance, allowing you to save valuable process gas. Depending on the options, it is possible to change the sealing material, as well as to have heating specifications (main body) and surface treatments such as hard anodizing. 【Features】 ■ Pressure control is possible even with low gas flow rates during low vacuum control ■ Can be controlled with a low gas flow rate during zero conductance ■ Saves valuable process gas ■ Operating pressure: 1.0-3.0(s) ■ Lifespan: 1 million cycles *For more details, please refer to the PDF document or feel free to contact us.
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Free membership registrationThe "Gate valve T-Motion" is a rectangular gate valve that can be configured freely by equipment designers without the constraints of valve size (width × height). Thanks to its unique valve motion, it achieves low vibration without reducing the opening and closing speed. By standardizing components beyond valve sizes, it has become a cost-effective product. 【Features】 ■ Low vibration ■ Low particle generation ■ Low cost ■ Matches various generations ■ Compatible with larger FPD substrates (G11) *For more details, please refer to the PDF document or feel free to contact us.
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Free membership registrationThe "True L-Motion Gate Valve" is a next-generation rectangular gate valve with low vibration. In addition to reducing vibration during OPEN/CLOSE operations, it also achieves low particle generation through a new mechanism. Options are available for changing seal materials and adding surface treatments. 【Features】 ■ Compatible with miniaturizing semiconductor processes ■ Low vibration: Achieves low vibration during OPEN/CLOSE operations ■ Low particle generation: Achieves low particle generation through a new mechanism *For more details, please refer to the PDF document or feel free to contact us.
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Free membership registrationThe "Rupture Disk" is a safety device used to prevent damage to sealed equipment and systems such as pressure vessels, piping, and ducts due to excessive pressure. When the pressure inside the equipment or system rises abnormally, an extremely thin metal plate bursts, allowing fluid to escape and reducing the pressure. It is widely used as a safety device either in place of or in conjunction with spring-loaded safety valves. 【Features】 ■ Prevents damage from excessive pressure in equipment ■ Reduces pressure by bursting the metal plate ■ Fast pressure release rate ■ No leakage ■ Suitable for corrosive fluids, high-viscosity fluids, and adhesive fluids *For more details, please refer to the PDF document or feel free to contact us.
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Free membership registrationOur company is engaged in the design and manufacture of "ultra-high and high vacuum valves" used in the production of semiconductors and FPDs. We are currently offering a "comprehensive catalog" that includes various products. We feature a lineup that meets customer demands, including the "True L-Motion Gate Valve" designed for miniaturized semiconductor processes, the "Gate Valve T-Motion" for larger FPD substrates, and the "APC Penduroll Valve" capable of pressure control with low gas flow rates. [Contents Included] ◎ Information on ultra-high and high vacuum valves ◎ Transport gate valves ◎ Exhaust system gate valves ◎ Options *For more details, please refer to the materials. Feel free to contact us with any inquiries.
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Free membership registrationSince its establishment, VITEX Corporation has consistently developed and produced specialized valves in various fields. Thanks to this, our vacuum valves, used in the IT sector, particularly in the manufacturing of semiconductors, FPDs (liquid crystal and organic EL panels), thin-film solar panels, and hard disks, have gained the trust of users as clean valves and have grown to be widely adopted. Additionally, VITEX Corporation has a wealth of experience as the only rupture disk manufacturer in Japan and has received high evaluations from customers. Moving forward, we will continue to globally engage in the development of higher-performance products, enhance our product offerings to meet customer and market needs, strengthen our manufacturing and sales both domestically and internationally, and further improve our after-sales service system to contribute to the development of the industry. 【Main Products】 - Ultra-high and high vacuum valves - Rupture disks - Pulp for nuclear applications For more details, please contact us or download our catalog.
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Free membership registrationOur company conducts integrated domestic production of "Rupture Disks," which serve as safety devices in various plants and power generation facilities. "Rupture Disks" release pressure by bursting an extremely thin metal plate when excessive pressure is applied, preventing damage to pressure vessels, piping, ducts, and other sealed equipment. They are mainly used as replacements or auxiliary devices for spring-loaded safety valves. Due to their fast pressure release rate and ability to prevent leaks, they are effective in preventing dangers and waste caused by leaks of flammable, toxic, expensive gases, or radioactive fluids. They are particularly suitable for equipment handling high-viscosity fluids, sticky fluids, and corrosive fluids. 【Rupture Disk Product Lineup】 ◎ Single Tension Type ◎ High Pressure Tension Type ◎ Composite Tension Type ◎ Screw-in Tension Type ◎ Welded Tension Type ◎ Knife Type Inverted ◎ Grooved Inverted Type ◎ Flat Composite Type *For more details, please refer to the materials. Feel free to contact us with any inquiries.
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