スミックス List of Products and Services

The "ARCscan Type RE & ME compatible" is a device that enables the analysis and evaluation of pattern shape uniformity over a wide area, which is difficult to observe at the microscopic level. It achieves optimal optical conditions for the observation target, making high-sensitivity, high-speed, and large-area inspections possible, which were previously challenging. It features a dual specification with "Type: RE," which allows macro observation under optimal conditions for patterns, and "Type: ME," which enables nano evaluation using a macro optical system. 【Features】 ■ Achieves optimal optical conditions for the observation target ■ Enables high-sensitivity, high-speed, and large-area inspections that were previously difficult *For more details, please refer to the catalog or feel free to contact us.

• Other inspection equipment and devices

Sumix Corporation is a company primarily engaged in the development, manufacturing, and sales of optical inspection equipment. We aim to propose the usefulness and potential of macro optical inspection to the semiconductor, liquid crystal, NIL, and other inspection markets, contributing to society through the efficiency and high sensitivity of inspection processes. Our core technology (OAS Technology) employs a unique optical system specialized for macro inspection using scattered light, enabling macro inspections with a high correlation to CD. 【Business Activities】 ■ Development, manufacturing, sales, and customization of optical inspection modules ■ Technical consulting for the development of optical inspection equipment *For more details, please refer to our catalog or feel free to contact us.

• Other optical parts