Pioneers of macro inspection! Visualizing nano-level variations and unevenness.
Sumix Corporation is a company primarily engaged in the development, manufacturing, and sales of optical inspection equipment. We aim to propose the usefulness and potential of macro optical inspection to the semiconductor, liquid crystal, NIL, and other inspection markets, contributing to society through the efficiency and high sensitivity of inspection processes. Our core technology (OAS Technology) employs a unique optical system specialized for macro inspection using scattered light, enabling macro inspections with a high correlation to CD. 【Business Activities】 ■ Development, manufacturing, sales, and customization of optical inspection modules ■ Technical consulting for the development of optical inspection equipment *For more details, please refer to our catalog or feel free to contact us.
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basic information
【Business Content】 ■Pattern: Pattern uniformity evaluation ■Thin Film: High-sensitivity film thickness uniformity evaluation ■Surface: Inspection of unevenness, scratches, and defects, etc. *For more details, please refer to the catalog or feel free to contact us.
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For more details, please refer to the catalog or feel free to contact us.
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Company information
Smix Corporation is a company specializing in the development, manufacturing, and sales of devices for macro optical inspection. We can perform macro inspections that have a high correlation with CD, capture size variations of 3nm on a macro scale, and visualize the unevenness of mirror-like wafers. By implementing our macro inspection, customers can establish a more efficient and cost-competitive inspection process. Trust us with your macro optical inspection needs.