筑波精工 Product Lineup

The "Electrostatic Chuck Supporter" is an electrostatic chuck carrier that adsorbs and holds ultra-thin workpieces for reinforcement. It enables the reinforcement and fixation of thin wafers solely through electric field control, without the use of adhesives. Being cordless allows it to be inserted into various processes while maintaining a fixed state, and it can be inserted into the carrier while holding the wafer in an adsorbed state due to its thin profile. 【Features】 ■ Adsorbs and holds ultra-thin workpieces for reinforcement ■ Enables reinforcement and fixation of thin wafers ■ Can be inserted into various processes ■ Thin profile allows insertion into the carrier while holding the wafer in an adsorbed state *For more details, please refer to the PDF document or feel free to contact us.

The "CP Supporter" is an electrostatic chuck carrier that holds and reinforces ultra-thin wafers. It allows for electrical testing due to its capability of front-and-back conductivity. Being cordless, it can be inserted into various processes while remaining fixed in place. Its thinness allows it to be inserted into the carrier while maintaining the wafer's adhesion. 【Features】 ■ Usable for electrical testing due to front-and-back conductivity ■ Reinforcement and fixation of thin wafers possible using only electric field control without adhesives ■ Cordless design enables insertion into various processes while fixed in place ■ Thin profile allows insertion into the carrier while maintaining wafer adhesion *For more details, please download the PDF or feel free to contact us.

We would like to introduce the lineup of our "Electrostatic Chuck Supporter System." The electrostatic chuck supporters are available in four types: RS standard, CP, Hole, and PFA, and they accommodate sizes of 4 inch, 6 inch, 8 inch, and 12 inch. You can choose according to your application. We offer three types of power supply fixtures: Manual type, Semi-Auto type, and Full Auto type. 【Features by Supporter Type】 ■RS Standard: Matte surface ■CP: Conductive on both sides for electrical testing ■Hole: For large uneven wafers ■PFA: Chemical resistant *For more details, please download the PDF or feel free to contact us.