筑波精工 Product Lineup

This is an electrostatic chuck designed for operation within semiconductor manufacturing equipment. It can operate in atmospheric to high vacuum conditions and at extremely low to high temperatures ranging from -100 to 200°C. Additionally, it can adsorb a wide range of materials from conductors to insulators. - It is capable of adsorbing substrates for Si compound semiconductors, sapphire, quartz, and LT LN semiconductors, from conductors to insulators. - Since it is adhesive-free, it can operate even in extremely low temperature regions of -100°C. - Our unique technology allows the holding force to act only at the contact interface between the workpiece and the electrostatic chuck, thus it is not affected by any influences from the backside (no effects from backside charging, etc.).

• Other machine elements

We would like to introduce the "Electrostatic Adsorption Stage for Inspection Equipment" that we handle. It can be used for image processing and laser inspection with a black surface finish. Due to surface adsorption, it does not apply localized stress to thin materials. This inspection stage is suitable for fixing thin materials such as porous materials, films, metal foils, and paper. 【Features】 ■ No localized stress on thin materials due to surface adsorption ■ Usable as a stage for inspection machines using image processing and lasers with a black surface finish *For more details, please download the PDF or feel free to contact us.

• Optical Measuring Instruments
• Inspection fixture

We would like to introduce the lineup of our "Electrostatic Chuck Supporter System." The electrostatic chuck supporters are available in four types: RS standard, CP, Hole, and PFA, and they accommodate sizes of 4 inch, 6 inch, 8 inch, and 12 inch. You can choose according to your application. We offer three types of power supply fixtures: Manual type, Semi-Auto type, and Full Auto type. 【Features by Supporter Type】 ■RS Standard: Matte surface ■CP: Conductive on both sides for electrical testing ■Hole: For large uneven wafers ■PFA: Chemical resistant *For more details, please download the PDF or feel free to contact us.

• others

The "CP Supporter" is an electrostatic chuck carrier that holds and reinforces ultra-thin wafers. It allows for electrical testing due to its capability of front-and-back conductivity. Being cordless, it can be inserted into various processes while remaining fixed in place. Its thinness allows it to be inserted into the carrier while maintaining the wafer's adhesion. 【Features】 ■ Usable for electrical testing due to front-and-back conductivity ■ Reinforcement and fixation of thin wafers possible using only electric field control without adhesives ■ Cordless design enables insertion into various processes while fixed in place ■ Thin profile allows insertion into the carrier while maintaining wafer adhesion *For more details, please download the PDF or feel free to contact us.

• Wafer

"Tinhand" is an electrostatic adhesion tool designed for automatic machines that softly adsorbs, fixes, and handles films, foils, and paper. It allows for full soft adhesion of large-area thin materials without causing wrinkles or scratches, and it can also adsorb perforated items like porous materials. Additionally, the backside potential of the object is minimized, preventing dust adhesion on the backside. 【Features】 ■ Full soft adhesion of large-area thin materials ■ No wrinkles or scratches ■ Capable of adsorbing perforated items like porous materials ■ Backside potential of the object is minimized, preventing dust adhesion *For more details, please refer to the PDF document or feel free to contact us.

• others

The "Electrostatic Chuck Supporter" is an electrostatic chuck carrier that adsorbs and holds ultra-thin workpieces for reinforcement. It enables the reinforcement and fixation of thin wafers solely through electric field control, without the use of adhesives. Being cordless allows it to be inserted into various processes while maintaining a fixed state, and it can be inserted into the carrier while holding the wafer in an adsorbed state due to its thin profile. 【Features】 ■ Adsorbs and holds ultra-thin workpieces for reinforcement ■ Enables reinforcement and fixation of thin wafers ■ Can be inserted into various processes ■ Thin profile allows insertion into the carrier while holding the wafer in an adsorbed state *For more details, please refer to the PDF document or feel free to contact us.

• others

The "Soft Palm" is a handy type of electrostatic chuck that uses Coulomb force to contact and adsorb objects for handling. Its main feature is that it applies localized stress to thin materials due to its surface adsorption. Additionally, there are two types available: a battery-operated (rechargeable) cordless type and a semi-cordless type driven by a dedicated controller. 【Features】 ■ Portable anywhere due to being cordless ■ Can adsorb objects with uneven surfaces ■ The potential is minimized, so there is no dust adsorption on the backside *For more details, please request materials or view the PDF data available for download.

• Other semiconductor manufacturing equipment