Thin thickness allows for insertion into the carrier while maintaining wafer adhesion!
The "Electrostatic Chuck Supporter" is an electrostatic chuck carrier that adsorbs and holds ultra-thin workpieces for reinforcement. It enables the reinforcement and fixation of thin wafers solely through electric field control, without the use of adhesives. Being cordless allows it to be inserted into various processes while maintaining a fixed state, and it can be inserted into the carrier while holding the wafer in an adsorbed state due to its thin profile. 【Features】 ■ Adsorbs and holds ultra-thin workpieces for reinforcement ■ Enables reinforcement and fixation of thin wafers ■ Can be inserted into various processes ■ Thin profile allows insertion into the carrier while holding the wafer in an adsorbed state *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications (Excerpt)】 ■Target material: Conductor, semiconductor, insulator ■Size: Up to □480mm, t:0.5mm or more ■Control: Dedicated controller ■Operating environment: Atmosphere to vacuum, Max. 200℃ ■Suction operation time: Approximately 30 seconds ■Release time: Within 5 seconds *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Conductors, Semiconductors, Insulators *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Tsukuba Seiko Co., Ltd. is a company primarily engaged in the development, manufacturing, and sales of electrostatic adsorption systems. Our electrostatic chucks are designed to assist you in improving yield and production efficiency for your technological innovations. We can accommodate your specifications from prototypes to mass production, so please feel free to contact us.