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Are you struggling with wanting to "find suitable compositions in a short period" or "accumulate characteristic data due to composition changes" in the development of functional materials? Our company offers "contract combinatorial thin film production." We respond to the search for suitable compositions more quickly and accurately. Engineers with experience in thin film production for various materials will meet your needs. Please feel free to contact us. 【Features】 ■ Production of combinatorial library thin film samples ■ Combinatorial property analysis ■ Sales of combinatorial magnetron sputtering equipment *For more details, please refer to the PDF document or feel free to contact us.

• Contract manufacturing
• Contract Analysis

The "CEX-2420" is a mobile load lock system that allows the transfer of film samples between the combinatorial sputtering device "CMS-6420" and the Pascal-made "PLD device" under ultra-high vacuum without atmospheric exposure. The L/L chamber and the connection ports are evacuated by independent turbo molecular pumps, keeping the samples in ultra-high vacuum at all times. It is equipped with two connection ports for the sputtering device and the PLD device, enabling the transfer of samples to each sample holder. It is backed up by an uninterruptible power supply, allowing for over 30 minutes of operation during power outages. 【Features】 ■ Enables the transfer of film samples under ultra-high vacuum without atmospheric exposure ■ Equipped with two connection ports for the sputtering device and the PLD device, allowing for sample transfer to each sample holder ■ Backed up by an uninterruptible power supply, allowing for over 30 minutes of operation during power outages *For more details, please refer to the PDF document or feel free to contact us.

• Sputtering Equipment

In our "Combinatorial Property Analysis," we conduct various multi-point physical analyses according to your requests, based on compositional changes. In the example shown in the image, we formed Pt electrodes on a triangular 3-component combinatorial composition gradient sample of HfO2, Y2O3, and Al2O3 on a Si substrate, and performed electrical characteristics such as C-V and I-V to evaluate the high dielectric constant layer. The composition mapping from the top shows the dielectric constant, flat band potential, and leakage current, allowing for simultaneous evaluation of 246 compositions within a single sample. Please feel free to contact us when you need our services. 【Service Details】 ■ Electrical property evaluation such as C-V, I-V, semiconductor characteristics (room temperature to 400°C) ■ Optical property evaluation including transmittance measurement and spectroscopic ellipsometry ■ Crystallinity evaluation using microbeam XRD ■ Compositional evaluation using microbeam XRF, XPS, Auger spectroscopy, etc. *For more details, please refer to the PDF document or feel free to contact us.

• Other contract services
• Analysis Services

Since our establishment, we have received great acclaim for our unique service of creating thin film samples using combinatorial technology. We can produce single composition films of arbitrary compositions, as well as binary and ternary composition gradient films. We deposit functional materials used in various solid-state devices, such as thermoelectric materials, ferroelectrics, ferromagnets, battery electrodes, phase change memory materials, and intermetallic compounds. 【Features】 ■ Experienced technical staff to assist in the development of new functional materials ■ We use sputtering and PLD (Pulsed Laser Deposition) methods for thin film deposition ■ We can produce single composition films of arbitrary compositions, as well as binary and ternary composition gradient films *For more details, please refer to the PDF document or feel free to contact us.

• Other contract services

In combinatorial techniques, thin films are formed on a single sample substrate by varying the composition of binary or ternary materials from 0% to 100%. Using a moving mask, ultra-thin layers with a wedge-shaped thickness gradient are alternately stacked, and since the thickness of the unit layer is 0.2 nm (2 Å), this value is equal to the interatomic distance, allowing for the creation of nearly ideal mixtures. Since all compositions of binary or ternary materials are included in a single sample, analyzing and evaluating a single composition gradient sample enables rapid optimization of composition to achieve new functionalities. 【Features】 - The composition gradient is formed by the mechanical movement of the moving mask. - It exhibits excellent linearity, with the geometric arrangement and composition within the sample corresponding one-to-one. - Since only the composition changes within the sample, the evaluation of the sample's properties is stable and easy. - Due to the unit layer thickness of 0.2 nm, nearly ideal mixtures can be created. *For more details, please refer to the PDF document or feel free to contact us.*

• Sputtering Equipment

The "CMS-3200" is a three-component combinatorial magnetron sputtering device that supports binary and ternary combinatorial composition gradient film deposition. The effective area is an equilateral triangle with a side length of 25mm. It is designed to use 2-inch wafers as standard substrates, allowing for integration into post-processing steps such as patterning and etching, enabling high throughput not only for film deposition but also for analysis. 【Features】 ■ Supports binary and ternary combinatorial composition gradient film deposition ■ Effective film deposition area: equilateral triangle with a side length of 25mm ■ Equipped with three 2-inch magnetron sputter cathodes ■ Can accommodate up to six RF and DC power supplies in three sets ■ Recipe editing and fully automated combinatorial film deposition using LabView *For more details, please refer to the PDF document or feel free to contact us.

• Sputtering Equipment

The "CMS-6420" is a 6-component combinatorial magnetron sputtering device developed to expand the film deposition area, which has been difficult to achieve with the PLD method. The effective area is a triangle with sides of 25mm. Since it uses a 4-inch wafer as the standard substrate, it can be integrated into subsequent processes such as patterning and etching, enabling high throughput not only for film deposition but also for analysis. 【Features】 ■ Compatible with 4-inch wafers suitable for process lines ■ Effective area: triangle with sides of 25mm ■ Supports binary and ternary combinatorial film deposition ■ LabVIEW recipe input and automatic film deposition ■ Maximum 6-component configuration (6 units of 2-inch cathodes for matrix use) *For more details, please refer to the PDF document or feel free to contact us.

• Sputtering Equipment

Our company assists in the discovery and development of new functional materials from the perspectives of knowledge and means. Specifically, we provide consulting and foundry services for material exploration, centered around combinatorial high-throughput technology. We also accept contracts for material development. In addition, we sell high-throughput synthesis and evaluation equipment, and we offer facilities and material libraries, so please feel free to contact us if you have any requests. [We respond to the following requests] ■ In the development of functional materials, etc. - I want to find an optimal composition in a short period of time. - I want to accumulate property data based on compositional changes. - I have concerns about contamination, so I prefer not to use our own equipment for film formation... *For more details, please download the PDF or contact us.

• Other services