Equipped with two connection ports for sputtering devices and PLD devices! Samples can be transferred to each sample holder.
The "CEX-2420" is a mobile load lock system that allows the transfer of film samples between the combinatorial sputtering device "CMS-6420" and the Pascal-made "PLD device" under ultra-high vacuum without atmospheric exposure. The L/L chamber and the connection ports are evacuated by independent turbo molecular pumps, keeping the samples in ultra-high vacuum at all times. It is equipped with two connection ports for the sputtering device and the PLD device, enabling the transfer of samples to each sample holder. It is backed up by an uninterruptible power supply, allowing for over 30 minutes of operation during power outages. 【Features】 ■ Enables the transfer of film samples under ultra-high vacuum without atmospheric exposure ■ Equipped with two connection ports for the sputtering device and the PLD device, allowing for sample transfer to each sample holder ■ Backed up by an uninterruptible power supply, allowing for over 30 minutes of operation during power outages *For more details, please refer to the PDF document or feel free to contact us.
Inquire About This Product
basic information
For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
Our company was established as a certified venture originating from the National Institute for Materials Science (NIMS) and is engaged in the development of new functional materials using combinatorial thin film deposition technology. By creating a combinatorial library that contains all combinations of compositions on a single sample substrate, we significantly shorten the development period for functional materials and enhance the development process through high throughput.
![[Example of Use] Sputtering Target Composite Material SiC/Si](https://image.mono.ipros.com/public/product/image/f42/2000180520/IPROS14162266355367390576.jpeg?w=280&h=280)
