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ユー・エイチ・システム

addressKanagawa/Yamato-shi/505-1 Shitazuruma
phone046-272-0111
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last updated:May 30, 2025
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NanoFocus 3D X-ray CT System XVA-160αII NanoFocus 3D X-ray CT System XVA-160αII
Micro Focus 3D X-ray CT System XVA-160RZ Micro Focus 3D X-ray CT System XVA-160RZ
Micro Focus 3D X-ray System EVA-160 Micro Focus 3D X-ray System EVA-160
Micro Focus 3D X-ray System XVA-160RCE Micro Focus 3D X-ray System XVA-160RCE
class="retina-image"

3D X-ray CT system 'XVA-160□520'

Equipped with the unique technology "User-Centric Mechanism," it supports large substrates up to 520mm x 520mm and assists in the detection and analysis of defects.

The "XVA-160□520" is a three-dimensional X-ray CT system that adopts the unique technology "User-Centric Mechanism," allowing for easy and efficient observation at high magnification. Recently, there has been an increasing demand for observation of large substrates, so we have released a new model that can perform oblique CT imaging at high magnification on large substrates. It strongly supports the observation of solder mounting conditions and the detection and analysis of device defects on large substrates sized 520mm x 520mm. 【Features】 ■ A model based on the standard model with an enlarged stage mechanism to improve precision and accommodate high-resolution generators. ■ Equipped with a nano-focus X-ray generator (focus size 250/800nm). ■ Allows for clear observation of details at a high magnification of 2000 times. *For more details, please contact us through the inquiry form on our website.

  • X-ray inspection equipment

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【UHS_X-ray CT System Imaging Case】TGV

This is a case of TGV being imaged using transmission and oblique CT with a nano-focus X-ray CT system.

This is a case where TGV (Through Glass Via: Glass Penetrating Electrode) was imaged using transmission imaging and angled CT scanning. The voids inside the Cu filled vias can be clearly observed. The device used for imaging, 'XVA-160αII "Z"', is an ultra-high-resolution nano-focus 3D X-ray CT system. It is an ultra-high-end model that achieves nano-order analysis and can perform CT scanning in just 3.5 minutes thanks to world-class angled CT technology, contributing to improved efficiency in analysis. 【Features】 - A high-end model specialized for higher magnification, capable of analyzing the internal structure of packages. - Equipped with a nano-focus X-ray generator (focus size 200nm and above). - Precisely observes detailed structures at a high magnification of 2,000 times. - Equipped with a high-resolution top table, automatic adjustment functions for optical axis, rotation center, and focus.

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3D X-ray CT system 'XVA-160RA/160αII "Z"'

Easily achieve high magnification observation with our unique technology "User-Centric Mechanism." We support the discovery and analysis of defects in implementation boards and semiconductor devices.

Our company offers a 3D X-ray CT system that employs our unique technology, the "U-Centric Mechanism," allowing for easy and efficient observation at high magnification. In diagonal CT imaging, bringing the target area closer to the X-ray focus enables high-magnification tomographic imaging. This allows for detailed observation and strongly supports the discovery and analysis of defects in printed circuit boards and semiconductor devices. 【Features】 ◎ 'XVA-160RA' ■ A newly revamped model based on the standard model, compatible with high-resolution generators ■ Equipped with a nano-focus X-ray generator (focus size 250/800nm) ■ Enables clear observation of details at a magnification of 1,600 times ■ Features visible light mapping and automatic focus adjustment functions ◎ 'XVA-160αII "Z"' ■ A high-end model specialized for even higher magnification, capable of analyzing the internal structure of packages ■ Equipped with a nano-focus X-ray generator (focus size from 200nm) ■ Allows precise observation of detailed structures at a magnification of 2,000 times ■ Features a high-resolution top table, automatic adjustment functions for optical axis, rotation center, and focus

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[UHS_X-ray CT System Imaging Example] Smartphone Internal Circuit Board

This is an example of a CT scan of a smartphone's internal circuit board. It is possible to observe the patterns and structures of each internal layer.

The "XVA-160αII 'Z'" is a nano-focus X-ray CT system used in applications such as non-destructive testing and material analysis. This system is an ultra-high-resolution model that achieves ultra-high magnification (2000 times) and nano-order sizes (250/800nm). The patterns of each internal layer are captured clearly. The condition of the fillet and the mounting state are also uniquely visible through CT imaging.

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[UHS_X-ray CT System Imaging Case] Smartphone (2018)

This is a case of a smartphone (2018 model) that was imaged using both transparent imaging and oblique CT scanning. It allows for the observation of the internal structure and the condition of the internal memory.

The "XVA-160RZ" is a micro-focus X-ray CT system used in applications such as non-destructive testing and material analysis. This system can visualize fine internal structures with high resolution. Additionally, you can choose between a high-resolution type and a wide-field type. This time, we will introduce shooting examples of the micro-focus X-ray CT system "XVA-160RZ"! On a separate page, we have published the first-generation smartphone. Changes in the internal structure can be observed comparatively.

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[UHS_X-ray CT System Imaging Example] First Generation Smartphone

This is a case of the first-generation smartphone captured with a transparent image and angled CT scan. It allows for the observation of the internal structure and the condition of the internal memory.

The "XVA-160RZ" is a micro-focus X-ray CT system used for applications such as non-destructive testing and material analysis. This system can visualize fine internal structures with high resolution. Additionally, you can choose between a high-resolution type and a wide-field type. This time, we will introduce a case study of the micro-focus X-ray CT system "XVA-160RZ"!

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【UHS_X-ray CT System Imaging Case】Heated Tobacco

This is a case of transmission imaging of heated tobacco using the Microfocus X-ray CT system XVA-160RZ.

This is an example of a heated tobacco product captured through transmission imaging. It allows for understanding the internal substrate condition and structure. The XVA-160RZ can perform orthogonal CT imaging easily by simply attaching a dedicated unit without changing the stage. Similar to oblique CT, orthogonal CT can also be captured at high magnification.

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【UHS_X-ray CT System Imaging Example】Electrolytic Capacitor

This is a case of CT imaging of an electrolytic capacitor using the Microfocus X-ray CT system XVA-160RZ.

This is a case of a conductive polymer aluminum solid electrolytic capacitor captured through transmission imaging and oblique CT scanning. It allows for the confirmation of internal structures and observation of solder conditions. The XVA-160RZ is a standard model that can broadly observe various defects in a wide range of workpieces. Additionally, it is capable of CT scanning in just three and a half minutes, contributing to increased efficiency in analysis.

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[UHS_X-ray CT System Imaging Example] CT Cross-Section of Smartphone-Mounted CPU

This is an example of a CT scan taken of a smartphone-mounted CPU.

The "XVA-160RZ" is a micro-focus X-ray CT system used in applications such as non-destructive testing and material analysis. This system can visualize fine internal structures with high resolution. Additionally, you can choose between a high-resolution type and a wide-field type. This time, we will introduce a case study of the micro-focus X-ray CT system "XVA-160RZ"! It is a case where CT scans of a smartphone-mounted CPU were taken.

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[UHS_X-ray CT System Imaging Case] QFP_Wire

This is a case where the wire bonding part inside a QFP was enlarged and imaged using orthogonal CT with the Micro Focus X-ray CT system XVA-160RZ.

This is an example of a QFP (Quad Flat Package) captured using orthogonal CT. It allows for detailed observation of the second bonding marks of the wires. The XVA-160RZ enables easy orthogonal CT imaging simply by attaching a dedicated unit without the need to change the stage. Similar to oblique CT, orthogonal CT can also be performed at high magnification.

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[UHS X-ray CT System Imaging Case] Effects of Translucent Image Filter Processing

This is a case of filter processing performed using a micro-focus X-ray CT system.

Our in-house developed software "Jasper" is a multi-device control software that can accommodate a variety of light sources and cameras. Patterns, voids, and wire impressions that were not visible before filter processing can now be clearly seen thanks to the filter treatment. It can be used not only for post-processing of captured images but also during live observation, contributing to a reduction in man-hours.

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【UHS_X-ray CT System Imaging Case】QFP Observation Case

This is a case of CT imaging of a QFP using the Micro Focus X-ray CT system XVA-160RZ.

This is an example of a QFP (Quad Flat Package) captured using orthogonal CT. It is possible to observe the internal chip patterns in detail. The XVA-160RZ allows for easy orthogonal CT imaging simply by attaching a dedicated unit without changing the stage. Similar to oblique CT, orthogonal CT can also be performed at high magnification.

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【UHS_X-ray CT System Imaging Case】FET Observation Case

This is a case where a FET was imaged using a micro-focus X-ray CT system XVA-160RZ, and voids were detected.

This is an example of capturing an FET (Field Effect Transistor) using 3D oblique CT. In fluoroscopy, it is difficult to distinguish the voids in each layer because the solder in the mounting area overlaps with the solder under the chip. By using CT imaging, it becomes possible to observe the sections separately, as shown in the attached materials. The XVA-160RZ allows for specifying the imaging area during the fluoroscopic observation phase through its user-centric function, enabling a transition to 3D oblique CT imaging without removing the sample, which also contributes to reducing labor costs.

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【UHS_X-ray CT System Imaging Example】 CT Cross-section of Solder Crack

This is a case where a solder crack was detected by performing CT imaging of an interposer substrate using the Micro Focus X-ray CT system XVA-160RZ.

The XVA-160RZ is a versatile 3D X-ray CT system that can be used for quality assurance, failure analysis, and inspection of semiconductors, electronic components, and electronic modules. By utilizing functions such as real-time observation, 3D oblique CT, and orthogonal CT according to the application, it not only advances analysis tasks efficiently but also dramatically improves the success rate of analyses. Additionally, by using the standard program operation function, it can also be employed for product sorting and sampling inspection purposes.

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3D X-ray CT system "3DCT Series"

Capable of handling a wide range of work from high power to low power!

The "3DCT Series" is a three-dimensional X-ray CT system that utilizes our unique technology, the U-Centric (focus-centered rotation) function, allowing for 360-degree perspective observation and high-magnification CT imaging of a focused point with "microscopic vision" and even "nanoscale vision." It includes a lineup of models such as the ultra-high-resolution model "XVA-160αII," which achieves ultra-high magnification (2,000 times) and nanoscale focus sizes (250/800nm), the standard model "XVA-160R," and the wide-range model "Si-230/300." These systems are widely used for the high-precision non-destructive analysis of compact, high-density, and multilayered high-function electronic components. **Features of "XVA-160αII 'Z'"** This ultra-high-resolution model achieves ultra-high magnification (2,000 times) and nanoscale sizes (250/800nm). It includes imaging examples such as transmission images and cross-sectional images of fingerprint sensors, as well as cross-sectional images of electromigration, and is equipped with numerous features including the U-Centric function, optical axis, rotation center, and automatic focus adjustment. *For more details, please refer to the PDF document or feel free to contact us.*

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3D X-ray CT system "XVA-160αII 'Z'"

Ultra-high magnification (2000x) and nano-order size (250/800nm) achieved in an ultra-high resolution model!

We would like to introduce our 3D X-ray CT system, the 'XVA-160αII "Z"'. This product is a super high-resolution model that achieves ultra-high magnification (2,000 times) and nano-order sizes (250/800nm). There are examples of imaging such as transmission images and tomographic images of fingerprint sensors, as well as tomographic images of electromigration. It is equipped with numerous features, including user-centric functionality, automatic adjustment of the optical axis, rotation center, and focus. 【Standard Specifications】 ■ Flat panel detector ■ User-centric functionality ■ High magnification (2,000 times) ■ Focus size switching function (250/800nm) ■ High-resolution top table ■ Automatic adjustment of optical axis, rotation center, and focus *For more details, please refer to the related links or feel free to contact us.

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3D X-ray CT system 'XVA-160RZ'

Standard model with 1,600x high magnification! Choose between high-resolution type or wide-field type.

We would like to introduce our 3D X-ray CT system, the 'XVA-160RZ'. This product is a standard model that allows you to choose between high-resolution type and wide-field type. It comes standard with features such as a flat panel detector, user-centric functionality, and automatic focus adjustment, and there are examples of capturing transmission images, tomographic images, and 3D images using millimeter-wave radar. 【Standard Specifications】 ■ Flat panel detector ■ User-centric functionality ■ High magnification (1,600 times) ■ Visible light mapping function ■ Automatic focus adjustment *For more details, please refer to the related links or feel free to contact us.

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X-ray CT system imaging example: CT cross-section of solder cracks

We will introduce a case of tomographic imaging of solder cracks inside semiconductors captured with a micro-focus X-ray CT system!

The micro-focus X-ray CT system 'XVA-160RZ' is an X-ray CT system that can visualize high-resolution fine internal structures used in applications such as non-destructive testing and material analysis. You can choose between a high-resolution type and a wide-field type. This time, we will introduce a case study of the micro-focus X-ray CT system 'XVA-160RZ'! It is a case where the internal solder crack of a semiconductor was imaged. 【Details】 ■ Industry of the company that introduced the system Semiconductor, electronic components, and electronic equipment manufacturing ■ Purpose of introduction Quality assurance, failure analysis ■ Effects of introduction Increased productivity due to improved success rate of failure analysis work Improved yield due to faster identification of defect causes *For more details, please check the PDF download.

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3D X-ray CT system 'EVA-160'

Wide field of view and smooth operation, compatible with large substrates! 3D X-ray CT system equipped with a large stage.

We would like to introduce our 3D X-ray CT system, the 'EVA-160'. This product features a new platform combined with new image processing, offering a wide field of view and smooth operation, capable of handling large substrates. The standard specifications include a flat panel detector, visible light mapping function, and automatic focus adjustment function. Additionally, we offer optional features such as 3D oblique CT functionality and the orthogonal CT unit: Presto. 【Standard Specifications】 ■ Flat panel detector ■ User-centric function ■ Large stage (supports 500mm size) ■ Visible light mapping function ■ Automatic focus adjustment function *For more details, please refer to the related links or feel free to contact us.

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3D X-ray CT system 'XVA-160RCE'

All-in-one new model with both ultrasound and CT functions in a deskless design!

The "XVA-160RCE" is a 3D X-ray CT system capable of analyzing everything from miniaturized electronic components to double-sided mounted boards. In addition to a new design, it achieves a reduced installation space compared to conventional models (30% less than before). Please feel free to contact us if you have any inquiries. 【Features】 ■ Complies with CE standards ■ Oblique CT imaging anywhere ■ Standard equipped with Signal Tower UPS ■ Space-saving ■ Compatible with orthogonal CT as well *For more details, please refer to the PDF document or feel free to contact us.

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Microfocus X-ray CT system 'Si-230/300'

Equipped with a high-output, high dynamic range detector, achieving higher resolution CT!

The "Si-230/300" is a micro-focus X-ray CT system that employs a high dynamic range camera, achieving high-resolution imaging. It supports a wide range of products, from aluminum die-casting to power devices. With the adoption of high-performance reconstruction algorithms, more detailed information can be obtained. 【Features】 ■ Utilizes a high dynamic range camera for high-resolution imaging ■ Adopts high-performance reconstruction algorithms for more detailed information ■ Supports a wide range of products, from aluminum die-casting to power devices *For more details, please refer to the related links or feel free to contact us.

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Microfocus X-ray CT system 'Si-150'

Provides suitable CT images! High resolution and clear fluoroscopic and CT images can be obtained with a flat panel.

The "Si-150" is a high-performance scanner designed for large samples, equipped with a high-power 150kV micro-focus X-ray source. The micro-focus X-ray source can switch between focal sizes of 5μm, 20μm, and 50μm in three stages, providing optimal CT images. The flat panel offers high resolution and clear fluoroscopic and CT images, and the X-ray sensor allows for the selection of a new digital flat panel and imaging intensifier. 【Features】 ■ Equipped with a high-power 150kV micro-focus X-ray source ■ The micro-focus X-ray source can switch between focal sizes of 5μm, 20μm, and 50μm in three stages ■ The X-ray sensor allows for the selection of a new digital flat panel and imaging intensifier ■ The flat panel provides high resolution and clear fluoroscopic and CT images *For more details, please refer to the related links or feel free to contact us.

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Micro Focus X-ray CT System 'Presto-90'

Achieving a high-precision stage with a stone base! 3D images can be constructed, and cutting can be done freely.

The "Presto-90" is a micro-focus X-ray CT system that features a compact design that changes conventional concepts while achieving a high dynamic range sensor of a digital flat panel and a high-precision stage of a stone plate. The CT scanner is designed for easy operation by anyone, allowing for the construction of three-dimensional images and free cutting. It can be used not only for scans in the medical field such as biomedical applications, small animals, excised organs, and bones, but also in agriculture, forestry, and fisheries for beans, seeds, fruits, rice, and other crops, as well as in the biological and geological sciences for insects, small animals, geology, fossils, and meteorites, and in industrial fields such as electronics, microdevices, polymer materials, and paper. 【Features】 ■ Easy operation ■ Ultra-compact ■ High image quality ■ Low cost ■ Wide range of applications *For more details, please refer to the related links or feel free to contact us.

  • X-ray inspection equipment

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X-ray measurement technology: 3D oblique CT

Oblique angle imaging allows for tomographic imaging without damaging large substrates! High operability has also been achieved.

We would like to introduce our technology, "3D Oblique CT." Oblique CT utilizes a user-centric function to perform CT imaging with the detector tilted at an oblique angle, allowing for imaging of large substrates under the same conditions in all 360 degrees. Additionally, it enables the focal point of the X-ray to be brought closer to the area of interest, allowing for tomography at high magnification. It also achieves high operability, as no special fixtures are required; you can simply place the sample on the stage to perform tomography. 【Features】 ■ Imaging of large substrates under the same conditions in all 360 degrees ■ Ability to bring the area of interest closer to the X-ray focal point ■ Tomography at high magnification is also possible ■ No special fixtures required ■ Tomography can be performed just by placing the sample on the stage *For more details, please refer to the related links or feel free to contact us.

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Cone Beam CT (Computed Tomography) using X-ray measurement technology

Ideal for analyzing small components with a low aspect ratio! It enables precise and clear tomography imaging.

We would like to introduce our technology, "Cone Beam CT." By attaching the dedicated Presto/Prestoβ unit, CT scanning can be performed. Thanks to the optimization of the reconstruction program, pre-scan calibration is unnecessary. The operability has significantly improved, allowing for precise and clear tomographic imaging of small components. 【Features】 ■ CT scanning can be performed by attaching the dedicated Presto/Prestoβ unit. ■ Pre-scan calibration is unnecessary due to the optimization of the reconstruction program. ■ Operability has significantly improved, enabling precise and clear tomographic imaging of small components. ■ Ideal for precise tomographic analysis of small components. *For more details, please refer to the related links or feel free to contact us.

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X-ray measurement technology: U-centric function

Don't miss the key points! Even during detector tilting, magnification, and stage rotation, it continues to keep the sample centered.

We would like to introduce our technology, the "User-Centric Function." The focus-centered rotation function allows for easy analysis without missing the inspection area. Thanks to our unique technology, even when the detector is tilted, magnified, or the stage is rotated, the sample remains centered. 【Features】 ■ The focus-centered rotation function allows for easy analysis without missing the inspection area. ■ Our unique technology keeps the sample centered even when the detector is tilted, magnified, or the stage is rotated. *For more details, please refer to the related links or feel free to contact us.

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