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  3. 株式会社ダン科学 入間営業所
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Industrial Machinery
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株式会社ダン科学 入間営業所

addressSaitama/Iruma-shi/nakagami 508-2
phone-
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last updated:Dec 08, 2025
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株式会社ダン科学 Product Lineup

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Cleaning device WET CLEANER Cleaning device WET CLEANER
Dispersion Device SPACER SPRAYER Dispersion Device SPACER SPRAYER
Static Electricity Removal Device LINE IONIZER Static Electricity Removal Device LINE IONIZER
Inspection Equipment Inspection Equipment
High Pressure Pulse Jet DP-GUN High Pressure Pulse Jet DP-GUN
Polishing device POLISHER Polishing device POLISHER
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High Pressure Pulse Jet DP-GUN

Our company offers the "DP-GUN," which, due to its intermittent spray, allows for a lower flow rate even at the same pressure (impact), making it less likely to form a water film and enabling direct repeated impacts on the target object. It demonstrates excellent cleaning effects for removing foreign substances, cleaning masks (with holes), and cleaning three-dimensional objects such as cassettes.

High-pressure pulse jet DP-Gun for cleaning masks, glass, and wafers.

If the pressure is the same, the water usage is 1/3; if the flow rate is the same, the pressure is 3 times; with a lower flow rate, there are repeated impacts. For removing slurry after mask and glass cleaning wafer polishing.

A cleaning nozzle unit that requires less water and is less likely to form a water film, which can be retrofitted to existing equipment. A cleaning nozzle that operates at a maximum of 30Hz. A pump that generates high-pressure water of 5 to 10 MPa. A combination of control units. Conventional continuous spraying applies pressure over a self-created water film, which tends to increase cleaning power = increase pressure = increase flow rate, resulting in a thicker water film. However, the DP-Gun uses intermittent spraying, which results in a lower flow rate at the same pressure (impact), making it less likely to form a water film and allowing the sprayed water to directly impact the target object. By repeatedly applying intermittent spray impacts, it demonstrates excellent cleaning effects for removing foreign substances from the items being cleaned, cleaning masks, and cleaning three-dimensional objects such as cassettes (with narrow grooves and intricate shapes). The pump unit achieves stable water pressure control with minimal water waste during pressure adjustments by performing feedback control in accordance with flow rate changes caused by the opening and closing of the nozzle. *Please consult us regarding the spraying of a fixed amount of liquid and spray application measurement. *Regular maintenance of the nozzle and pump is required.

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High-pressure intermittent spray "DP-Gun"

For cleaning various masks, glass, and after wafer polishing! Capable of opening and closing the nozzle 30 times per second, it delivers repeated impacts with a small amount of water.

A cleaning nozzle unit that requires less water and is less likely to create a water film, which can also be retrofitted to existing equipment. A cleaning nozzle that operates at a maximum of 30Hz. A pump that generates high-pressure water of 5 to 10 MPa. A combination with a control unit. Conventional continuous spraying applies pressure over a self-created water film, leading to an increase in cleaning power = increase in pressure = increase in flow rate, resulting in a thicker water film. However, the DP-Gun uses intermittent spraying, which means that even at the same pressure (impact), the flow rate is lower, making it less likely to form a water film, and the sprayed water directly impacts the target object. By repeatedly applying intermittent spray impacts, it demonstrates excellent cleaning effects in removing foreign substances from the items being cleaned, cleaning masks, and cleaning three-dimensional objects such as cassettes (with narrow grooves and complex shapes). The pump unit achieves stable water pressure control with minimal waste water during pressure adjustment by performing feedback control that matches flow rate changes due to nozzle opening and closing. *Please consult us regarding spraying a fixed amount of liquid and measurement + spray application. *Nozzles and pumps require regular maintenance.

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