サーモニックENG List of Products and Services

We would like to introduce the five types of furnaces we handle, including their atmospheric compatibility, temperature ranges, and representative applications. Starting with the "Chlorine Furnace," which is compatible with halogens such as Cl2/HCl, we also offer the "Carbon Furnace" for ultra-low oxygen and high temperatures, the clean and agile "Metal Furnace," the versatile "Multi-Atmosphere Furnace" that includes humid conditions, and the small-scale "Tubular Furnace" for initial testing. We also have test equipment available. In addition to small-scale units, we have experience in manufacturing furnaces for mass production. 【Features】 ■ Chlorine Furnace - Compatible Atmospheres: Cl2/HCl/Inert (N2/Ar) - Temperature: Up to around 1800°C (depending on model and material) - Main Applications: Chlorination/Chloride Volatilization/Halogen Purification/Surface Modification ■ Metal Furnace - Compatible Atmospheres: Vacuum/Air/N2/Ar/Small amounts of H2 - Temperature Range: Approximately up to 1800°C (depending on model) - Main Applications: Sintering/Diffusion Bonding/Oxidation/Reduction Annealing/Crystallization of Metals and Ceramics *For more details, please feel free to contact us.

• Industrial Furnace

We handle "tubular furnaces" that emphasize instrumentation. We solve issues such as the inability to collect data during the process, only being able to identify differences before and after firing, and the lack of sampling ports and back pressure control, which prevents pressure and flow rate adjustments. In consultation with our customers, we implement flow meters (MFC), pressure gauges, thermocouples for material temperature, and sampling lines with appropriate ranges and specifications. 【Features】 ■ Equipped with necessary instrumentation: In consultation with customers, we implement flow meters (MFC), pressure gauges, thermocouples for material temperature, and sampling lines with appropriate ranges and specifications. ■ Synchronized logging: Temperature, flow, and pressure are recorded with the same timestamp. ■ Flexibility of process ports: Sampling ports, bypass lines, and drain/condenser traps can be designed at the inlet and outlet. *For more details, please feel free to contact us.

• Industrial Furnace

Our company offers a "Multi-Atmosphere Furnace" that is precisely designed on a two-axis of "atmosphere × temperature" for material evaluation and phase transition tests in oxidation/reduction atmospheres. It has a built-in vacuum system that allows for vacuum replacement before and after processing, followed by replacement with a specified gas, reducing the risk of residual gas when the furnace is opened. Additionally, the tray design offers high flexibility, enabling the extraction of optimal conditions for scale-up through parallel DOE of multiple samples under the same conditions in a short cycle. [Reasons why our carbon furnace is effective for graphitization] - Compatible with generated gases such as NH3 and CO: Designed with materials, piping temperature control, and instrumentation tailored to gas characteristics. - Built-in vacuum system: Allows for vacuum replacement before and after processing, followed by replacement with a specified gas, reducing the risk of residual gas when the furnace is opened. - Rectangular casing × stacked design: High flexibility in tray design allows for the extraction of optimal conditions for scale-up through parallel DOE of multiple samples under the same conditions in a short cycle. *For more details, please feel free to contact us.

• Industrial Furnace

We handle "multi-atmosphere furnaces" that address generated gases such as NH3 and CO. Designed for a seamless process from vacuum replacement → atmosphere control → heating → exhaust gas harmlessness (scrubber/catalytic oxidation/thermal oxidation). In addition to small units, we also have a track record of producing furnaces for mass production scales. [Reasons why our carbon furnace is effective for graphitization] ■ Addresses generated gases such as NH3 and CO: Designed with materials, piping temperature control, and instrumentation tailored to gas characteristics. ■ Built-in vacuum system: Allows for vacuum replacement before and after processing → designated gas replacement, reducing the risk of residual gas when the furnace is opened. ■ Rectangular design × stacked shelves: High flexibility in tray design, enabling rapid extraction of optimal conditions for scale-up through parallel DOE of multiple samples under the same conditions. *For more details, please feel free to contact us.

• Industrial Furnace

We offer a "Multi-Atmosphere Furnace" that allows for flexible design of dew point and oxygen partial pressure. It addresses challenges such as easy fluctuations in humidity, slow switching leading to lack of reproducibility, fears of condensation, backflow, contamination, and corrosion, as well as the low degree of freedom in parallel conditions and time-consuming condition setting in tube furnaces. Additionally, the specifications can be customized according to customer requests, so please consult us for details. 【Reasons Why Our Carbon Furnace is Effective】 ■ Humidity system independent of gas type: Directly connected to Wetter for setting humidity levels with N2/Ar/air (small amount of H2 also acceptable). ■ Vacuum replacement → Gas replacement: Pre-removal of air inside the sample, achieving the desired humid atmosphere from the start. ■ Speed of switching: Easily switch between dry/wet and N2/Ar/air (small amount of H2). ■ Stacked shelves × rectangular sleeves: Short cycle parallel testing with multiple samples under the same conditions. *For more details, please feel free to contact us.

• Industrial Furnace

Our company offers a "Chlorine Furnace" that can reproduce corrosion behavior in chlorine and hydrogen chloride atmospheres. This experimental furnace can safely replicate high-temperature and corrosive environments. It is theoretically expected to be applied in fundamental research on high-temperature corrosion mechanisms caused by chlorine gas, durability evaluations of chlorine-resistant materials (high alloys, coatings, ceramics), and testing platforms for corrosion prevention coatings. We also have test equipment available. 【Features】 ■ Compatible with corrosive gases such as chlorine and hydrogen chloride ■ Simultaneous control of reduced pressure and temperature ■ High-purity atmosphere due to dry structure ■ Reduced risk of process gas leakage due to constant reduced pressure atmosphere *For more details, please feel free to contact us.

• Industrial Furnace

The "chlorine furnace" we handle has a structure that allows for independent control of temperature and chlorine partial pressure under reduced pressure. Urban mines have a complex coexistence of metals such as Au, Cu, Sn, Fe, and Ni. If these can be separated using a dry chlorination volatilization method, it would be possible to implement a new recycling method that efficiently recovers valuable metals while reducing the burden of wastewater treatment. Additionally, due to the characteristics of this device, which allows for precise control of temperature, pressure, and chlorine partial pressure, we believe it could potentially develop into "selective recovery of valuable metals from urban mines" in the future. 【Features】 ■ Volatilization of base metals at low temperatures: Selective volatilization of FeCl3, SnCl4, etc., around 200-300°C ■ Control of noble metal salt generation at medium temperatures: Separation of noble metals using stable regions such as AuCl3 ■ Reaction sequence switching through pressure control: Control of the generation and decomposition equilibrium of chlorides under reduced pressure conditions *For more details, please feel free to contact us.

• Industrial Furnace

We handle a "small chlorine furnace" for research and development purposes. This device was developed to address issues such as the "high risk of gas leakage and poor safety" of tubular furnaces, and their unsuitability for sample scale-up and continuous testing. The equipment is a sealed structure furnace that can safely and controllably supply chlorine and hydrogen chloride, allowing for high reproducibility in dry processing using corrosive gases while ensuring sufficient sample amounts. 【Features】 ■ High corrosion-resistant materials: Achieved through Thermonic's unique technology for high corrosion resistance. ■ Easy scrubber connection: Simple connection with liquid absorption and two-stage neutralization towers. ■ Corrosive gas monitoring compatible: Can operate in conjunction with leakage detection sensors. ■ Scale adaptability: Capable of processing samples from several grams to several hundred grams. ■ Always operates under negative pressure: By operating at a pressure lower than atmospheric pressure, the risk of process gas leakage is reduced. *For more details, please feel free to contact us.

• Industrial Furnace

Our "Carbon Furnace" allows for the precise reproduction of high-temperature phase transitions, crystallization, and sintering under conditions of "ultra-low oxygen × 3000℃ class × vacuum replacement." It can be used in processes such as promoting phase transitions and recrystallization, controlling grain growth (phase stabilization at high temperatures), densification sintering of ceramics and difficult-to-sinter materials, and energy control of surfaces and interfaces (surface stabilization under low oxygen conditions). It is suitable for developing temperature recipes from research to small-scale production. 【Reasons Why Our Carbon Furnace is Effective (Partial)】 ■ Creates ultra-low oxygen partial pressure - Vacuum pumping → Ar/N2 replacement (dilute H2 if necessary*) to gradually lower the oxygen potential * H2 is operated within the safety design range of the equipment (e.g., below 4%) - The carbon material in the furnace absorbs residual O2 through getter action, suppressing side reactions. ■ High-temperature stability at 3000℃ - Regular use up to 2800℃ / maximum up to 3000℃, with gradual heating and holding for precise control of phase transitions, crystallization, and sintering. *For more details, please feel free to contact us.

• Industrial Furnace

The "carbon furnace" we handle is suitable for basic reaction tests of nitriding. Since the reaction initiation temperature is high with N2 alone, balancing grain growth and coarsening is difficult, and during cooling, surface reoxidation occurs, leading to variations in color, resistance, and hardness. Our product addresses these challenges. Additionally, we have a track record of manufacturing furnaces at mass production scales, not just small units. Please feel free to contact us when you need assistance. 【Reasons Why Our Carbon Furnace is Effective】 ■ Creates an extremely low oxygen partial pressure - Gradually lowers the oxygen potential through vacuum pumping and N2 replacement - The carbon in the furnace material absorbs residual O2, suppressing oxidation side reactions ■ Quickly reaches sufficient high-temperature ranges - Achieves and maintains temperatures from 1400 to 2400°C in a short time ■ Short cycle for condition setting - Allows simultaneous evaluation of multiple samples with tray flexibility/shelf configuration, making it easier to verify the effects of thickness and contact *For more details, please feel free to contact us.

• Industrial Furnace

We handle a compact "carbon furnace" that can be gradually replaced from vacuum to inert gas. It can be used for experiments and processes related to solid-phase carbonization (powder mixing method, coating method, carburizing) and composite carbonization (such as using B4C) for increasing hardness and optimizing carbon supply conditions (types, ratios, and contact states of carbon materials). Please feel free to contact us if you have any inquiries. 【Reasons to Choose Our Carbon Furnace (Partial)】 ■ Rapidly reaches high temperatures - Stable attainment and maintenance of 1600-2800°C** - Temperature guidelines effective for carbonization: SiC 1600–2000°C, TiC 1500–2100°C, ZrC 1800–2300°C ■ Suppresses side reactions at extremely low oxygen partial pressure - Vacuum → Replacement with Ar/N2 - Reduces residual oxygen through getter action of furnace carbon, suppressing CO generation *For more details, please feel free to contact us.

• Industrial Furnace

The "carbon furnace" we handle solves challenges such as the time-consuming condition setting and the difficulty of reproducing short cycles. By evacuating the air inside the sample in advance, we shorten the replacement time. Additionally, we can arrange square trays in parallel with flexible tray configurations, allowing for the evaluation of thickness variation effects. We also have test machines available. Please feel free to contact us if you need assistance. 【Reasons Why Our Carbon Furnace is Effective (Partially)】 ■ Sintering at Extremely Low Oxygen Partial Pressure - Gradual replacement from vacuum to Ar/N2 - Reduction of residual O2/oxidizing species through the gettering effect of carbon materials ■ Ultra-High Temperature Process - Long-term stable operation at normal use temperatures up to 2800°C, with a maximum of 3000°C - Precise control of grain growth and rearrangement through gradual heating and holding in the 1200-2600°C range *For more details, please feel free to contact us.

• Industrial Furnace

Our company handles "carbon furnaces" that operate at 3000°C and in extremely low oxygen conditions. We address challenges such as the inability to reduce oxygen partial pressure, leading to oxidation and decarbonization in high-temperature regions that prevent achieving target characteristics, as well as the limited tray flexibility and low processing capacity/strict sample size constraints of tube furnaces. These furnaces can be used for applications involving graphite materials, graphite foils, graphite sheets, isotropic graphite, and molded bodies. [Reasons for Effectiveness in Graphitization] - Easy to create extremely low oxygen: The furnace material captures residual oxygen chemically due to its carbon composition, and the vacuum replacement eliminates air inside the sample beforehand. - Temperature range of 3000°C: Stable heat distribution and retention in the -3000°C graphitization zone, with rapid attainment and high reproducibility. - Flexibility in tray/sleeve design: Rectangular sleeves and stacking allow for simultaneous processing of multiple samples, speeding up condition setting. - Atmospheric flexibility: It is possible to combine vacuum/Ar/N2/low concentration H2 to reduce defects and facilitate thermal desorption. *For more details, please feel free to contact us.

• Industrial Furnace

The "metal furnace" we handle aims to evaluate the surface reactions and phase changes of the materials themselves; however, challenges such as outgassing from graphite components and organic materials can disrupt the system. Processes that are sensitive to chemical atmospheres, such as halogen, nitriding, and reduction, have higher reproducibility when carbon-free. Therefore, a metal furnace, where the inner walls, heaters, and fixtures are all made of metal, is effective. We also have test units available. In addition to small-scale machines, we have experience in manufacturing furnaces for mass production scales. 【Features】 ■ Carbon-free - All-metal (Mo/W) hot zone/metal chamber, with no use of graphite or organic materials, suppressing side reactions derived from carbon. ■ Clean atmosphere switching - Smooth transition from vacuum to Ar/N2, with low blanking after replacement. ■ Reproducibility of reactions - Reproducing the same conditions in a small chamber with short cycles. *For more details, please feel free to contact us.

• Industrial Furnace

Our company handles the "Metal Furnace" for all-metal hot zones. In joining (sealing, brazing, diffusion bonding), trace amounts of O2/H2O/hydrocarbons are directly related to wettability, interfacial reactions, and airtightness. The metal furnace operates in a vacuum of 10^-5 Pa level with (Mo/W) hot zones, eliminating sources of contamination from carbon and organic materials. It can be applied to high-purity annealing/sealing of thin films, electrodes, and optical components. 【Features】 ■ Compatible with high vacuum (10^-5 Pa level) to reducing atmosphere operation ■ Maintains a clean atmosphere with a metal furnace structure (Mo/W) ■ Temperature uniformity within ±1°C and long-term stable control ■ Easy combination with metal jigs and load pressurization mechanisms ■ Supports miniaturization of samples and localized heating tests *For more details, please feel free to contact us.

• Industrial Furnace

The "metal furnace" we handle achieves stable reproduction of degassing behavior through high-precision temperature control (up to 1800°C) and automatic exhaust control. It addresses challenges such as the inability to efficiently remove adsorbed water, CO2, and residual organic substances generated from within the sample during high-temperature processing, as well as the lack of lab-scale equipment that can reliably implement high-purity processes. Despite its compact size, it features a structure that allows for scaling up to larger furnaces. 【Features】 - Eliminates contamination from carbon sources due to its metal heater and metal chamber structure. - Supports high vacuum operation (10^-3 to 10^-5 Pa) and switching to a reducing atmosphere (H₂/Ar/N₂). - Achieves stable reproduction of degassing behavior through high-precision temperature control (up to 1800°C) and automatic exhaust control. - Optimized heat profile for high purification of oxides and nitrides, and reduction of residual C and O. - Compact yet designed for scalability to larger furnaces (manufactured by Thermonik ENG). *For more details, please feel free to contact us.

• Industrial Furnace

Our "metal furnace" can be safely installed even at the laboratory or analysis room level due to its compact and sealed structure. It is suitable for applications such as reduction treatment of catalyst carriers and conductive materials, high-purity heat treatment of sputtering target materials and sintered bodies, and fundamental research on oxidation, diffusion, and precipitation behavior at high temperatures. We also have test units available. Additionally, we can manufacture furnaces for mass production scales beyond the small models. 【Features】 - Uses metals (Mo/W/stainless steel, etc.) for the furnace material to suppress contamination from carbon sources. - Compatible with vacuum to reducing atmospheres (H₂/N₂/Ar), allowing for heat treatment in a high-purity environment. - High-precision temperature control (up to 1800°C) enables accurate reproduction of annealing conditions for thin films and fine particles. - Its compact and sealed structure allows for safe installation even at the laboratory or analysis room level. - Proven track record of scaling up to mass production machines (Thermonic ENG also has experience in manufacturing large metal furnaces). *For more details, please feel free to contact us.

• Industrial Furnace

Our company is an electric furnace manufacturer that accelerates the prototyping to mass production of materials through the integration of "electricity × equipment × chemistry." The small chlorine furnace is suitable for basic studies on selective chlorination/chloride volatilization using Cl2, characterized by material selection and temperature/atmosphere control based on a corrosive environment. We solve challenges such as "impurity removal through dry processes using selective chlorination/chloride volatilization" and high-temperature treatment/high-purity enhancement of CNT/carbon materials. 【Features】 ■ Small chlorine furnace: Suitable for basic studies on selective chlorination/chloride volatilization using Cl2, with material selection and temperature/atmosphere control based on a corrosive environment. ■ Carbon furnace (up to 3000°C): Sintering under extremely low oxygen conditions. ■ Metal furnace (up to 1800°C): Sintering in a high-purity atmosphere. ■ Multi-atmosphere furnace (switchable recipes for humidification, oxidation, and reduction). ■ Small tubular furnace: Suitable for testing and educational purposes. *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

We are seeking sales partners in response to the expanding demand for equipment in the advanced materials field (semiconductors, batteries, powder metallurgy, university research). Examples of equipment we handle include various electric furnaces ranging from small to pilot scale, as well as small chlorine furnaces (compatible with Cl2/HCl) for selective chlorination and high-purity process development. Interested companies are requested to provide their "company name/contact person/expertise/major transaction areas/location." 【Target】 ■ Technical trading companies ■ Equipment trading companies (those with networks in research institutions and material manufacturers) *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

The "tubular furnace" we handle allows for the selection of necessary instrumentation equipment as options according to the customer's application. It operates stably at temperatures up to 1200°C, with a heating zone of Φ120mm×500mmL. The tube size is Φ70mm×1000mmL. Additionally, it is compatible with various gases such as inert gases like N2 and Ar, as well as H2. Please feel free to contact us when you need assistance. 【Features】 ■ Stable operation: Up to 1200°C (higher temperatures can be discussed) ■ Heating zone: Φ120mm×500mmL ■ Tube size: Φ70mm×1000mmL (size/zone length can be customized) ■ Atmosphere: Compatible with various gases such as inert gases like N2 and Ar, as well as H2 *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

We will introduce the issues faced on-site regarding small chlorine furnaces (compatible with Cl2/HCl) and explain why the chlorination process can be operated safely. It is possible to remove trace impurities in oxides/metals as volatile chlorides, enabling de-metalization and de-oxygenation through halogen cleaning, as well as surface cleaning. Additionally, our unique design includes corrosion-resistant structures that suppress material degradation even at high temperatures with Cl2/HCl, ensuring safety and reproducibility. 【Common Issues】 ■ Wet acid treatment has heavy waste liquid disposal and energy costs, and we want to replace it with dry methods. ■ Since the product is water-sensitive, we want to remove metal contaminants without wetting it. ■ We want to selectively remove only metal impurities in a dry atmosphere. ■ We want to scale up from CI2 tests in tubular furnaces more safely. *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

We would like to introduce our "Small Metal Furnace." It operates stably at temperatures up to 1800°C, accommodating high-temperature treatments (sintering/diffusion bonding/aging, etc.), and its all-metal construction minimizes contamination from furnace materials, enhancing the reproducibility of color and properties. Additionally, it features a compact design that allows for easy installation even in environments with limited space, such as universities and research laboratories. 【Features】 ■ Stable operation up to 1800°C: Suitable for high-temperature treatments (sintering/diffusion bonding/aging, etc.) ■ Cleanliness: All-metal construction minimizes contamination from furnace materials ■ Reproducibility of low-oxygen atmosphere: Standard procedures for purging and replacement with N2/Ar ■ Compact design: Easy installation in environments with limited space, such as universities and research laboratories *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

We will introduce why our small carbon furnace can achieve low oxygen and ultra-high temperatures. The carbon furnace material reacts with residual oxygen, featuring a design and manufacturing know-how that ensures it does not "leak." It removes air from inside the powder using a vacuum pump and replacement method. With a high emissivity graphite heater, a uniform heating hot zone, and high insulation, it efficiently heats while avoiding local overheating, making it possible to stably reach temperatures up to 3000°C. **Features of the Small Carbon Furnace** - Capable of heating up to 3000°C: Achieves ultra-high temperatures in a short time with the radiant heat of the graphite heater. - Easy to sinter in low oxygen: The carbon inside the furnace reacts with residual O2. - Air inside the powder is also replaced: Reduces O2 between particles through repeated cycles of vacuum and inert gas. - Suppresses temperature variations: Reduces differences in the center, edges, and thickness direction with a "uniform heating zone" that warms evenly. *For more details, please download the PDF or feel free to contact us.*

• Industrial Furnace

In the previous session, we introduced the applications of a small carbon furnace. This time, we will present the actual specifications and configuration of the device. This device is designed as a compact type for research and development, making it possible to install in limited spaces. It supports heating in a vacuum and inert gas (Ar, N2) atmosphere, achieving a stable heating environment that suppresses oxidation. This specification serves as an example of the specs for a small research device. The device size can also accommodate larger models. 【Main Specifications】 ■ External dimensions: 1000W × 1000D × 2100H mm ■ Effective internal dimensions: 200W × 200D × 200H mm ■ Supported atmosphere: Inert gas (Ar, N2) and vacuum ■ Internal material: Graphite ■ Door structure: Front-opening type ■ Vacuum pump: Rotary pump ■ Monitoring and recording: Temperature, flow rate, pressure, etc. 【Safety Devices】 ■ Over-temperature prevention ■ Cooling water level detection, etc. *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

In the previous session, we introduced the "principle" of the small carbon furnace. This time, we will discuss the actual applications and how it can be applied in research and development. ■ Main Examples of Applications 1. Synthesis and Sintering of High-Temperature Materials (up to 3000°C) Thanks to the extremely low oxygen environment unique to carbon furnaces, high melting point materials such as carbides and nitrides can be sintered without oxidation. 2. High Crystallization of Carbon-Based Materials Suitable for the high crystallization of materials such as graphite and carbon nanotubes. 3. High-Temperature Treatment and Reduction Reactions of Metal Materials Metal oxides can be reduced under low oxygen conditions, allowing for control over microstructure and phases. 4. Evaluation of High-Temperature Gas Reactions Interactions with reactive gases and material stability can be verified in various atmospheres such as N2, H2, and Ar. 5. Material Process Evaluation at Research and Development and Prototype Scale Used for R&D purposes to optimize conditions in a short time. In the future, we are considering applications for the development of new materials utilizing more precise control of oxygen partial pressure. Next time, we will provide detailed information about the "specifications." *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

The small carbon furnace is characterized by its ability to maintain an extremely low oxygen environment and ultra-high temperatures (around 3000°C). In this explanation, we will simply clarify "why this is possible" from a fundamental perspective. 1) Why does it become "extremely low oxygen"? ■ The furnace material itself acts as an "oxygen getter." The hot zone of the furnace is composed of carbon (graphite). Residual O2/CO2/H2O reacts with carbon and is reduced and fixed as CO/CO2, effectively lowering the oxygen activity. As a result, even materials that are sensitive to oxidation can be processed in a mild atmosphere. ■ Built-in vacuum system + replacement Before heating, the system is evacuated, and by repeatedly purging with inert gas (such as Ar/N2), air inside the sample can be expelled in advance. This is effective for gas replacement in pores and powder gaps that cannot be reached by simple "ventilation." 2) Why is "3000°C" possible? ■ Heating element = high-temperature stability of graphite Graphite exhibits extremely high heat resistance under inert atmospheres and vacuum, allowing for efficient heating of the hot zone through resistance heating. *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

While the demand for dry reduction heat treatment is increasing, the following challenges are prominent in the field. ■ Challenges in Research Settings - Limitations on maximum achievable temperature (recipe design is constrained by material and structural upper limits in tubular furnaces) - Limitations on sample preparation quantity (effective heating area is narrow, making it unsuitable for scale-up considerations) - Difficulty in maintaining extremely low oxygen levels (ppm to ppb level) (due to leaks, residual O2, and fine cracks from heat shock, etc.) ■ Directions for Solutions (Required Specifications) - Uniform heating in a short time: rapid temperature rise, high temperature uniformity, and good response - Flexible scaling: continuous support from small sample sizes to small-scale mass production - Atmosphere control: stabilization of extremely low oxygen levels with Ar/N2 (and a small amount of H2 as needed) plus low residual O2 design ■ Concept Graphite heating element × high insulation structure × low leak design. A compact carbon furnace optimized for prototyping and condition setting, enabling faster and more reproducible dry reduction processes. *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

"While the temperature can be achieved, the targeted reaction site cannot be created." We will overcome that barrier with a small carbon furnace. In this series, we will explain the capabilities of a small carbon furnace that can handle ultra-low oxygen atmospheres (O2 ppm level) and ultra-high temperatures (2,000-3,000°C range) with high reproducibility from a practical perspective. Do you have these challenges? ■ Heating is possible, but characteristics fluctuate with slight oxygen contamination. ■ Large furnaces have slow ramp-up times, making it difficult to establish conditions. ■ Temperature unevenness and undercooking lead to instability in crystallinity and pore structure. Benefits of miniaturization × ultra-low O2 × ultra-high temperature: ■ Reach target conditions in a short time → Increase the number of trials per day. ■ Ensure uniform heating even with small samples → Improved reproducibility. ■ Balance oxygen management and thermal history → Achieve desired crystallinity, conductivity, and microstructure. In this series, we will sequentially introduce the development background, heating principles, application-specific know-how, safety design, specifications & expansions, mini case studies, and FAQs. *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

In the previous session, we introduced the principle of removing metal impurities by converting them into chlorides using a chlorine furnace (chloride volatilization). Today, we will address a common concern: "Isn't it dangerous to flow corrosive and toxic gases like Cl2 and HCl at high temperatures?" Tubular furnaces are readily available and versatile, making them suitable for the new synthesis of small sample sizes. However, there are undeniable "common issues" such as "a small effective heating area, which tends to limit scalability" and "the risk of small cracks in the tubes due to long-term use or thermal shock, increasing the risk of leakage during positive pressure operation." The equation "high temperature × corrosive gas = danger" is intuitively correct. That is why the essence lies in "managing danger" through design philosophy and operational design. The compact chlorine furnace from Thermonik ENG is built with this concept in mind. Design philosophy for safety: 1) Based on negative pressure (reduced pressure) operation, the furnace is equipped with a vacuum system that maintains the internal pressure consistently lower than atmospheric pressure. This suppresses any potential blowout in the event of seal degradation, thereby reducing the risk of Cl2/HCl leakage. *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

We will introduce the following topics regarding the small chlorine furnace we handle in a series: ■ Background of development ■ Impurity removal mechanism inside the chlorine furnace (chloride volatilization method) ■ Equipment specifications and operational points First, let's discuss "Why a chlorine furnace?" In recent years, with the miniaturization of semiconductors and the enhancement of battery performance, the management of metal impurities (conductive foreign substances such as Fe/Cu/Ni) required in powder raw materials has rapidly advanced to the ppm to ppb level. Even slight contamination can have a fatal impact on yield and reliability. Common countermeasures include: 1. Wet method (acid treatment): Dissolving and removing metal impurities with strong acids. 2. Dry method (magnetic separation): Recovering magnetic particles with powerful electromagnets. However, ■ While the wet method has the advantage of uniform removal, it poses challenges such as large amounts of wastewater, unsuitability for water-sensitive materials, and energy load from re-drying. ■ Magnetic separation is limited to magnetic particles and is less effective for non-magnetic metal compounds and fine attachments. *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

The "Compact chlorine furnace" is a product that simplifies post-processing with dry separation and low contamination while leaving the base material intact and eliminating the need for cleaning. It converts metallic impurities in the material into volatile chlorides through selective chlorination using Cl2/HCl, and preferentially removes them through controlled temperature stages and residence times in a dry process. Additionally, by utilizing the vapor pressure difference and Gibbs free energy difference of metal chlorides, it can achieve high selectivity in separation without compromising the composition or crystalline phase of the base material, resulting in minimal wastewater discharge and reduced environmental impact and costs. 【Features】 ■ Selectivity: Utilizes the vapor pressure difference of chlorides to preferentially volatilize only target impurities. ■ Staged temperature profile: Sequential separation from low to medium temperature, minimizing damage to the base material. ■ Dry and low waste: Almost zero wastewater with no cleaning required, simplifying post-processing. *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

The "Compact Chlorine Furnace" is a dry cleaning device for fixtures that uses "selective chlorination → volatilization" with Cl2/HCl. It targets GaN/AlN/Si-based products adhered to MOCVD/epitaxial furnace susceptors, quartz boats, and tubes, converting them into chlorides at temperature stages and gas compositions suited to the materials, and removing them through volatilization at low temperatures. Additionally, it minimizes waste liquid burden without the need for acid washing, and reduces dimensional changes, distortion, and grain boundary damage. 【Features】 ■Selective chlorination × staged temperature: Converts adhered materials to chlorides → volatilizes at low temperatures, suppressing substrate damage. ■Dry process minimizes waste liquid: No acid washing, shortening cleaning and drying processes. ■Maintains dimensions and surfaces: Operates under negative pressure and controls oxygen partial pressure to minimize distortion and roughness changes. ■Compatible with multiple materials: Applicable to fixtures made of quartz, SiC, C/C, and metals (Mo/W/Al-based), among others. *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

The "compact chlorine furnace" is a product that maintains phase and particle size through negative pressure operation and oxygen partial pressure control, while minimizing waste liquid without the need for cleaning. By using Cl2/HCl for selective chlorination, it removes metal impurities that were mixed in during the production of ceramic powders (SiO2/Al2O3/Si3N4) in a dry manner. Additionally, it reduces impurities in a short time while maintaining the composition, crystal phase, and particle size distribution of the mother phase through chlorine volatilization. This allows for the elimination of the washing process, thereby reducing re-drying and waste liquid treatment costs. 【Features】 ■ Selective chlorination × temperature staging: Prioritizes the volatilization of metal chlorides while maintaining the base material phase. ■ Dry process: Minimizes the burden of waste liquid and re-drying without the need for washing. ■ Physical property retention design: Maintains crystal phase, particle size, and specific surface area through control of oxygen partial pressure and residence time. *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

The "small chlorine furnace" enables the dry volatilization and removal of metal impurities such as Fe/Ni/Al remaining in carbon powder through selective chlorination using Cl2/HCl. By controlling chlorination and volatilization with a staged temperature profile, it achieves low residue levels in a short time while maintaining the crystallinity and specific surface area of the base material. Additionally, since it does not use acidic solvents such as hydrochloric acid or sulfuric acid, it reduces the burden of waste liquid treatment while enhancing the purity of the product. 【Features】 ■ Selectively volatilizes metal chlorides through chlorination ■ Dry process eliminates the need for water washing, simplifies post-processing, and improves yield and energy efficiency ■ Base material retention design: Maintains physical properties by controlling oxygen partial pressure and residence time *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

The "Chlorine Furnace" is a device that accommodates halogen gases such as Cl2 and HCl gas, utilizing Thermonic's unique technology. (CE, SEMI, UL standard certification) By adopting a shelf heater, it enables uniform heating, allowing Cl2 gas to diffuse throughout the sample for highly efficient reactions. Additionally, it can lower the boiling point of the generated chlorides, enabling processing at lower temperatures. 【Features】 ■ Accommodates halogen gases such as Cl2 and HCl gas through unique technology ■ Enables uniform heating with the adoption of a shelf heater ■ Allows Cl2 gas to diffuse throughout the sample for highly efficient reactions ■ Can lower the boiling point of generated chlorides, enabling processing at lower temperatures ■ Reduces the risk of leakage of Cl2 and HCl gas *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

The "tubular furnace" is a compact furnace that places samples in a cylindrical heating section (ceramics reaction tube) and performs heating treatment while flowing various atmospheric gases. Despite being small and low-cost, it allows for the measurement of flow rate, pressure, and temperature, making it suitable for evaluating reaction conditions and prototype research. Our tubular furnace is compact and equipped with high measurement capabilities, specializing in material reaction evaluation under gas flow. 【Features】 ■ Can heat while flowing various gases, offering high flexibility in atmospheric conditions; suitable for research and development or prototype applications due to its small size and low cost. ■ Thermocouples can be inserted to directly measure the actual temperature of the sample. ■ The reaction tube is made of alumina, which has excellent corrosion and heat resistance. *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

The "Multi-Atmosphere Furnace" is a versatile furnace that can be heated while circulating various atmospheric gases such as NH3, H2, and O2, in addition to vacuum and inert atmospheres. Furthermore, it is capable of humidifying the gas, allowing for firing in a moist atmosphere, thus accommodating a wide range of reaction conditions. It demonstrates its effectiveness in research and manufacturing environments where complex atmosphere control is required for processes such as material reduction, oxidation, nitriding, and humidification treatment. 【Features】 ■ Compatible with vacuum, inert atmospheres (N2, Ar), oxidizing atmospheres (O2), and reducing atmospheres (H2, NH3) ■ Special heat treatment possible with a humidification device (wetter) ■ Optional exhaust system that can safely handle flammable gases generated in the reaction system ■ Supports maximum temperatures up to 1700°C with a heating rate of 10°C/min ■ Combines corrosion resistance and stable heating with alumina sheath heaters and alumina insulation *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

The "carbon furnace" is a high-temperature heating furnace composed entirely of graphite (carbon) for the heater, insulation, and furnace walls. It enables heating in the high-temperature range of around 3000°C, which is difficult to achieve with conventional electric furnaces, while also keeping the oxygen concentration inside the furnace to an extremely low level. It is suitable for processes that require high temperatures and low oxygen, such as the sintering of carbon materials that need high crystallization and ultra-high melting point metals. 【Features】 ■ Ultra-high temperature compatibility ■ Low oxygen atmosphere ■ Suitable for high crystallization processing ■ Wide range of material compatibility *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace

The "metal furnace" is a high-performance heating furnace composed entirely of metal components (heaters, insulation materials, furnace walls) made from materials such as tungsten and molybdenum. It eliminates trace contamination that is unavoidable in conventional alumina or carbon furnaces, achieving an ultra-high purity, high-temperature, and clean firing environment. In particular, it is suitable for ultra-high temperature processes in vacuum or inert gas atmospheres. It accommodates processes that require stringent temperature and atmosphere management, from research and development to mass production. 【Features】 ■ High purity environment ■ High precision temperature control ■ Ultra-high temperature capability ■ Vacuum and inert atmosphere compatibility ■ Low outgassing and low dust generation *For more details, please download the PDF or feel free to contact us.

• Industrial Furnace