Selective removal of accumulated films and reaction products by chloride volatilization! Maintains the dimensions and surface roughness of the base material.
The "Small Chlorine Furnace" is a dry cleaning device for fixtures that uses "selective chlorination → volatilization" with Cl2/HCl. It targets GaN/AlN/Si-based products adhered to MOCVD/epitaxial furnace susceptors, quartz boats, and tubes, converting them into chlorides at temperature stages and gas compositions suited to the materials, and removing them through volatilization at low temperatures. Additionally, it minimizes waste liquid burden without the need for acid washing, and reduces dimensional changes, distortion, and grain boundary damage. 【Features】 ■Selective chlorination × staged temperature: Converts adhered materials to chlorides → volatilizes at low temperatures, suppressing substrate damage. ■Dry process minimizes waste liquid: No acid washing, shortening cleaning and drying processes. ■Maintains dimensions and surfaces: Operates under negative pressure and controls oxygen partial pressure to minimize distortion and roughness changes. ■Compatible with multiple materials: Applicable to fixtures made of quartz, SiC, C/C, and metals (Mo/W/Al-based), among others. *For more details, please download the PDF or feel free to contact us.
Inquire About This Product
basic information
For more details, please download the PDF or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Applications】 ■ Removal of GaN/AlN deposition films from MOCVD susceptors/susceptor rings ■ Dry cleaning of deposited films and fogging on quartz fixtures (boats, tubes, windows) ■ Removal of metal/silica-based residues from internal fixtures and shower heads of SiC epitaxy equipment ■ Regeneration of transport fixtures/holders for diffusion furnaces and CVD furnaces (alternative to acid cleaning) ■ Low-temperature removal of metal oxides and easily chlorinated residues from carbon fixtures and C/C composites *For more details, please download the PDF or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
Our company integrates three technologies: "electricity," "equipment," and "chemistry," using our unique know-how to develop innovative heating furnaces and other equipment. We handle various electric furnaces (heating furnaces) such as carbon furnaces, multi-atmosphere furnaces, metal furnaces, and chlorine furnaces, leveraging our proprietary high-temperature electric furnace technology. We are not just an equipment manufacturer; we are a strategic development partner that supports innovative manufacturing with advanced heating, looking ahead to the standards of the next decade alongside our customers.