Compact chlorine furnace <Cleaning with dry chlorination using a susceptor and quartz jig>

Selective removal of accumulated films and reaction products by chloride volatilization! Maintains the dimensions and surface roughness of the base material.

The "Compact Chlorine Furnace" is a dry cleaning device for fixtures that uses "selective chlorination → volatilization" with Cl2/HCl. It targets GaN/AlN/Si-based products adhered to MOCVD/epitaxial furnace susceptors, quartz boats, and tubes, converting them into chlorides at temperature stages and gas compositions suited to the materials, and removing them through volatilization at low temperatures. Additionally, it minimizes waste liquid burden without the need for acid washing, and reduces dimensional changes, distortion, and grain boundary damage. 【Features】 ■Selective chlorination × staged temperature: Converts adhered materials to chlorides → volatilizes at low temperatures, suppressing substrate damage. ■Dry process minimizes waste liquid: No acid washing, shortening cleaning and drying processes. ■Maintains dimensions and surfaces: Operates under negative pressure and controls oxygen partial pressure to minimize distortion and roughness changes. ■Compatible with multiple materials: Applicable to fixtures made of quartz, SiC, C/C, and metals (Mo/W/Al-based), among others. *For more details, please download the PDF or feel free to contact us.

Industrial Furnace