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Industrial Machinery
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ダルトン

EstablishmentSeptember 1939 (Showa 14)
capital10000Ten thousand
number of employees361
addressTokyo/Chuo-ku/5-6-10 Tsukiji, Hamarikyu Parkside Place
phone03-3549-6810
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last updated:Oct 08, 2025
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Research and educational facility products Research and educational facility products
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Isolator-related equipment Isolator-related equipment
Semiconductor-related equipment Semiconductor-related equipment
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Power Mill, P model

This machine can process a large quantity of materials, performing a wide range of processes from disintegration and particle size regulation to crushing and granulation.

P model: Model type into which raw materials are fed diagonally ●Changing the disintegration and particle size regulation part enables the machine to have both functions as a conventional disintegrating device and a particle size-regulating device. ●The range of the particle size is quite narrow, thus high yield can be achieved. ●The 360-degree opening screen and the fast-rotating knives provide high performance. ●The rotation speed, the number and shape of knives, and the opening of the screen can be easily adjusted. *For more details, please download the PDF or feel free to contact us.*

  • Crusher

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Vibrating Sieve (power sieve type)

This sieve is capable of offering 1.5 to 3 times higher performance for precision classification than existing machines.

Adjustments of amplitude have allowed for the development of an excellent design for precision classification (one-stage two-classification, two-stage three-classification).

  • Other processing machines

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Light Breaker

The use of this machine in preprocessing makes it easy to disintegrate aggregated raw material.

This machine facilitates the feeding of blocks of raw material or aggregated raw material into another machine. *For more details, please download the PDF or feel free to contact us.*

  • Crusher

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Spartan Granulator

One-step process for dry mixing and wet granulation by adding the liquid

Single rotor and mixing blade are provided in the chamber horizontally. After dry mixing, the liquid shall be added to form wet mass which is then disintegrated into fine granules by the pins on the rotor rotating at high speed. This is most suitable for the applications of the powder metallurgy and ceramic. *For more details, please refer to the catalog or feel free to contact us.*

  • Granulating Equipment

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Midget Dryer MDG-80, batch fluid bed dryer

This compact, fluid bed drying machine is suitable for testing and research.

This is a tabletop fluid bed drying machine for testing and research. *For more details, please refer to the catalog or feel free to contact us.*

  • Drying Equipment

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Career stocker

Store the carrier as is or in a case.

We offer storage solutions that cater to various needs. *For more details, please download the PDF (catalog) or feel free to contact us.*

  • Other semiconductor manufacturing equipment

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Vacuum heating furnace with a bomb

It is a device that removes impurities attached to high-purity gas cylinders used in semiconductor manufacturing processes.

We remove impurities adhering to the inner walls of the cylinder through heating and vacuum extraction. The cylinder size and the number of units processed simultaneously can be customized. We can propose automatic or manual machines according to your budget. 【Features】 ■ Uniform heating of the cylinder is possible (Max 200℃). The temperature inside the furnace is approximately ±1%. ■ Simultaneous cooling of the safety valve of the cylinder is possible during heating (to prevent damage to the safety valve due to heat). * For more details, please download the PDF (catalog) or feel free to contact us.

  • Semiconductor inspection/test equipment

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HFE vapor drying device

Products that fully consider safety.

By using a plate heater with polished technology and special surface treatment on the bottom surface of the vapor generation tank, it is possible to uniformly boil the HFE within the vapor generation tank and generate uniform vapor inside the tank. *For more details, please download the PDF (catalog) or feel free to contact us.

  • Drying Equipment

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Porous silicon formation device (anodization device)

A porous silicon formation device that further applies conventional anodic oxidation equipment. Porous silicon wafers are formed depending on the chemical solution used and the current density.

The anodizing device was traditionally a device that flowed current to form an oxide film, but the further developed porous silicon formation device is one that forms porous silicon by changing the chemical solution used and the current density. *For more details, please download the PDF (catalog) or feel free to contact us.*

  • CVD Equipment

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Fixture cleaning device

We can design and manufacture cleaning solutions for all types of fixtures, including cassettes and quartz fixtures, according to your needs. Stainless steel options are also available.

We can also design and manufacture cleaning fixtures for large equipment. In the case of cassette cleaning, we can provide precision cleaning with integrated brushes. *For more details, please download the PDF (catalog) or feel free to contact us.*

  • Other semiconductor manufacturing equipment

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Resist stripping and cleaning device *Testable models available

A wet process cleaning device with a variety of circulation methods.

We offer a variety of oscillation mechanisms. From manual types to fully automatic types, we will propose options that suit your specifications and budget. 【Optional Features】 ○ Leak sensor ○ Exhaust pressure sensor ○ Emergency stop switch ○ Pause switch (with automatic mechanism) ○ Door sensor (with automatic mechanism) ○ Pressure switch ○ Temperature sensor (constant temperature specification) ○ Automatic fire extinguishing system ○ Patrol light ○ Wired glass or tempered glass ○ Explosion pressure hatch ○ Various interlocks, etc. *Some devices may not be installable depending on the equipment. *You can conduct tests at our Tokyo Test Center (Sumida Ward, Tokyo). (Online support available) *For more details, please download the PDF (catalog) or feel free to contact us.

  • Resist Device

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Wafer cleaning device (batch type) *Testable models available

We propose specifications that consider cost reduction through wet etching.

We achieve low cost and high productivity unique to wet etching. We can accommodate various transport positions and methods according to your needs, and customization with additional mechanisms is also possible. 【Features】 ■ Fully automatic acid and alkaline etching (cleaning) equipment ■ Manual acid and alkaline etching (cleaning) equipment ■ RCA cleaning equipment ■ In addition to front transport type and rear upper transport type, we can also accommodate upper transport type and rear transport type according to customer needs. ■ You can choose from carrierless transport, carrier transport, carrier hanger transport, etc., according to your budget. ■ Additional handover mechanisms with front and rear devices and external communication functions are possible. ■ Automatic doors, automatic lids, automatic chemical supply, weighing, and recovery devices can be equipped. ■ It is possible to equip a concentration management mechanism for etching solutions. Please consult us regarding the target chemicals (e.g., TMAH, KOH, HF, HCL, etc.). ■ Temperature distribution measurement in the etching processing tank can be performed as a pre-shipment inspection. ■ In addition to the up-and-down oscillation mechanism, a wafer rotation mechanism can also be added. * Testing can be conducted at our Tokyo Test Center (Sumida Ward). (Online support available) * For more details, please download the catalog or feel free to contact us.

  • Etching Equipment

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Lift-off device *Models available for testing

We customize the equipment by selecting each process and specification from the lineup of single-sided and batch types.

Dalton's lift-off devices come in six models and offer six types of options, allowing you to select the appropriate one based on your application and the characteristics of the wafer. 【Models】 - HU Type (for mass production)… A combination of batch and single wafer specifications. Faster and more reliable finishing. - HM Type (for research and development/mass production)… Suitable for wafers that can be stripped using only jet processing. - CHU Type (for research and development)… Inherits the features of the HU type while achieving compactness. - MJ Type (for research and development)… Contains only a jet chamber, with manual operation for wafer loading and unloading. - SL Type (for mass production)… A shower drain type lift-off device that performs lift-off processing using only a dip tank. - ML Type (for research and development/mass production)… A device that removes the loader, conveyor, and unloader from the SL type. You can add five types of options to the above six models. For details on the options, please scroll down and take a look. Testing can be conducted at our Tokyo Test Center. *For more information, please download the catalog or feel free to contact us.

  • Resist Device

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[Free Gift of Comprehensive Catalog] Comprehensive Catalog of Powder Processing Machinery

We will contribute to the creation of new value for our customers by integrating powder and liquid technologies.

We offer support from consultations on powder processing processes to the establishment of systems for mass production. We respond to the challenges faced by our customers with our unique know-how. = Areas of Expertise = ■ Powder Processing Technology ■ Liquid Treatment Technology ■ Process Development ■ Contract Processing ■ Containment Technology 【 Prototyping and Experimental Verification / Plant Design Proposals / Process Design Combining Powder Processing and Liquid Treatment / Maintenance 】 Powder technology that processes raw materials to meet various needs. Dalton's powder systems have been implemented in various industries, including major pharmaceutical companies and automobile manufacturers. With Dalton's strong focus on research-related support, we propose advanced quality and packaging that meet the needs of the next generation. The 《 Dalton Powder Processing Machinery Comprehensive Catalog 》 has been updated. You can view all products in the powder processing machinery field in one book. Please fill out the inquiry form. We will send you the catalog by mail.

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Midget Dryer (batch fluid bed dryer)

Excellent in maintainability and operability, and evenly dries raw materials.

This machine has an inner filter and can be fully sealed. It is a batch fluid bed drying machine that evenly dries raw materials. It has excellent operability with an easy-to-move wagon and easy-to-remove filter. *For more details, please refer to the catalog or feel free to contact us.*

  • Drying Equipment

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Continuous Fluid Bed Dryer

Prevents sintering and blow-by at the early stage of drying. Initial fluidization is made easy.

In order to process materials (cohesion, adhesion) that have high water content, which is said to be difficult to dry with a fluid bed drying system, the drying chambers has a simple, horizontal single-partition system. By supplying the appropriate heated air to each drying chamber through branch pipes, full fluids can be evenly dried. Therefore, this machine can efficiently dry even materials with high water content in a short period of time.

  • Drying Equipment

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Basket Extruders BR-200, 450 and 600

This is a conventional basket type wet extruder, which is capable to process variety of applications from the pilot scale to the production level.

●Uniform extrusion, no overflow across entire screen area,which lead to high product yield. ●Not only for extrusion, but also some kneading effect generated at the chamber, so relatively less mixing and kneading time required on the upstream process. ●Easy Scale-up and process repeatability can be made among the different scale of the machines of the 200,450, and 600. ●Choice of extrusion blades available to suit process. ●Variable shaft speed either variable frequency drive or mechanical speed drive available to meet product properties. ●Rotating product discharge table. ●Easy disassembly for cleaning at extrusion zone : The screen and its holder consist of a two-section system. All other contact parts to the products can be easily disassembled, cleaned and re-assembled. ●General range of extrudate diameters : 0.5 to 3.0 mm in diameter and cylindrical shape. *For more details, please refer to the catalog or feel free to contact us.

  • Granulating Equipment

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Basket Extruders BR-300G

This is a basket type wet extruder, corresponding to concept to GMP design.

●Easy disassembly for cleaning at extrusion zone : Almost of the component parts can be easily disassembled and re-assembled without tools. ●Air purging shaft seal available at the time of cleaning ●Uniform extrusion, no overflow across entire screen area, which lead to high product yield. ●Not only for extrusion, but also some kneading effect generated at the chamber, so relatively less mixing and kneading time required on the upstream process. ●Variable shaft speed via variable frequency drive. ●Rotating product discharge table, and adjustment location of discharge chute can be made. ●General range of extrudate diameters : 0.5 to 3.0 mm in diameter and cylindrical shape. *For more details, please refer to the catalog or feel free to contact us.*

  • Granulating Equipment

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Twin Dome Granulator

By using the unique dome shaped screen (Dome Die), the fine granules with a diameter of 0.3 mm can be produced.

●Applicable to the fine-granule with a pilot scale production and the low-volume high-mix production. ●GMP design ●Dome Die and Screw Case are easily disassembled so that the powder-contacting parts can be cleaned by a water. *For more details, please refer to the catalog or feel free to contact us.*

  • Granulating Equipment

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25NAM/25XAM/25AM Planetary Mixer

This series of machines features high-performance mixers equipped with a non-step speed changer that is ideal for production testing.

These mixing machines are equipped with a non-step speed changer ideal for production testing. As the changer can adjust the rotation speed from low to high in a non-stepwise manner, the optimal rotation speed can be achieved to prevent excessive agitation or insufficient rotation even under temperature or humidity differences as per the summer and winter periods. *For more details, please refer to the catalog or feel free to contact us.

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5NDM/5XDM/5DM Planetary Mixer

Compact type for laboratory purpose

Speed change can be controlled during the operation by changing the clutch of 2-step speed reducer and 4-step belt-changeover system. There is a wide range of equipment suitable laboratory purposes from basic type to the contamination prevention type as well as vacuum type. *For more details, please refer to the catalog or feel free to contact us.

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XDM/XDMV Planetary Mixer

Capable to select proper rotation speed based on the materials via non-step speed change system

Proper rotation speed can be selected depending on the material through non-step speed change system. This equipment is applicable to various requirements such as powder mixing, mixing by adding the liquid, kneading for high viscous material, etc. Vacuum type is also available for the application of forming, drying and reacting purpose as well as mixing. *For more details, please refer to the catalog or feel free to contact us.*

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Vibrating Sieve (high-power type)

This machine offers three to six times higher performance for foreign matter removal than our existing machines.

●Analyses of the relationship between sieving conditions and processing performance have allowed for a sieving motion optimal for foreign matter removal. The results have seen significant increases in output and processing performance̶the former and the latter have increased 1.2 times and three to six times, respectively, e.g., for the output of the 1001 model, standard type: 1.5 kW; high-power type: 1.8 kW. ●The increased sieving acceleration allows for higher processing performance. ●The frame is compatible with the inner ring type and the cartridge type. The former has high cost performance, and the latter facilitates mesh replacement and cleaning work. ●Simply replacing our sieve that you are already using with the high-power type improves performance. (For dimensions, please contact us.) *For more details, please refer to the catalog or feel free to contact us.

  • Sieve/Shaker

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Vibrating Sieve (inner ring type)

This is Dalton’ s standard vibrating sieve with high durability.

●The machine is space-saving, thus it can be used anywhere. ●The installation of casters (optional) makes it easy to move the machine. ●The machine can perform the one-stage two-classification removal of fine powder or the removal of coarse powder. ●Products are available with granularities ranging from two-stage three-classification to three-stage four-classification. ●You can easily replace the mesh. For more details, please contact us.

  • Sieve/Shaker

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Vibrating Sieve (cartridge type)

The use of a cartridge mesh facilitates sieving mesh replacement! This is a vibrating sieve that is superior in foreign matter removal and precision classification.

The center frame consists of a cartridge mesh and packing, and is designed to be lightweight compared with a conventional center frame. This machine does not use bolts and nuts for the sieving surface, unlike an inner ring-type machine, thus it rarely causes contamination, including dropped mesh wire. ●The machine is space-saving, thus it can be used anywhere. ●The installation of casters (optional) makes it easy to move the machine. The machine can perform the one-stage, two-classification removal of fine powder or the removal of coarse powder. Products are separated into those with granularities ranging from two-stage three-classification to three-stage four-classification. The fastening bands for the center frame use a one-side one-touch lever, thus they are easy to attach and remove. It can be used in various locations with space-saving design and is easy to move. Please also check out our videos and website. Additionally, feel free to contact us for more details.

  • Sieve/Shaker

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Comminutor

This machine features knife-shaped hammers that prevent excessive crushing.

The knife-shaped hammers fitted to the pulverizer allow for processes without the generation of fine powder due to excessive crushing.

  • Crusher

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Pulverizer

In this machine, strong grinding is achieved via simple operation.

The Pulverizer is a medium and rough grinding machine with swinging hammers. It has almost the same structural principle as the Atomizer; however, it has less hammers, has larger gaps with the lining, and processes a slightly larger mass at a low speed. It can also be utilized for the medium and rough grinding of feedstuffs, fertilizers, food products, chemical products, and drugs, etc. It is also capable of 3 to 10 mm rough grinding and 20-to 200-mesh medium grinding. *For more details, please refer to the catalog or feel free to contact us.*

  • Crusher

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Sample Mill

This is a compact, impact fine-grinding machine that can be used in applications ranging from research to low-volume production.

The Sample Mill is an impact fine-grinding machine with swinging hammers. Despite the small body, it offers high performance. A broad product lineup is available for testing and analysis at public offices, schools, pharmacies, and laboratories, etc., and also for small-scale production at factories in various industries. You can select the machine type suitable for your application.

  • Crusher

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Atomizer

This is a fine-grinding machine with high-speed swinging hammers that offers quick and efficient grinding.

This fine-grinding machine features an excellent grinding mechanism in which fine grinding is achieved by impact, grinding, and shearing effects between the fast-rotating hammers and the specially shaped lining. A large number of swinging hammers are fitted on the circular plate, and they rotate at a high speed (4,000 to 8,000 min-1) inside the lining (plate subject to impact) with involute grooves. A granularity of around 50 μm is achieved without a classifier, and some kinds of raw materials can be grinded into particles at a size of several micrometers. *For more details, please download the PDF or feel free to contact us.*

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Cantilever Atomizer

This is a cantilever-type fine-grinding machine with easy to disassemble and cleanability.

The Cantilever-type Atomizer performs fine grinding by means of fast-rotating hammers and specially shaped lining. The cleanability of even minute parts is taken into consideration;for example, not only the inside but also the entirety of the machine can be cleaned. The machine has a reduced number of parts, and all the powder-contacting parts can be easily and quickly cleaned. The machine is suitable for work-saving and time-saving in high-mix production. *For more details, please download the PDF or feel free to contact us.

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