It is a device that removes impurities attached to high-purity gas cylinders used in semiconductor manufacturing processes.
We remove impurities adhering to the inner walls of the cylinder through heating and vacuum extraction. The cylinder size and the number of units processed simultaneously can be customized. We can propose automatic or manual machines according to your budget. 【Features】 ■ Uniform heating of the cylinder is possible (Max 200℃). The temperature inside the furnace is approximately ±1%. ■ Simultaneous cooling of the safety valve of the cylinder is possible during heating (to prevent damage to the safety valve due to heat). * For more details, please download the PDF (catalog) or feel free to contact us.
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For more details, please download the PDF (catalog) or feel free to contact us.
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Applications/Examples of results
High purity gas manufacturing process, semiconductor gas manufacturing process, etc.
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Walking hand-in-hand with customers, challenging for creation of new values across a wide range of fields– DALTON’s existence, with the dual business domains of laboratory equipment and industrial machinery, truly shines as we play the role of a partner to customers who have strong passion for creating new values. A long with our unique group firms and suppliers, we have built a long history of trust with our customers who’ve been the main players to create new values insociety. -Creating new values together.- Dalton Group are pooling our knowledge and technology together, merging it with our customers’creative endeavors to create new and innovative values that contribute to an affluent society and abright future.