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アイ・アール・システム

EstablishmentMay 25, 1993
capital1000Ten thousand
number of employees24
addressTokyo/Tama-shi/Atago 4-6-20
phone042-400-0373
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last updated:Jan 06, 2025
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アイ・アール・システム Product Lineup

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High-temperature cavity blackbody furnace

High-temperature cavity blackbody furnace

The cavity blackbody furnace from CI SYSTEMS, which we handle, has been chosen for over 30 years as an infrared reference light source by public research institutes, corporate laboratories, and production lines in both the space defense industry and civilian sectors around the world. It is a reliable product that boasts high precision and high stability in compliance with NIST standards. It features a high-temperature blackbody of 1000°C (with an option for 1200°C), a diameter of 1 inch, and a high emissivity of 0.99 (with an option for 0.999).

  • Testing Equipment and Devices
  • Other inspection equipment and devices

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Real-time emissivity-corrected semiconductor process temperature monitor

Real-time measurement and correction of the emissivity of the target wafer during the semiconductor process enables accurate temperature measurement regardless of the type of wafer film!

Monitoring the wafer temperature during the semiconductor process is a very important process parameter; however, due to the lack of an established appropriate measurement method, we have been inferring the process conditions based on parameters other than temperature. Despite the variation in emissivity within a lot, general radiation thermometers require the user to arbitrarily determine the emissivity of the object being measured, leading to temperature errors and a lack of reliability in the temperature measurement itself. Our real-time emissivity-corrected semiconductor process temperature monitor can measure and correct the emissivity of the target wafer in real time, enabling accurate temperature measurement regardless of the type of wafer film. Additionally, thanks to our unique high-sensitivity infrared measurement technology, measurements can be taken down to low temperatures (close to the sensitivity limit of the detector). We can also provide various solutions for the stray light issues that have been problematic in the chamber.

  • Other semiconductor manufacturing equipment
  • Optical Measuring Instruments
  • Temperature and humidity measuring instruments

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Terahertz Winston cone

●Compatible with far infrared to millimeter waves ●Coating and materials can also be customized!

Winston cones from Infrared Laboratories in the United States are focusing devices that correspond to the far-infrared to millimeter wave (the so-called terahertz range). The company has over 75 types of Winston cones in stock, allowing them to meet various needs. If you are looking for a Winston cone, please do not hesitate to contact us.

  • Other inspection equipment and devices

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Cryo Dewar

Cooling temperature range of 1.6K to 77K, with a wide selection of cooling surfaces from φ3.12" to 14"!

Infrared Laboratories in the United States offers a standard lineup of various types of cryo dewars. Customization is also available, of course.

  • Vacuum Equipment
  • Other physicochemical equipment

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Ultra-compact high-speed imaging interferometer PhaseCam6000

Suitable for measurements in vibrating environments and long optical paths.

The 【PhaseCam6000】 is a super compact high-speed imaging interferometer that demonstrates effectiveness in measuring in vibrating environments and over long optical paths, such as in locations with strong vibrations or moving objects. ◎ Its ultra-compact size allows for integration into polishing machines. ◎ The light source section is separated by fiber, making alignment easy, which was difficult with conventional heavy housings. ◎ Optional cables and fiber extensions are available. ◎ By attaching various diverging lenses and null optics, it is possible to measure various flat, spherical, and aspherical surfaces. ◎ As standard additional options, a 5-axis adjustable mount and an X5 beam expander are also available. For detailed materials, inquiries about products, or requests for quotes, please feel free to contact us using the form below or through our company website.

  • Optical microscope
  • Microscope

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MRI navigation tracking system

Even in the strong magnetic field of an MRI, the position of the equipment can be monitored in real-time with high precision.

The MRI navigation tracking system EndoScout can monitor the position of equipment in real-time with high precision, even within the strong magnetic field of a magnetic resonance imaging device.

  • Other measurement, recording and measuring instruments

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