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The "Vacuum Pump Unit P94" is a unit used as a vacuum source to hold the workpiece while cutting it with a chemical solution. It is used as a vacuum generation device for the wafer vacuum chuck of a dicing machine and consists of a water-sealed pump, control valve, flow meter, vacuum pressure gauge, and other components. 【Features】 ■ A water-sealed vacuum pump unit for vacuum chucks in wet processing equipment ■ Suitable for suction of gases containing water droplets and water vapor *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.