フェローテックホールディングス List of Products and Services

【Product Description】 A vacuum rotary feedthrough that utilizes the property of magnetic fluid responding to a magnetic field. It has a longer lifespan and does not generate contamination compared to contact-type devices. ◆Contents◆ ~A wide range of high-quality seals compatible with all vacuum processing equipment~ - Miniature ferro seal - Snow hole ferro seal - Flanged ferro seal - Heavy-duty ferro seal - Multifunctional ferro seal - Robot seal and more ◆For those who wish to receive a catalog, please inquire through the request form◆ ~Some of the lineup can be viewed from the download section~

• others

Manufacturing uniform diameter silicon ingots A silicon single crystal pulling device capable of stable operation for long periods 【Features】 ○ After melting silicon raw materials in a quartz crucible within a vacuum furnace (high temperature, low pressure), a seed crystal that serves as the nucleus for the single crystal is immersed in the silicon melt, and by rotating the seed crystal while pulling it up, single crystal ingots are produced. ○ The pull head that raises the seed crystal ensures vertical crystal pulling. Uniform diameter silicon ingots can be manufactured. ○ Stable operation for long periods. ○ The pulling process is managed by a touch-type handheld controller with an operation panel for process management, allowing the operator to operate the device as needed based on the situation. ○ Consideration for operator usability, featuring excellent visibility and an intuitive GUI for easy operation.

• Other processing machines

Utilizing advanced material technology and production techniques, we achieve consistent production under strict quality control. FerroTec's fine ceramics support product creation across a wide range of fields. 【Features】 - High purity, high rigidity, high precision - Wear resistance, heat resistance, chemical resistance - Electrical insulation - By introducing state-of-the-art equipment, we produce high-quality products in line with delivery schedules - We accommodate the production of products tailored to customer needs For other functions and details, please download the catalog.

• Ceramics

This is the comprehensive catalog of the Peltier device "Thermo Module" handled by Ferrotec. We conduct integrated production from materials to assembly, while also ensuring strict quality control and competitive pricing, allowing us to consistently provide products that satisfy our customers. ◆ Contents ◆ 　　~ Introducing various products according to applications ~ 　　　・Miniature Thermo Modules 　　　・Micro Thermo Modules 　　　・AuSn Thermo Modules 　　　・Single Stage Thermo Modules 　　　・Thermal Cycle Thermo Modules 　　　・Center-Hole Thermo Modules 　　　・Multi-Hole Thermo Modules, etc. ◆ If you would like a catalog, please contact us via the document request ◆ 　 　~ You can view the lineup from the download ~

• Other semiconductors
• Peltier element

Direct drive product incorporating a DC servo motor with a magnetic fluid seal 【Features】 ○ By integrating the motor into the magnetic fluid seal, there is no need to prepare components such as drive motors, pulleys, timing belts, or motor drivers for introducing rotation into vacuum chambers, significantly reducing the effort required for installation and adjustment. ○ Issues related to rotational accuracy and losses caused by pulley drive are resolved all at once. ○ Significant miniaturization and weight reduction of the drive unit is possible. ○ By using a built-in driver, the motor can be driven with only two cables. ○ Good maintainability (the magnetic fluid seal and motor sections can be separated). ○ Torque and rotational speed can be prepared according to customer usage conditions. ○ Integrated motor and reducer can also be manufactured (integration of bearings). ○ Installation of encoders is possible (positioning control is available). ○ Air cooling/water cooling and introduction of process gases are also possible. ○ Can be connected to currently used drivers (3-phase DC brushless motor). ● For other functions and details, please contact us.

• Generators and transmission motors

Optimal for shortening lead times from semiconductor and liquid crystal manufacturing and design to prototyping. Achieves excellent machinability, enabling various precision machining with short delivery times. The Hotover series of machinable ceramics (machinable ceramics). 【Features】 ○ Precision machinability ○ Thermal insulation and heat resistance ○ Short delivery response ○ Four types of products available according to application - Hotover A dense and high-quality composite mica ceramic created by the melting method, with a glassy matrix and uniformly precipitated fluorine mica and zirconia microcrystals. - Hotover L Has machinability equivalent to Hotover, with low thermal expansion and high reflectivity. - Hotover II Exhibits low thermal expansion and excellent mechanical strength. - Hotover II-S Thermal expansion similar to silicon. ● For other functions and details, please download the catalog.

• Ceramics