入江工研 List of Products and Services

At Irie Koken, we handle "Specially Shaped Bellows." We offer a lineup that includes the "Rectangular Bellows Series," which is based on square and rectangular openings, the "Elliptical Bellows Series," which is based on rounded rectangular openings, and the "Custom Shaped Bellows Series," which is manufactured according to customer specifications. We propose products that meet various needs. 【Features】 ■ Rectangular Bellows Series - Designed to absorb installation errors at the connection points between chambers and between chambers and gate valves. - Available in two types: folded bellows and welded bellows. ■ Elliptical Bellows Series - Products that improve displacement performance by rounding the corners, which are difficult to achieve with rectangular bellows. - Available in two types: molded bellows and welded bellows. ■ Custom Shaped Bellows Series - Products manufactured in appropriate opening shapes to fit available space when round, rectangular, or elliptical bellows cannot be accommodated due to equipment or piping design constraints. *For more details, please refer to the PDF document or feel free to contact us.

• Pipe Fittings

The "LFB/SFB" is a high-performance molded bellows handled by Irie Koken. The "LFB" is a royal molded bellows that achieves a high lifespan comparable to welded bellows (1 million cycles). It has excellent corrosion resistance and prevents stress corrosion cracking even against Cl2 and HBr gases. It outperforms SUS316L in terms of room temperature tensile strength and 0.2% yield strength at 650°. Additionally, the "SFB" is a super molded bellows that can be designed to be more than 50% more compact than conventional molded bellows. 【Features】 ■ Achieves a high lifespan comparable to welded bellows (1 million cycles) ■ Spring constant is less than 1/2 of conventional molded bellows ■ Can be designed to be more than 50% more compact than conventional molded bellows *For more details, please refer to the PDF materials or feel free to contact us.

• Pipe Fittings

Production of the "NW-KF pipe fittings" has now ended. Thank you very much for your support. As a very convenient ISO standard for NW-KF flange pipe fittings, we have standardized the "VP series" for vacuum piping and the "HP series" for high-pressure piping. In addition, we also handle "vacuum pipe parts" such as welding flanges and block flanges. 【Features】 ■ No bolts or nuts required ■ The tapered part of the flange fits into the tapered inner part of the coupling, allowing for easy attachment and detachment by simply turning the butterfly screw ■ Heating temperature can reach up to 150°C ■ He leak rate is below 1×10^-9 Pa·m³/s *For more details, please refer to the PDF document or feel free to contact us.

• Pipe Fittings

The "High Vacuum Angle Valve Series" is a long-lasting vacuum valve that incorporates a bellows with a wealth of proven performance in molding and welding. It comes in three types of connection formats: with ISO standard NW-KF flanges for very convenient handling, with Conflat flanges suitable for ultra-high vacuum and toxic gas applications, and with standard JIS vacuum flanges, available in both manual and automatic (pneumatic) versions. Additionally, to extend the maintenance period of the valves, we have newly prepared the LX series as a standard product. 【Features】 ■ The vacuum side of the valve material is entirely made of stainless steel (SUS). ■ The overall compact design results in a smaller and lighter product. ■ It does not leak under a differential pressure of 0.15 MPa, whether under positive or negative pressure. ■ Installation orientation is flexible. ■ Functional design allows for high conductance. *For more details, please refer to the PDF document or feel free to contact us.

• valve

"Formed bellows" have a longer historical background compared to welded bellows, and various manufacturing methods have been devised. However, the methods that are generally widely adopted are the mechanically formed roll forming method and the hydraulic bulging method. Our company manufactures using a unique hydraulic forming method. This allows for the prevention of stress variation and ensures uniform quality in mass production. [Features] - Higher precision compared to the roll forming method - Prevention of stress variation - Uniform quality in mass production - Cost-effective *For more details, please refer to the PDF document or feel free to contact us.

• Pipe Fittings

The "welded bellows" are metal bellows made by connecting thin metal plates on a precision disc by alternately welding the inner and outer diameters. We offer a lineup of "NS, NA standard welded bellows," which are compact and provide a large amount of expansion, and "compact welded bellows," which have increased stroke per wave by over 30% compared to conventional models, achieving cost-effectiveness. 【Features】 <NS, NA standard welded bellows> ■ Compact with a large amount of expansion ■ Low spring reaction force ■ Long lifespan possible ■ Freedom in design with selectable end fittings ■ Y-type end fittings can be welded by the customer ■ No restrictions on installation direction *For more details, please refer to the PDF document or feel free to contact us.

• Pipe Fittings

Both ends of the flexible tube use JIS B2290 (vacuum flange) VG (fixed) and VF (rotating). Length: 500, 1000, 1500, 2000 mm Tube: Stainless steel Flange: Stainless steel

• Piping Materials
• tube

The "Compact Rotary Feedthrough (IRC)" is a unit that incorporates a high-performance welded bellows, designed to isolate high vacuum and transmit rotational motion. Since it uses metal welded bellows for vacuum and atmospheric isolation, it can be used in ultra-high vacuum areas. In addition to this compact rotary feedthrough, which has a rotational positioning accuracy (without load) of 2° ± 0.5°, we also offer a high-precision rotary feedthrough with an accuracy of 0.5°. 【Features】 ■ Incorporates Irie Koken's welded bellows and standardizes connection flanges CF34 and CF70 ■ By using welded bellows for the drive unit seal, it can be used in high vacuum areas ■ Extremely simple design focused on functionality, making it compact and lightweight ■ Equipped with a rotation locking mechanism ■ Aperture can be set arbitrarily *For more details, please refer to the catalog or feel free to contact us.

• Other Machine Parts
• Vacuum Equipment

The "Bellows Type Compact Linear Actuator (ILC)" is a type of actuator that drives in a linear direction and incorporates a high-performance welded bellows, enabling long strokes. It can be used for applications such as raising and lowering stages for circuit boards and transporting wafers. Additionally, in addition to the very compact ILC, we also offer standard sizes, allowing you to choose according to your needs. 【Features】 ■ Incorporates Irie Koken's welded bellows, standardized for strokes of 10mm, 15mm, and 20mm ■ Much more compact design compared to our bellows type linear actuator (ILD series) *For more details, please refer to the catalog or feel free to contact us.

• Other Machine Parts
• Vacuum Equipment

The "Bellows Type Linear Introducer" is a type of introducer that drives in a linear direction, equipped with a high-performance welded bellows, enabling long strokes. It is used for applications such as raising and lowering substrates and transporting wafers. We also offer automatic versions, so please use them according to your needs. 【Features】 - Equipped with a welded bellows manufactured by Irie Koken, with standardized strokes from 30 to 200 mm. - The use of welded bellows in the drive unit seal allows for operation in ultra-high vacuum environments. - Designed to be extremely simple with a focus on functionality, making it compact and lightweight. - Designed to withstand baking temperatures of up to 250°C. *For more details, please refer to the catalog or feel free to contact us.

• Other Machine Parts
• Vacuum Equipment

The comprehensive catalog for straight introduction machines, rotary introduction machines, and multi-introduction machines is published by Irie Koken Co., Ltd., which designs, manufactures, and sells various metal machinery products and vacuum equipment. The catalog features a wide range of products tailored to different applications, including the automatic bellows-type straight introduction machine "ILD-A," the compact rotary introduction machine "IRC," and the magnetic coupling straight rotary introduction machine "MFL." [Contents] - Overview - Product Introduction - Case Studies - Product Lineup For more details, please contact us or download the catalog.

• others

Our company manufactures chambers that can create special environments ranging from ultra-high vacuum to atmospheric pressure, plasma environments, and rarefied active gas environments.

• CVD Equipment
• Sputtering Equipment
• Other semiconductor manufacturing equipment

Please use it for deposition protection and light/beam blocking for the viewing port. It is a shutter designed for vacuum equipment, available in two types: manual and automatic (air-driven).

• CVD Equipment
• Sputtering Equipment
• Other semiconductor manufacturing equipment

Please use this for adjusting the shaft offset and angle when installing the magnetic coupling linear rotary introducer (MFL). It is optimal for error adjustment when attaching equipment to the vacuum chamber.

• Sputtering Equipment
• Other semiconductor manufacturing equipment

It is an introduction device that transmits linear motion to samples and equipment in a vacuum from the atmospheric side.

• Sputtering Equipment
• CVD Equipment
• Other semiconductor manufacturing equipment

In response to the increasing size of glass substrates in FPD manufacturing equipment, IKC has developed a large gate valve through the technology cultivated in semiconductor manufacturing equipment and vacuum devices, along with its unique technology development. We have created a series of valves that correspond to various substrate sizes for FPD manufacturing equipment, which we would like to introduce. 【Product Lineup】 ■ KOSLARZE-II: Composed of a lifting cylinder and a cam ■ NEW KOSLARZE: Composed of a lifting cylinder and a sealing cylinder ■ LINK: Composed of a lifting cylinder and a link mechanism incorporated into the valve plate ■ SWELL GARIVA: Composed of a lifting cylinder and a sealing cylinder mounted inside the valve plate *For more details, please refer to the PDF materials or feel free to contact us.

• Vacuum Equipment
• valve

The IKC high vacuum angle valve is a long-lasting vacuum valve that incorporates a bellows with a rich track record in molding and welding.

• Vacuum Equipment

This specification applies only to the bellows section without fittings. We will manufacture bellows that are longer-lasting and cleaner, and deliver them with a quick response and quick delivery system.

• Vacuum Equipment

The IKC high vacuum angle valve is a long-lasting vacuum valve that incorporates a bellows with a proven track record in molding and welding. It is equipped with a CF (Conflat) flange, making it suitable for ultra-high vacuum applications and toxic gas systems.

• Vacuum Equipment

This is an introduction mechanism using a magnetic coupling method with a powerful permanent magnet. We offer two types: rotational introduction and linear rotational introduction, and it is also compatible with motor drive.

• Vacuum Equipment

CF flange connection and end pipe connection molded bellows Bellows: SUS316L Flange: SUS304L

• Vacuum Equipment

Length: 500, 1000, 1500, 2000mm Tube: SUS316L Flange: SUS304L

• Vacuum Equipment
• tube

The IKC linear (straight) introducer is a linear (straight) introducer that incorporates a highly reliable welded bellows, enabling a long stroke. Additionally, we offer both manual and automatic types for each size.

• Vacuum Equipment

This is a vacuum piping clamp part necessary for connecting NW flanges. It is compatible with sizes ranging from NW10 to NW100.

• Vice Clamps

JIS vacuum flange with bellows Bellows: SUS316L Flange: SUS304

• Vacuum Equipment

This is a welded bellows with a conflat flange. We manufacture bellows that are longer-lasting and cleaner, and we will deliver them with a quick response and quick delivery system.

• Vacuum Equipment

The IKC high vacuum angle valve is a long-lasting vacuum valve that incorporates a bellows with a rich track record of forming and welding. ◆ The vacuum side of the valve material is entirely made of stainless steel (SUS). ◆ Compact design achieves miniaturization and lightweight. ◆ It does not leak even under a differential pressure of 0.15 MPa, whether under positive or negative pressure. ◆ Installation orientation is flexible. (Unless otherwise specified, we recommend an installation orientation where the valve seat faces the side with greater pressure fluctuations.) *For more details, please contact us.

• Other environmental equipment
• valve
• Vacuum Equipment

This is a valve compatible with the 10th generation. It has stable performance and has earned the trust of our customers.

• Vacuum Equipment

We will manufacture bellows that are longer-lasting and cleaner, and deliver them with a quick response and quick delivery system.

• Vacuum Equipment

Both ends with NW flange Length: 500, 1000, 1500, 2000 mm Tube: SUS304 or SUS316L Flange: SUS304 or SUS316

• Piping Materials
• tube

"Compact Coslars II" is a high-quality rectangular gate valve that can also be used in the manufacturing equipment for next-generation LSI and LCD. Thanks to IKC's unique technology, it maintains a highly clean state within the equipment without sliding, has a long seal retention time, and exhibits stable sealing performance against back pressure seals. Additionally, it is designed with easy maintenance in mind, reflecting customer requests. 【Features】 ■ Particle-free ■ High level of sealing performance ■ Easy maintenance ■ Long lifespan and high-level quality *For more details, please refer to the related link page or feel free to contact us.

• Vacuum Equipment
• valve

This bellows-type rotary feedthrough comes in two types: a high-precision rotary feedthrough and a compact rotary feedthrough. It is a unit designed to transmit rotary motion from the atmospheric side to the vacuum side. A metal welded bellows is used to isolate the vacuum from the atmosphere, allowing it to be used in ultra-high vacuum environments. We offer two types: a compact rotary feedthrough with a positioning accuracy of 2° ± 0.5° (under no load) and a high-precision rotary feedthrough with an accuracy of 0.5°.

• Vacuum Equipment

End pipe bellows Bellows: SUS316L Flange: SUS316

• Vacuum Equipment

Formed bellows with conflat flange Bellows: SUS316L Flange: SUS304L Fixed through hole type or rotating through hole type

• Vacuum Equipment

ISO KF flange with molded bellows Bellows: SUS316L Flange: SUS316

• Vacuum Equipment

Both ends with pipe fittings Length: 250, 500, 800, 1000mm Tube: SUS304 Flange: SUS316

• Vacuum Equipment
• tube

KF flange + end pipe with formed bellows Bellows: SUS316L Flange: SUS316

• Vacuum Equipment