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  1. Home
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  3. Hayashi Pure Chemical Ind., Ltd. Electronic Materials
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Chemical
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Hayashi Pure Chemical Ind., Ltd. Electronic Materials

capital10000Ten thousand
number of employees259
addressOsaka/Chuo-ku, Osaka-shi/3-2-12 Nairincho
phone06-6910-7336
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last updated:Jan 17, 2024
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Hayashi Pure Chemical Ind., Ltd. List of Products and Services

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Etching solutions for various metals Etching solutions for various metals
Developer / Stripping solution Developer / Stripping solution
Texture etching solution Texture etching solution
Roughening etching solution Roughening etching solution
Contract processing Contract processing
Low metal (UHP) grade chemicals Low metal (UHP) grade chemicals
Etching

Etching solutions for various metals

This is an introduction to the products of various metal film etching solutions.

Al taper control etching solution

Etch the Al or Al alloy film at the desired taper angle.

The features of this product are as follows: - It forms the desired taper shape (taper angle). - It etches Al and Al alloy films effectively. - The etching speed and the in-plane uniformity of the etching shape are good. Keywords: wet etching, aluminum

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Ag・Ag alloy・Ag-based laminated film etching solution

This etching solution is ideal for etching single-layer films of silver alloys such as Ag single films, APC (Ag-Pd-Cu alloy) films, or laminated films of Ag/transparent conductive films.

The features of this product are as follows: - The etching rate is stable. - There is minimal side etching, allowing for the formation of fine patterns. - The in-plane uniformity of etching speed and etching shape is excellent. Keywords: wet etching, silver, APC

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Cu etching solution "Pure Etch C series"

We etch Cu and Cu alloy films effectively. We offer solutions for standard thin film etching and bulk etching of Cu/Ti stacked films.

The features of this product are as follows: - It forms a good positive taper. - There is minimal side etching, allowing for the formation of fine patterns. - The etching speed and in-plane uniformity of the etching shape are excellent. Keywords: wet etching, copper

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Ti etching solution standard, Ti seed layer etching solution

We will etch the Ti film effectively. We have options for standard thin film etching and Ti seed layer etching.

The features of this product are as follows: - It has minimal side etching, allowing for the formation of fine patterns. - The etching speed and in-plane uniformity of the etching shape are excellent. - It is suitable for laminated films such as Cu/Ti and W/Ti. Keywords: wet etching, titanium

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W Etching Solution 'Pure Etch W Series'

We will etch the W film well.

The features of this product are as follows: - It forms a good positive taper. - There is minimal side etching, allowing for the formation of fine patterns. - The etching speed and in-plane uniformity of the etching shape are good. - There are no residues after etching. Keywords: Wet etching, tungsten

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Cr Etching Solution "Pure Etch CR series"

We will etch the Cr film well. If you are considering the formation of fine patterns, we also offer suggestions for pretreatment solutions to improve wettability.

The features of this product are as follows: - It has minimal side etching, allowing for the formation of fine patterns. - The etching speed and in-plane uniformity of the etching shape are excellent. - It is suitable for etching of black matrix (BM) and photo masks made of chromium. Keywords: wet etching, chromium

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ITO etching solution "Clean Etch ITO series"

We provide excellent etching for ITO films, with options available for both a-ITO etching and p-ITO etching.

The features of this product are as follows: - There are no residues after etching. - It has low foaming properties and excellent defoaming capabilities. - The etching speed and the in-plane uniformity of the etching shape are good. Keywords: wet etching, indium tin oxide

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Au Etching Solution "Pure Etch AU series"

We will etch the Au film well. There are also etching solutions for seed layers that cause little damage to the Au plating and allow for etching of the Au seed layer.

The features of this product are as follows: - It allows for processing at low temperatures and in a short time. - The etching speed and in-plane uniformity of the etching shape are excellent. - It is suitable for fine bump formation and pattern formation processes. Keywords: wet etching, gold, plating, seed layer, selective etching solution.

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Standard sample for Al・Mo・Mo/Al/Mo multilayer film

It etches single films of Al, Al alloys, or Mo, Mo alloys, as well as layered films such as Mo/Al/Mo and Mo alloy/Al alloy/Mo alloy effectively.

The features of this product are as follows: - It forms a good positive taper. - It has minimal side etching, allowing for the formation of fine patterns. - The etching speed and in-plane uniformity of the etching shape are excellent. Keywords: wet etching, aluminum, molybdenum, AlCu, MAM, multilayer film

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Ag nanowire etching solution

We provide excellent etching of Ag nanowire films, available for both full etching and partial etching.

The features of this product are as follows: - It allows for processing at low temperatures and in a short time. - By adjusting the composition and processing conditions, full etching is also possible. Keywords: wet etching, silver nanowires, AgNW, SNW

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Crystal etching liquid "Pure Etch ZE series"

We etch the quartz with a flatter bottom shape than conventional products without corroding the mask made of resist or metal films (such as Au and Cr).

The features of this product are as follows: - The angle difference of the taper angle in the cross-sectional shape can be reduced compared to conventional products. - The etched bottom surface can be etched more flatly than conventional products. - The uniformity of thickness is excellent. Keywords: wet etching, quartz

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Al Damage-Free Si Etching Solution (Anisotropic)

Al and Al alloy films are anisotropically etched well without corrosion.

The features of this product are as follows: - It enables the formation of a smooth etching surface. - Etching can be performed regardless of the metal opening ratio on the device surface. - There is minimal degradation of the etching solution. - It is recommended to use Pure Etch ZE series (Al damage-free insulating film etching solution) as a pretreatment solution. Keywords: wet etching, silicon anisotropic etching

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Si etching solution (isotropic)

We perform good isotropic etching of the Si film. In addition to standard isotropic etching solutions, we also have thinning etching solutions that are optimal for thinning Si substrates.

The features of this product are as follows: - Processing at low temperatures and in a short time is possible. - The surface after etching is mirror-like. Keywords: wet etching, silicon isotropic etching, silicon substrate thinning

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