大阪真空機器製作所 List of Products and Services

Osaka Vacuum's efforts in the field of clean high vacuum are expanding alongside the development of research in physical sciences, as well as in the semiconductor and liquid crystal sectors. We strive to provide systems with high operability and productivity, ensuring that all equipment reflects the needs of our users. 【Vacuum Equipment Offered】 ○ Sputtering Equipment ○ Deposition Equipment ○ Vacuum Exhaust Equipment ○ Thin Film Equipment ○ FPD Manufacturing ○ Vacuum Environmental Testing Equipment ● For more details on various vacuum equipment, please contact us.

We would like to introduce a case where we delivered a magnetron sputtering device to the Osaka Institute of Industrial Technology, a local independent administrative institution. The device delivered this time is our "MS-3C100L model," which consists of a sputtering chamber, a load lock chamber (LL chamber), a vacuum exhaust system, a gas introduction system, a power supply system, a substrate temperature control system, and an operation and control system composed of a PC and control device. The sputtering chamber is equipped with three cathodes for attaching targets, and it is possible to apply RF or DC voltage to each cathode, or to superimpose the voltages. [Case Overview] ■ Delivery Destination: Osaka Institute of Industrial Technology, a local independent administrative institution ■ Delivered Product: MS-3C100L model *For more details, please refer to the PDF document or feel free to contact us.

This catalog features a wide range of vacuum products, from low vacuum to ultra-high vacuum. We introduce many products categorized by application, including the belt-driven oil rotary vacuum pump "P Series," the magnetic bearing compound molecular pump "TG-M Series," and the compact dry vacuum pump "DSP Series." Please make use of this for selecting products. 【Featured Products (Excerpt)】 ■ Turbo molecular pumps ■ Turbo molecular pump vacuum systems ■ Oil diffusion vacuum pumps ■ Mechanical booster pumps (Roots vacuum pumps) ■ Mechanical booster exhaust systems *For more details, please refer to the PDF materials or feel free to contact us.

We would like to introduce a case where a "high vacuum exhaust system for X-ray measurement experiment vacuum containers" was delivered to the Kansai Quantum Science Research Institute (Kizugawa). This exhaust unit consists of a 300 L/s class magnetic bearing turbo molecular pump TG390M, which can be directly attached to the vacuum container, a combined vacuum gauge featuring a Pirani type and a cold cathode ionization vacuum gauge, along with a cart that holds the controllers and auxiliary pumps. The turbo molecular pump attached to the vacuum container is of the magnetic bearing type, allowing for maintenance-free, oil-free operation with extremely low vibration exhaust. Additionally, the inlet flange uses a Conflat type with a copper gasket, which reduces the permeation of light gases from the gasket and the release of exhaust gases, while also enabling high-temperature baking. 【Case Overview】 ■ Delivery Destination: National Research and Development Agency, Quantum Science and Technology Research Development Organization, Kansai Quantum Science Research Institute (Kizugawa) ■ Delivered Product: High vacuum exhaust system for X-ray measurement experiment vacuum containers *For more details, please refer to the PDF document or feel free to contact us.