大阪真空機器製作所 List of Products and Services

【Features】 ○ Pumps with exhaust speeds of 10,000 L/s (without baffles) or more are also available in the lineup. ○ Highly reliable ultra-high vacuum pumps with minimal pressure fluctuations due to the boiling of the operating fluid. ○ No mechanical moving parts, making them robust and long-lasting. ○ Simple structure allows for easy internal cleaning, maintenance, and inspection. ● For additional functions and features, please refer to the catalog or contact us.

It is possible to obtain the reaching pressure near the vapor pressure of the sealing liquid, and it is often referred to as a water-sealed vacuum pump when water is used as the sealing liquid. 【Features】 ○ Various sealing liquids, including water, can be selected, allowing for the choice of the optimal sealing liquid according to the application, thus accommodating the exhaust of gases containing water vapor and organic solvents (condensable gases). ○ By circulating the sealing liquid in a closed (closed-cycle) system, it is also possible to minimize the generation of waste liquid. ○ By combining with other pumps, it can accommodate various processes. - By combining with a Roots pump, it achieves high exhaust and high vacuum with less energy (PRL series). - By combining with an Atmosstar (air ejector), it can favorably improve the reaching pressure and prevent cavitation (single-stage Atmosstar: WA series, two-stage Atmosstar: WB series). ● For more details, please contact us.

【Features】 ○ Adopts a swinging piston design, which offers excellent durability and allows for a large intake space structurally, enabling efficient exhaust, making it ideal for large pumps. ○ Equipped with a mechanism that ensures proper oil supply even under harsh operating conditions, such as continuous operation in low vacuum areas or rapid cycling between atmospheric pressure and vacuum, allowing for long-term, reliable use. ○ Precision and robust design, with a structure that is easy to maintain. * With appropriate maintenance, there are examples of use for long periods, such as 20 or 30 years. ● For more details, please contact us.

The energy-saving dry vacuum pump ER100D/ER100DC has achieved top-class energy efficiency, compactness, and lightweight design among dry vacuum pumps in the same class. It is energy-efficient, with a power consumption of 400W at the target pressure. It is compact and lightweight, with a footprint of 0.11m² (230×450mm) and a weight of 60kg. It also reduces cooling water and purge gas usage, resulting in lower utility costs. Compliant with international standards, we offer product specifications tailored to various applications. The ER100D is ideal for exhaust in light-load, clean processes, while the ER100DC uses highly corrosion-resistant materials to handle exhaust of corrosive gases. For more details, please contact us or refer to the catalog.

A vacuum pump that performs compression and exhaust by rotating a crescent-shaped rotor. 【Features】 ○ Installed in front of oil rotary vacuum pumps to increase exhaust speed, also referred to as a mechanical booster due to its mechanical vacuum pump nature. ○ Used in combination with vacuum pumps that can compress to atmospheric pressure, such as dry vacuum pumps, oil rotary vacuum pumps, and liquid-sealed vacuum pumps. ○ Compact design makes it easy to integrate into a system. ○ A belt-driven large Roots vacuum pump (R series) is also available in the lineup, suitable for applications requiring high exhaust, such as large chambers for space testing. ○ Inverter control allows operation from atmospheric pressure and pressure control under low intake pressure conditions. ● For other functions and details, please contact us.

The compact dry vacuum pump is a small, lightweight, and portable type of vacuum pump that is resistant to disturbances. Its compact design makes it convenient for transportation and allows for flexible installation without taking up much space. The bearing life exceeds 20,000 hours, ensuring long-lasting performance. It is widely used in various applications such as SEM, medical devices, analytical instruments, and accelerators. 【Product Features】 ○ Exhaust speeds of 230L/min and 500L/min available ○ Achievable pressure of 0.5Pa ○ Easy to move with a compact design (15-20kg) ○ Completely oil-free with no lubricating oil used ○ Can be used as an auxiliary pump for TMP ● For more features and functions, please refer to the catalog or contact us.

Air-cooled dry vacuum pumps are designed for continuous operation under atmospheric pressure. They can handle water vapor intake and maintain a constant exhaust speed up to the point of reach. They are widely used for applications such as exhaust in load lock chambers and transport chambers, as auxiliary pumps for high vacuum pumps, exhaust for analysis and measurement equipment, and exhaust for accelerators. 【Product Features】 ■ Exhaust speed during open operation: 800 L/min ■ Water vapor handling capacity: 500 g/hr ■ Exhaust speed: 1000 L/min *For more details, please contact us or download the catalog for further information.

【Product Features】 ○ The suction ratio can be extremely high. ○ Suction ratio = Suction steam volume / Drive steam volume ○ Simple structure with almost no failures The structure is exactly the same as that of a steam ejector. Additionally, large suction volumes can be produced at a low cost. ● For other functions and features, please refer to the catalog or contact us.

The multi-jet condenser is a water ejector that also has condensation capabilities. 【Product Features】 ○ It serves both as an exhaust pump and a condenser, making it even more effective than a water ejector for exhausting condensable gases. ○ It has a check valve on the intake side, eliminating the need for an atmospheric leg and preventing backflow during power outages or water supply interruptions. ○ It possesses all the features of a water ejector. ● For other functions and features, please refer to the catalog or contact us.

A water ejector is an ejector that uses water as a driving source to suction and exhaust gas. It can achieve an inlet pressure equivalent to the vapor pressure of the driving water, making it effective for exhausting gases that contain condensable and corrosive gases, as well as dust. It can also be used as the final stage in a multi-stage steam ejector system.

The ejector has a simple structure without mechanical drive components, so there are almost no occurrences of failure.

A steam ejector is an ejector that uses gas as a driving source to suction and exhaust gas. It is characterized by its simple structure, low failure rate, and ease of handling. Additionally, by arranging multiple ejectors in series, it is possible to reach higher vacuum levels.

In addition to being easily usable with standard combinations, we will propose the optimal combinations tailored to your specifications.

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for a long time with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

At Osaka Vacuum Equipment Manufacturing Co., Ltd., we are responsible for the design and manufacturing of not only turbo molecular pumps but also systems for vacuum equipment in general, including control panels and control sequences. Our approximately 65 years of achievements and experience in vacuum equipment have been recognized, and our reliable turbo molecular pump "TG-F series" has been adopted in the vacuum exhaust systems of accelerators used for particle beam therapy. Additionally, our standard exhaust units, designed similarly to the exhaust units for medical accelerators, the ST series, have also received positive feedback. 【Features (TG-F series)】 ■ Strong against disturbances ■ Compact and lightweight ■ Grease-lubricated ball bearings for long lifespan ■ Highly regarded for reliability in medical settings *For more details, please refer to the PDF materials or feel free to contact us.

The "VRD Series" is a two-stage direct-coupled oil rotary vacuum pump suitable for general industry, medical devices, and pharmaceutical industries. We offer a wide range of products with exhaust speeds from 4 to 65 m³/h, along with optional items, providing high-quality products at attractive prices. The equipped two-stage adjustable gas ballast valve can be adjusted according to the amount of condensable gas being exhausted. (VRD-4 and VRD-8 have a single stage) Additionally, we also offer the "VRD-M Series," which is compatible with plasma sterilization. 【Features】 ■ Gas ballast valve (two-stage adjustment) ■ Check valves installed at both the intake and exhaust ports ■ Completely integrated cylinder structure with pin jointing ■ Forced oil circulation system *For more details, please refer to the PDF materials or feel free to contact us.

The "VRD Series" is a two-stage direct-coupled oil rotary vacuum pump suitable for the refrigeration equipment industry, medical equipment, and pharmaceutical industries. We offer a wide range of products with exhaust speeds from 4 to 65 m³/h, along with optional items, providing high-quality products at attractive prices. The equipped two-stage adjustable gas ballast valve can be adjusted according to the amount of condensable gas being exhausted. (VRD-4 and VRD-8 have a single stage) Additionally, we also offer the "VRD-M Series," which is compatible with plasma sterilization. 【Features】 ■ Gas ballast valve (two-stage adjustment) ■ Check valves installed at both the intake and exhaust ports ■ Completely integrated cylinder structure with pin jointing ■ Forced oil circulation system *For more details, please refer to the PDF materials or feel free to contact us.

The "VSV Series" is a single-stage rotary vane type oil rotary vacuum pump. With a simple and robust design, it is suitable for repeated exhaust from atmospheric pressure to vacuum. Compared to oscillating piston types (Kinney type) and cam types (Senko type), it features a lightweight, compact, and low-vibration structure. Additionally, all models are air-cooled, requiring no cooling water, making them energy-efficient and low-cost, while eliminating the need for piping work. 【Features】 ■ All models are air-cooled ■ Lightweight, compact, and low vibration ■ Standard equipped with an oil filter ■ Gas ballast valve (two/three-stage adjustment) ■ Standard equipped with an oil mist trap element *For more details, please refer to the PDF materials or feel free to contact us.

The exhaust unit delivered for the leak test of automotive parts this time features the grease-lubricated ball bearing turbo molecular pump "TG350F" as the main pump, with a direct-coupled oil rotary vacuum pump as the auxiliary pump. It connects to the vacuum chamber via a 100mm diameter angle valve installed on the intake port of the turbo molecular pump through a short pipe. Both the turbo molecular pump and the oil rotary vacuum pump are mounted on a cart with wheels. Additionally, since both the main and auxiliary pumps are air-cooled, the exhaust unit can operate solely on AC100V input. With the touch panel controller mounted on the cart, it is possible to perform automatic operation of the entire system, including the operation of the vacuum gauge and slow leak valve, as well as manual operation of various components. The grease-lubricated ball bearing turbo molecular pump TG350F is resistant to external vibrations, allowing it to maintain rated operation while the cart is being moved. This simple yet highly reliable exhaust unit supports the manufacturing of automotive parts. *For more details, please refer to the PDF document or feel free to contact us.*

This time, in conjunction with the establishment of new equipment with increased manufacturing capacity, a larger vacuum exhaust system with a higher exhaust speed was necessary to evacuate the enlarged reaction vessel. Therefore, we manufactured and delivered a vacuum exhaust system. Since it is used in the adhesive manufacturing process, we considered the possibility of adhesive materials sticking and stopping the pump. To ensure that vacuum evacuation can continue even if one system stops due to sticking, it is configured with two parallel exhaust systems. The main exhaust system "PRD25-60" is a combination of a Roots vacuum pump (mechanical booster pump) "RD2500" and a screw-type dry vacuum pump. The gas contact section is oil-free, eliminating the need for frequent oil changes due to oil contamination from the intake gas. The auxiliary exhaust system "PRM25-45" combines a Roots vacuum pump (mechanical booster pump) "RD2500" with an economical oil rotary vacuum pump "P450," which is relatively resistant to adhesive material sticking. Additionally, since the installation site is a hazardous materials manufacturing facility, the motor is designed to be explosion-proof and pressure-resistant. *For more details, please refer to the PDF document or feel free to contact us.

This catalog features a wide range of vacuum products, from low vacuum to ultra-high vacuum. We introduce many products categorized by application, including the belt-driven oil rotary vacuum pump "P Series," the magnetic bearing compound molecular pump "TG-M Series," and the compact dry vacuum pump "DSP Series." Please make use of this for selecting products. 【Featured Products (Excerpt)】 ■ Turbo molecular pumps ■ Turbo molecular pump vacuum systems ■ Oil diffusion vacuum pumps ■ Mechanical booster pumps (Roots vacuum pumps) ■ Mechanical booster exhaust systems *For more details, please refer to the PDF materials or feel free to contact us.

We would like to introduce a case where a "liquid-sealed vacuum pump with a sealed liquid circulation system (closed cycle)" was delivered to a vacuum distillation process for recovering organic solvents in a high-performance film manufacturing plant. Raising the temperature of organic solvents can lead to degradation, but in vacuum distillation, it is possible to evaporate and recover organic solvents without increasing the temperature by reducing the pressure. Additionally, to prevent contamination of the recovered organic solvents, the parts in contact with the liquid in this pump and the closed cycle liquid circulation supply system are made of stainless steel, and the sealing materials are fluororubber or PTFE. 【Case Overview】 ■ Delivery Location: Polyolefin High-Performance Film Manufacturing Plant ■ Delivered Product: Liquid-sealed vacuum pump with a sealed liquid circulation system (closed cycle) *For more details, please refer to the PDF document or feel free to contact us.

This document introduces the "Mechanical Booster Exhaust System." It explains how it can be used in combination with vacuum pumps that can compress to atmospheric pressure, as well as with various auxiliary pumps to provide an appropriate vacuum environment. Additionally, the products include features, applicable industries, and system diagrams. Related products are also introduced with photos, so please take a look. [Featured Products] ■ PRM/SR Series ■ PRL Series ■ PRD Series *For more details, please download the PDF or feel free to contact us.

We would like to introduce the successful integration of our turbo molecular pump into the ion plating system "CatArc 3036" by Vergason Technology, based in New York, USA. This device is suitable for coating applications in various fields, including automotive, decorative, medical, machinery and cutting tools, sports equipment, and many special applications. Our high-flow specification, lightweight, and inverted mounting-capable model "TGkine3800M-B" has been adopted. We offer not only individual sales of vacuum pumps and vacuum components from high vacuum to low vacuum but also the option to propose them integrated into vacuum systems. 【Case Overview】 ■ Adoption: Vergason Technology's ion plating system "CatArc 3036" ■ Adopted Product: Turbo molecular pump "TGkine3800M-B" ■ Product Features: High-flow specification, lightweight, and inverted mounting capability *For more details, please refer to the related links or feel free to contact us.

The "UD Series" is a direct-coupled oil rotary vacuum pump that prevents oil backflow into the vacuum system when the pump stops. It can be adjusted according to the amount of condensable gases (such as water vapor) being discharged. By minimizing mechanical components, it enables easy and precise maintenance and repairs. 【Features】 ■ Gas ballast valve ■ Check valves installed at both the intake and exhaust ports ■ Special heat treatment for the rotor and stator ■ Completely integrated cylinder structure with pin jointing ■ Forced oil circulation system *For more details, please download the PDF or feel free to contact us.

The "VM70F" is a direct-coupled oil rotary vacuum pump that achieves 200V single-phase operation with a flow rate of 70m³/h. It can be started using the pump's main switch or via D-SUB. It is a product that is strong against condensable gases. It can be installed without the need for cooling water construction. Please feel free to contact us when you need assistance. 【Features】 ■ High exhaust speed with single-phase power ■ Supports remote/local start ■ Continuous gas ballast ■ Air-cooled design *For more details, please download the PDF or feel free to contact us.

This catalog introduces the "vacuum valves and vacuum components" that we handle. We feature a variety of products, including the automatic valve "LCAV series," which opens and closes with compressed air, and the "LV series," which uses all SUS materials. Specifications and dimensional drawings for each product are included, so please take a moment to read through them. [Contents (excerpt)] ■ MAH/PAH series (manual/air-operated/SUS304L/KF, CF, ISO-R flanges) ■ LCV series (manual/SUS304/KF flange) ■ LCAV series (air-operated/SUS304/KF flange) ■ LV series (manual/SUS304/VF flange) ■ LAV series (air-operated/SUS304/VF flange) *For more details, please download the PDF or feel free to contact us.

We would like to introduce a case study of a "vacuum exhaust system" that uses a large Roots vacuum pump as the main pump to repeatedly evacuate the impregnation tank in a large impregnation device from atmospheric pressure to a vacuum state. In this case study, it was required to evacuate the impregnation tank with a volume of 13m³ from atmospheric pressure to below 10Pa within 7 minutes. When the set vacuum level is reached, the Roots vacuum pump is activated by a vacuum switch installed on the intake side. A relief valve that opens and closes by the weight of the valve body is provided between the intake and exhaust ports, allowing the pump to be activated from the high-pressure side. 【Features】 ■ When the set vacuum level is reached, the Roots vacuum pump is activated by a vacuum switch installed on the intake side. ■ A relief valve that opens and closes by the weight of the valve body is provided between the intake and exhaust ports, allowing the pump to be activated from the high-pressure side. ■ The motor, vacuum switch, and solenoid valve are all explosion-proof specifications. *For more details, please refer to the related links or feel free to contact us.