大阪真空機器製作所 List of Products and Services

Power Unit and Pump Integrated Turbo Molecular Pump New Product TGkine4200M Released!! We have successfully developed the new product TGkine4200M. It features a large flow rate despite its compact size compared to other products. We plan to showcase the actual unit at the Vacuum Exhibition 2015 scheduled for September, where we will explain the specifications through panels and other materials. We will display the TGkine series (TGkine2200M/3300M/4200M) including the TGkine4200M and introduce it to everyone. For more details, please check our company website. (Link to our company website) We invite you to visit our booth during this opportunity. The compact design also contributes to cost reduction. It is widely adopted in manufacturing industries such as medical devices, semiconductors, and analytical/testing equipment. 【Features】 ■ Cost reduction possible with flexible design! ■ Improved work efficiency by consolidating various access points at the front! ■ Standard IP54 (dustproof and splashproof) compliant, usable even in harsh environments! *For more details, please contact us or download the catalog to view.

Osaka Vacuum was the first in Japan to successfully develop a turbo molecular pump. The magnetic bearing turbo molecular pump features a design that integrates the power unit and the pump, eliminating the need for output cables and separate controllers, thus removing the necessity for cable ducts and controller racks. This eliminates the cumbersome task of cable routing, improving work efficiency and maintainability. Its compact design also contributes to cost reduction. It is widely adopted in manufacturing industries such as medical devices, semiconductors, and analytical/testing equipment. 【Features】 ■ Cost reduction possible with flexible design! ■ Various access points consolidated at the front to improve work efficiency! ■ Standard IP54 (dustproof and splash-proof) compliant, usable even in harsh environments! *For more details, please contact us or download the catalog to view.

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports exhaust over a wide range from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for a long time with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

In addition to standard and chemical types, we also offer various special specifications (ultra-low vibration, reaction product countermeasure specifications, ultra-high vacuum specifications, radiation-resistant specifications)!

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation and compact design with integrated power supply. It has a structural design that is strong against atmospheric entry.

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation and compact design with integrated power supply. It features a robust structural design that is resistant to atmospheric entry.

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation. It has a structural design that is resistant to atmospheric intrusion.

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation. It has a robust structural design that is resistant to atmospheric intrusion.

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation. It has a robust structural design that is resistant to atmospheric intrusion.

Since it is a grease-lubricated bearing type turbo molecular pump, it can be installed in any orientation. It has a structural design that is resistant to atmospheric intrusion.

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation. It has a structural design that is resistant to atmospheric intrusion.

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation. It has a robust structural design that is resistant to atmospheric entry.

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation. It has a structural design that is resistant to atmospheric intrusion.

You can choose from various special specifications according to your application. Specifications for reaction products, ultra-low vibration, ultra-high vacuum, radiation resistance, and high-temperature resistance.

You can choose from various special specifications according to your application. Specifications for reaction products, ultra-low vibration, ultra-high vacuum, radiation resistance, and high-temperature resistance.

You can choose from various special specifications according to your application: reaction product countermeasure specification, ultra-low vibration specification, ultra-high vacuum specification, radiation-resistant specification, and high-temperature resistant specification.

You can choose from various special specifications according to your application. Specifications for reaction byproduct measures, ultra-low vibration, ultra-high vacuum, radiation resistance, and high-temperature resistance.

We also have the reaction product countermeasure specifications TG2400MI in our lineup.

Ultra-high vacuum magnetic bearing composite molecular pump (high compression type) TG-MU series

It is ideal for high-performance electron microscopes, fine drawing devices, and analytical instruments.

In addition to heating with an external heater, effectively utilize the friction heat generated by the suction gas inside the pump to efficiently raise the temperature of the gas contact area. ■ The output of the external heater can be reduced, improving energy-saving effects!! ■ Minimize thermal impact on key components, reducing damage to the pump.

Increased durability against radiation, enabling operation in harsh environments. Delivered to facilities such as the Japan Proton Accelerator Research Complex (J-PARC)!

This is a turbo molecular pump exhaust unit. Custom products can be manufactured according to your requests, such as combinations of pumps and the addition of optional equipment!

It is a compactly designed turbo molecular pump exhaust unit that is easy to carry.

The TG60F turbo molecular pump with grease-lubricated bearing is a compact size with an integrated controller. Its installation orientation is flexible, allowing for greater freedom in equipment design. It is ideal for applications such as electron gun evacuation, analytical instruments, and research and development. 【Features】 ■ Rapid vent stop capability. ■ Strong structure against atmospheric intrusion. ■ Compliance with safety standards: NRTL/SEMI-S2/CE (only for TG60F-20) *For more details, please contact us or download the catalog to view.

○Flexible Installation Orientation The installation orientation is freely adjustable in 360 degrees, expanding the design flexibility of the equipment! ○Excellent Durability By adopting a unique bearing structure, it is resistant to sudden pressure increases caused by atmospheric entry! ○Rapid Vent Stop The pump can be rapidly stopped using the vent port, similar to an air brake. *Some models may not support this feature. ○Maintenance-Free There is no need for daily maintenance. With regular overhauls, you can use it for a longer period.

We offer a wide range of classes from small to large. You can choose the optimal pump from the exhaust speed classes of 200L/s to 5500L/s according to your application.

The 'TG397M / TG427M / TG907M / TG1307M' handled by Osaka Vacuum Equipment Manufacturing Co., Ltd. has achieved low power consumption through improvements in the magnetic levitation motor compared to conventional magnetic bearing turbo molecular pumps. Additionally, it is equipped with a memory function that stores operational data, touchdown counts, and other information in the pump body, allowing for data transfer even when the controller is replaced during overhauls. 【Features】 ■ Energy-saving design ■ Ability to retain operational data, touchdown counts, model information, etc., in the main unit *For more details, please refer to the catalog or feel free to contact us.

This is a compact turbo molecular pump for analytical instruments. Since a small diaphragm pump can be used as an auxiliary pump, the device can be miniaturized, and its complete freedom of orientation also increases the flexibility of the device layout. It is a pump suitable for analytical and measurement instruments that require compactness, lightweight, and high performance.

To realize an IoT society, various electronic components and semiconductors are necessary, and an appropriate vacuum environment is essential for their production. Our company is considering how to make vacuum pumps capable of supporting IoT to create that vacuum environment. This time, we will introduce products from our extensive lineup, focusing on vacuum pumps for semiconductors. 【Products】 ■ Controller and power supply integrated / Magnetic bearing turbo molecular pump (reactive product compatible specification): TGkine4200MI ■ Magnetic bearing turbo molecular pump, controller: TGkine3400M-R, TC0331M [New Product] ■ Magnetic bearing compound molecular pump (ultra-low vibration specification): TG420ML ■ Compact dry vacuum pump: DSP251 [New Product], DSP50 ■ Energy-saving dry vacuum pump: ER100D For more details, please download the PDF or contact us. Additionally, Osaka Vacuum will exhibit the above pumps at SEMICON Japan 2019, so please come and visit us.

This catalog features a wide range of vacuum products, from low vacuum to ultra-high vacuum. We introduce many products categorized by application, including the belt-driven oil rotary vacuum pump "P Series," the magnetic bearing compound molecular pump "TG-M Series," and the compact dry vacuum pump "DSP Series." Please make use of this for selecting products. 【Featured Products (Excerpt)】 ■ Turbo molecular pumps ■ Turbo molecular pump vacuum systems ■ Oil diffusion vacuum pumps ■ Mechanical booster pumps (Roots vacuum pumps) ■ Mechanical booster exhaust systems *For more details, please refer to the PDF materials or feel free to contact us.

We would like to introduce a case where a "high vacuum exhaust system for X-ray measurement experiment vacuum containers" was delivered to the Kansai Quantum Science Research Institute (Kizugawa). This exhaust unit consists of a 300 L/s class magnetic bearing turbo molecular pump TG390M, which can be directly attached to the vacuum container, a combined vacuum gauge featuring a Pirani type and a cold cathode ionization vacuum gauge, along with a cart that holds the controllers and auxiliary pumps. The turbo molecular pump attached to the vacuum container is of the magnetic bearing type, allowing for maintenance-free, oil-free operation with extremely low vibration exhaust. Additionally, the inlet flange uses a Conflat type with a copper gasket, which reduces the permeation of light gases from the gasket and the release of exhaust gases, while also enabling high-temperature baking. 【Case Overview】 ■ Delivery Destination: National Research and Development Agency, Quantum Science and Technology Research Development Organization, Kansai Quantum Science Research Institute (Kizugawa) ■ Delivered Product: High vacuum exhaust system for X-ray measurement experiment vacuum containers *For more details, please refer to the PDF document or feel free to contact us.

We would like to introduce the successful integration of our turbo molecular pump into the ion plating system "CatArc 3036" by Vergason Technology, based in New York, USA. This device is suitable for coating applications in various fields, including automotive, decorative, medical, machinery and cutting tools, sports equipment, and many special applications. Our high-flow specification, lightweight, and inverted mounting-capable model "TGkine3800M-B" has been adopted. We offer not only individual sales of vacuum pumps and vacuum components from high vacuum to low vacuum but also the option to propose them integrated into vacuum systems. 【Case Overview】 ■ Adoption: Vergason Technology's ion plating system "CatArc 3036" ■ Adopted Product: Turbo molecular pump "TGkine3800M-B" ■ Product Features: High-flow specification, lightweight, and inverted mounting capability *For more details, please refer to the related links or feel free to contact us.