ノダRFテクノロジーズ List of Products and Services

It is used in terrestrial digital broadcasting and mobile phones, but in plasma applications, it is an unknown area and a frequency that is attracting great attention. *Various frequencies and outputs are supported beyond the above. Example: NR1N915M-01 Output Frequency: 915MHz ±0.05% Rated Output: 1000W Maximum Input Power: 3KVA Output Impedance: 50Ω Input Power: Input AC 200V ±10% 3Φ Output Stability: Within ±2% of the set output Cooling Method: Water-cooled (3l/min) sealed structure RF Output Connector: EIA 7/8

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13.56MHz is a frequency band reserved for industrial, scientific, and medical purposes. It is currently the most commonly used frequency band, with 13.56MHz also being used for Suica and similar applications. *Various frequencies and outputs are supported beyond the above. Example: NR5N-XX Output frequency: 13.56MHz ±0.05% Rated output: 5000W Maximum input power: 9KVA Output impedance: 50Ω Input power: Input AC 200V ±10% 3Φ Output stability: Within ±2% of the set output Cooling method: Combined water and air cooling (7l/min) below 30℃ RF output connector: HN type

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Example NL5N400K-XX Output Frequency: 400KHz ±0.05% Rated Output: 5000W Maximum Input Power: 15KVA Output Impedance: 50Ω Input Power: Input AC 200V ±10% 3Φ Output Stability: Within ±2% of set output Cooling Method: Combined water and air cooling (8l/min) below 30℃ RF Output Connector: HN type

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Example NL15N100K-XX Output Frequency: 100kHz ±0.01% Rated Output: 15kW Maximum Input Power: 40KVA Output Impedance: 50Ω Input Power: Input AC200V 3Φ Output Stability: Within ±1% of set output Cooling Method: Combined water and air cooling (22l/min) below 30℃

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Features No matching box required, compact design, and cost reduction achieved No moving parts due to electronic control, maintenance-free Ultra-fast matching achieved ■ NR1S13M-01 Output power range: 0 to 1200W (when using internal calibration function) Maximum rated power: 1000W Rated maximum output: 1000W (continuous at 50Ω load) Output method: Continuous output Output impedance: 50±2Ω RF output connector: HN-R Output adjustment range: 0 to 1200W continuously variable (set in 1W increments) Rated output power: 1000W Output frequency: 13.56MHz Frequency stability: ±0.01% (10 to 40°C) crystal oscillation Frequency variable range: 13.2MHz to 15.0MHz (limited to F-match operation) Cooling method: Forced air cooling, rear exhaust External dimensions: W430×D640×H174 Weight: Approximately 29kg

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Model: NM1A-XX Frequency: 13.56MHz Power Input: 1kW Input Impedance: 50Ω Unbalanced Matching Mode: Automatic or Manual Switching Input Connector: HN Connector Output: Busbar Cooling: Water Cooling/Air Cooling Combined Matching Time: Within 0.5 Sec when using preset External Analog I/O: 0 to 10.0V External Serial Communication: RS232C/422/Device Net Power Supply: AC84V to 220V/DC24V (80VA)

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Model: NM1A13-54M-XX Frequency: 13.56MHz 27.12MHz 40.68MHz 54.24MHz Power: 1kW Input Impedance: 50Ω Unbalanced Matching Mode: Automatic or Manual Switching Input Connector: HN Connector Output: Busbar Cooling: Water Cooling/Air Cooling Combined Matching Time: Within 0.5 Sec when using preset External Analog I/O: 0 to 10.0V External Serial Communication: RS232C/422/Device Net Power Supply: AC84V to 220V/DC24V (80VA)

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Model: NM3AD-XX Frequency: 13.56MHz Power Input: 3KW Input Impedance: 50Ω Unbalanced Matching Mode: Automatic or Manual Switching Input Connector: HN Connector Output: Busbar Cooling: Water Cooling/Air Cooling Combined Matching Time: Within 0.5 Sec when using preset External Analog I/O: 0 to 10.0V External Serial Communication: RS232C/422/Device Net Power Supply: AC84V to 220V/DC24V (80VA)

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Frequency: Any frequency from 13.56MHz to 27.12MHz Cooling method: Forced cooling External dimensions: Reference dimensions W140×D155×H110mm

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Output: 5W/10W/30W/50W/75W/100W (compact version) Frequency: 13.56MHz to 27.12MHz Frequency: Any frequency from 13.56MHz to 27.12MHz Rated output: 5W to 100W Input: AC100V single-phase or DC input Cooling method: Forced cooling External dimensions: Reference dimensions W140×D180×H110mm

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Specification NXE-18 Input/Output Connection Connector HN-R Maximum Power Consumption 1kV Vacuum Relay Maximum 30A (Continuous) / 15kVdc × 2 units used Dielectric Strength Test DC1000V Megatest conducted Status Contact Rating DC24V 3A or less / AC220V 3A or less Temperature Abnormality Contact Rating Temperature Abnormality Contact Rating DC / AC110V 0.3A or less (Contact opens at 55℃ or higher)

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For one reference signal, it controls the load voltage phase of two RF power supplies and matching devices, allowing each phase to be controlled by selecting either open-loop (feedforward control) or closed-loop (feedback control). - Open-loop (feedforward control) The phase is measured and controlled on the RF power supply side. General phase shifters use this method. - Closed-loop (feedback control) The phase is measured and fed back from a location closer to the plasma, specifically at the output end of the matching device. Compared to conventional methods, this allows for more accurate phase control. Specifications: NXE-03B-2P AC Input: 85–240V 50/60Hz 50VA Reference Frequency: 13.56MHz ±0.005% Phase Control Range: 0–359° Phase Measurement Accuracy: ±5° across the entire phase range Input Dynamic Range: Minimum input level 3dBm, Maximum input level 23dBm

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【Specifications】 * The NRF high-frequency power supply can also incorporate a pulse function. Frequency setting accuracy: AC85–264V 50/60Hz single-phase Power consumption: 20VA Pulse rise and fall time: 100nsec or less Frequency setting accuracy: ±5% Output: TTL level (2 outputs + 1 output) 3 PORT * The +1 output is logically inverted with respect to the 2 outputs Internal operation: Via front panel key switch External operation: Via RS232C serial communication

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- Dual Frequency Power Supply 13.56MHz/27.12MHz 500W 1kW 2kW 5kW 27.12MHz/60MHz 3kW 2MHz/4MHz 1kW 2kW 400kHz/800kHz 500W - Triple Frequency Power Supply 27.12MHz/40.68MHz/54.24MHz 5kW 13.56MHz/27.12MHz/40.68MHz 500W 3kW 13.56MHz/27.12MHz/40.68MHz 20W - Quadruple Frequency Power Supply 13.56MHz/27.12MHz/40.68MHz/54.24MHz 1kW

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*For combinations of frequency and output, please consult us separately. Example) Wideband power supply 10MHz–100MHz 250W 60MHz–180MHz 300W 20MHz–70MHz 500W 13MHz–54MHz 600W 150KHz–15MHz 1kW Example model: NM06M13M-54M-01 (Wideband RF power supply)

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We have developed a high-frequency power supply that incorporates a matching device internally, thanks to our unique mechanism. Compared to conventional products, we have increased the output from 500W to 750W, while reducing the size to fit within a half rack instead of a full rack, achieving thorough compactness.

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【13.56MHz 1kW/3kW/5kW (Pulse)】 The high-efficiency high-frequency power supplies newly developed by NRF【NR1NP】【NR3NP】【NR5NP】 have significantly improved durability compared to conventional high-efficiency RF power supplies, thanks to their unique high-reliability power amplifiers. The weakness of high-efficiency amplifiers has been their structural vulnerability to reflected power; however, NRF's high-efficiency RF power supplies possess an impressive reflection resistance capability of over 600W for a 3kW output, allowing them to withstand sudden load fluctuations such as short circuits and open circuits. Additionally, they are equipped with various protection circuits, making them a model that NRF confidently recommends. = Features = ■ Compact design ■ High reflection resistance ■ High power margin ■ Operation via handy controller ■ Safety design ■ Various protection circuits ■ High efficiency The catalog provides detailed information on features and specifications by model. ↓↓↓ For more details, please download the catalog and feel free to contact us. ↓↓↓

• CVD Equipment

The newly developed high-efficiency high-frequency power supply by NRF, the NR3N-13, has significantly improved durability compared to conventional high-efficiency RF power supplies, thanks to its unique high-reliability power amplifier. The weakness of high-efficiency amplifiers has been their structural vulnerability to reflected power; however, NRF's high-efficiency RF power supply boasts an impressive reflected power tolerance of over 600W against an output of 3kW, allowing it to withstand sudden load fluctuations such as short circuits and open circuits. Additionally, it is equipped with various protection circuits, making it a model that NRF confidently recommends.

• CVD Equipment

This is an introduction to the "Digital Matcher" handled by RF Technologies, which has responded to user feedback based on a wide lineup and unique value-added products such as wideband, pulse application, and superimposition, covering frequencies from LF to UHF. ---Features--- * Matching speed: From preset to under 1 second → From preset to under 0.5 seconds * Reflection: Under 1% → Almost 0W * Power dependence: Dependent around 0W → Non-dependent method * Controller: Half-rack size → Handy type (operable without attachment) * Preset: Setting volume (1 point) → Numeric input (multiple points can be stored) * O-balance: Adjustment volume → Numeric input * Motor speed: Board-mounted volume → Numeric input * Initialization: No memory function → Always reset to initial value * For more details, please contact us.

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Achieves a lightweight and compact design (half-rack size) while being an air-cooled power supply! High-frequency power supply for plasma (NR03N-01) ■□■Features■□■ ■Rated output NR03N-01: 300W NR05N-01: 500W ■Frequency 13.56MHz ■Output impedance 50-52Ω ■Power supply voltage 200V 3-phase 50/60Hz ■Spurious -40dB or less ■Cooling method Forced air cooling ■For more details, please contact us.

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