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  1. Home
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  3. アイテス
  4. Dynamic SIMS
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  • Feb 28, 2024
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Feb 28, 2024

Dynamic SIMS

アイテス アイテス
"Dynamic SIMS" is a secondary ion mass spectrometry method that can detect trace amounts of all elements (from H to U) in samples with high sensitivity, ranging from ppm to ppb. It allows for qualitative analysis and depth profiling, and additionally enables high-precision quantitative analysis using standard samples (conducted at our partner company's facility). The minimum beam diameter is approximately 30 µm, and it can be further reduced depending on the material.
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Dynamic SIMS

Suitable for analysis of glass, metal, ceramics, silicon, compound semiconductors, shallow implants, and more!

"DYNAMIC SIMS" is a secondary ion mass spectrometry method that can detect trace amounts of all elements (from H to U) in samples with high sensitivity, ranging from ppm to ppb. It allows for qualitative analysis and depth profiling, and additionally enables high-precision quantitative analysis using standard samples (conducted at our partner company's facility). The minimum beam diameter is approximately 30 µm, and it can be further reduced depending on the material. 【Features】 ■ Automatic loading/unloading of samples, high throughput (24 samples/load) ■ Unmatched depth profiling capability and high depth resolution, wide dynamic range ■ Optimized for the analysis of glass, metals, ceramics, silicon, compound semiconductors, shallow implants, etc. ■ Highest detection limit: from ppm to ppb (10^-6 to 10^-9) *For more details, please refer to the PDF document or feel free to contact us.

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Surface analysis using TOF-SIMS.

TOF-SIMS can analyze light elements and inorganic substances as well as large organic molecules.

■TOF-SIMS Three Analysis Modes - High-resolution mass spectrum - Depth profile analysis - Surface mapping analysis

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TOF-SIMS analysis of organic matter

As an example of organic matter analysis, I would like to introduce a case where polyethylene glycol was analyzed.

TOF-SIMS can detect elements and organic molecules, as well as fragment ions, making it effective for organic analysis. As an example of organic analysis, we will introduce a case study of polyethylene glycol. Secondary ion mass spectra can provide valuable insights for the qualitative analysis of organic substances. In this case study, we can confirm the characteristic repeating structure of polyethylene glycol (C2H4O) as a peak group with a mass difference of 44. Calculating from the mass number, it is inferred that the terminal groups are H- and HO-, suggesting they are detected as protonated species. *For more details, please refer to the PDF document or feel free to contact us.*

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TOF-SIMS analysis of trace contaminants

The analysis sensitivity of TOF-SIMS is high at the ppm level, making it effective for analyzing trace contamination!

This is an introduction to a case where water droplet-shaped contaminants were created on a Si wafer through reproducibility experiments. Measurements were conducted at the same position using SEM-EDX and TOF-SIMS, and a comparison of the image maps was made. In the TOF-SIMS image map, organic substances (CH, CN), Na, and K were detected around the watermark. While no contaminants were observed around the watermark in the optical image, SEM image, and EDX analysis, the TOF-SIMS image map revealed that trace amounts of contaminants were present. *For more details, please refer to the PDF document or feel free to contact us.*

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[Example of TOF-SIMS] Analysis of Li

It is possible to detect with high sensitivity! We will introduce a case comparing the analysis of Li using TOF-SIMS and SEM-EDX.

We will introduce a case comparing the analysis of lithium (Li) using TOF-SIMS and SEM-EDX. While SEM-EDX is used for the analysis of contamination and foreign substances, it is difficult to detect Li with general EDX, excluding windowless EDX. On the other hand, TOF-SIMS can detect Li with high sensitivity. Please feel free to contact us if you need assistance. 【Overview】 ■ Analysis of stains on copper plates ■ SEM-EDX analysis → Difficult to detect Li ■ TOF-SIMS analysis → Li detectable *For more details, please refer to the PDF document or feel free to contact us.

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Composition analysis of raw materials for all-solid-state batteries.

The purity of the electrolyte greatly affects the performance of the battery! It suppresses the volatility of sulfur components and converts them into a form that can be detected by IC.

We would like to introduce an example of analyzing the purity of phosphorus pentasulfide using ion chromatography for the composition analysis of raw materials for all-solid-state batteries. Phosphorus pentasulfide is one of the raw materials used in the production of electrolytes for sulfide-based all-solid-state batteries. As a pretreatment for IC measurement, the powder of phosphorus pentasulfide was dissolved in alkaline water and converted into phosphate and sulfide salts. Subsequently, sulfide ions were oxidized to sulfate ions to prepare the IC measurement solution. For more details, please refer to the published catalog. 【Solid Electrolytes (Partial)】 ■Li3PS4 ■Li7P3S11 ■Li6PS5Cl ■Li6PS5Br *For more information, please refer to the PDF materials or feel free to contact us.

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Related catalog(6)

Dynamic SIMS

Dynamic SIMS

TECHNICAL
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TOF-SIMS analysis

TOF-SIMS analysis

PRODUCT
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TOF-SIMS analysis of organic matter

TOF-SIMS analysis of organic matter

TECHNICAL
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TOF-SIMS analysis of trace contaminants

TOF-SIMS analysis of trace contaminants

TECHNICAL
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[Example of TOF-SIMS] Analysis of Li

[Example of TOF-SIMS] Analysis of Li

TECHNICAL
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Composition analysis of raw materials for all-solid-state batteries.

Composition analysis of raw materials for all-solid-state batteries.

OTHER
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Electronic Components and Semiconductors
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Fukuda's leak test, leak inspection, leak detection, leak test, integrity test.

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Fukuda Co., Ltd. has been pursuing leak detection for 60 years and is committed to advancing the future of leak testing. 【 Supporting Various Leak Tests: Air Leak Test / Gas Leak Test (Hydrogen Gas, Helium Gas) 】 We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing properties. We will propose the appropriate testers and devices for each inspection target. 【 Target Industries and Examples of Inspection Targets 】 - Automotive Industry: Engines, FC components, valves and piping, various parts - Electronic Components Industry: Smartphones, keyless switches, various small sensors - Pharmaceuticals / Food / Cosmetics Industry: Bottle containers, syringes, vials, eye drop containers, pillow packaging, PTP packaging We will propose the most suitable leak testers for each industry. 【 ISO Certification 】JIS Q 9001:2015 (ISO 9001:2015)

Jan 23, 2026

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[Opening on January 6, 2026] New service launched to search for exhibits nationwide.

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We have launched a "Display Item Search Page" that allows you to search for unit houses currently on display at exhibition halls nationwide, which was made available on January 6, 2026. There are over 800 items listed on the website. You can filter by area, price range, size, purpose, product type, color, and more. You can also check exterior and interior photos, prices, facilities, and drawings/specifications online. If you're interested in a display item, you can directly inquire, make a reservation to visit, or consult via LINE. This is a convenient service that allows you to efficiently progress from comparison to detailed consideration. Please take a look!

Jan 23, 2026

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Publication of a paper in Oxford Open Materials Science

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A co-authored paper by Shin Otsuki from the Data Science Department and another author has been published in Oxford Open Materials Science. 【Paper Summary】 Title: The Exploration of Enhanced Methods in Data Science and Applications in Materials Science Authors: Raymond Wu, Shin Otsuki

Jan 23, 2026

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[New Product] Announcement of the High Brightness LED Lighting Box LLBLM-A Series

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  • PRODUCT

"With high-precision dimming settings of 256/1000 gradations, you can achieve your desired results." The new 1-channel dedicated model LLBLM-A maximizes the performance of high-brightness LEDs. It offers high light stability through constant current control and flexibly accommodates a wide range of inspection and lighting applications with three types of interfaces: parallel, RS232C, and LAN. In addition to intuitive operation via the front panel, it supports high-precision dimming with 256/1000 gradations (256 gradations in parallel mode). The available emission colors are G (green) and B (blue). This new model balances stable light output with ease of use. For more details, please feel free to contact us.

Jan 23, 2026

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All participants chant for safety.

The Winter Safety Conference for the 7th year of Reiwa was held.

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Last month, we held a winter safety conference organized by our company. We have compiled the details and atmosphere of the day, as well as information on winter labor accidents, into a PDF. We would appreciate it if you could take a moment to read it.

Jan 23, 2026

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  • RS 年度末セール 年に1度のスペシャル企画! 期間限定 最大60%OFF 期間:2026 1/5(月)~3/27(金)18:00まで
  • 首都圏最大級の工業技術・製品の総合見本市 テクニカルショウヨコハマ2026 第47回 工業技術見本市 時代をひらく新たな技術 2026年2/4(水)・5(木)・6(金) 10:00-17:00 来場者募集中
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