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  3. アイテス
  4. Dynamic SIMS
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  • Feb 28, 2024
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Feb 28, 2024

Dynamic SIMS

アイテス アイテス
"Dynamic SIMS" is a secondary ion mass spectrometry method that can detect trace amounts of all elements (from H to U) in samples with high sensitivity, ranging from ppm to ppb. It allows for qualitative analysis and depth profiling, and additionally enables high-precision quantitative analysis using standard samples (conducted at our partner company's facility). The minimum beam diameter is approximately 30 µm, and it can be further reduced depending on the material.
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Dynamic SIMS

Suitable for analysis of glass, metal, ceramics, silicon, compound semiconductors, shallow implants, and more!

"DYNAMIC SIMS" is a secondary ion mass spectrometry method that can detect trace amounts of all elements (from H to U) in samples with high sensitivity, ranging from ppm to ppb. It allows for qualitative analysis and depth profiling, and additionally enables high-precision quantitative analysis using standard samples (conducted at our partner company's facility). The minimum beam diameter is approximately 30 µm, and it can be further reduced depending on the material. 【Features】 ■ Automatic loading/unloading of samples, high throughput (24 samples/load) ■ Unmatched depth profiling capability and high depth resolution, wide dynamic range ■ Optimized for the analysis of glass, metals, ceramics, silicon, compound semiconductors, shallow implants, etc. ■ Highest detection limit: from ppm to ppb (10^-6 to 10^-9) *For more details, please refer to the PDF document or feel free to contact us.

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Surface analysis using TOF-SIMS.

TOF-SIMS can analyze light elements and inorganic substances as well as large organic molecules.

■TOF-SIMS Three Analysis Modes - High-resolution mass spectrum - Depth profile analysis - Surface mapping analysis

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TOF-SIMS analysis of organic matter

As an example of organic matter analysis, I would like to introduce a case where polyethylene glycol was analyzed.

TOF-SIMS can detect elements and organic molecules, as well as fragment ions, making it effective for organic analysis. As an example of organic analysis, we will introduce a case study of polyethylene glycol. Secondary ion mass spectra can provide valuable insights for the qualitative analysis of organic substances. In this case study, we can confirm the characteristic repeating structure of polyethylene glycol (C2H4O) as a peak group with a mass difference of 44. Calculating from the mass number, it is inferred that the terminal groups are H- and HO-, suggesting they are detected as protonated species. *For more details, please refer to the PDF document or feel free to contact us.*

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TOF-SIMS analysis of trace contaminants

The analysis sensitivity of TOF-SIMS is high at the ppm level, making it effective for analyzing trace contamination!

This is an introduction to a case where water droplet-shaped contaminants were created on a Si wafer through reproducibility experiments. Measurements were conducted at the same position using SEM-EDX and TOF-SIMS, and a comparison of the image maps was made. In the TOF-SIMS image map, organic substances (CH, CN), Na, and K were detected around the watermark. While no contaminants were observed around the watermark in the optical image, SEM image, and EDX analysis, the TOF-SIMS image map revealed that trace amounts of contaminants were present. *For more details, please refer to the PDF document or feel free to contact us.*

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[Example of TOF-SIMS] Analysis of Li

It is possible to detect with high sensitivity! We will introduce a case comparing the analysis of Li using TOF-SIMS and SEM-EDX.

We will introduce a case comparing the analysis of lithium (Li) using TOF-SIMS and SEM-EDX. While SEM-EDX is used for the analysis of contamination and foreign substances, it is difficult to detect Li with general EDX, excluding windowless EDX. On the other hand, TOF-SIMS can detect Li with high sensitivity. Please feel free to contact us if you need assistance. 【Overview】 ■ Analysis of stains on copper plates ■ SEM-EDX analysis → Difficult to detect Li ■ TOF-SIMS analysis → Li detectable *For more details, please refer to the PDF document or feel free to contact us.

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Composition analysis of raw materials for all-solid-state batteries.

The purity of the electrolyte greatly affects the performance of the battery! It suppresses the volatility of sulfur components and converts them into a form that can be detected by IC.

We would like to introduce an example of analyzing the purity of phosphorus pentasulfide using ion chromatography for the composition analysis of raw materials for all-solid-state batteries. Phosphorus pentasulfide is one of the raw materials used in the production of electrolytes for sulfide-based all-solid-state batteries. As a pretreatment for IC measurement, the powder of phosphorus pentasulfide was dissolved in alkaline water and converted into phosphate and sulfide salts. Subsequently, sulfide ions were oxidized to sulfate ions to prepare the IC measurement solution. For more details, please refer to the published catalog. 【Solid Electrolytes (Partial)】 ■Li3PS4 ■Li7P3S11 ■Li6PS5Cl ■Li6PS5Br *For more information, please refer to the PDF materials or feel free to contact us.

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Related catalog(6)

Dynamic SIMS

Dynamic SIMS

TECHNICAL
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TOF-SIMS analysis

TOF-SIMS analysis

PRODUCT
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TOF-SIMS analysis of organic matter

TOF-SIMS analysis of organic matter

TECHNICAL
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TOF-SIMS analysis of trace contaminants

TOF-SIMS analysis of trace contaminants

TECHNICAL
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[Example of TOF-SIMS] Analysis of Li

[Example of TOF-SIMS] Analysis of Li

TECHNICAL
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Composition analysis of raw materials for all-solid-state batteries.

Composition analysis of raw materials for all-solid-state batteries.

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Electronic Components and Semiconductors
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Please take a look at Fukuda's electric air regulator and regulator!

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● What is a pneumatic regulator? It is a self-developed pneumatic regulator with a control reproducibility of ±0.1%. We offer a wide range of products from low flow to high flow. ● What is a regulator? Please use it to adjust the test pressure for leak testing. By supplying a stable test pressure, it enables more accurate measurements.

Aug 20, 2026

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Please let us know your concerns regarding leaks. We may have some suggestions for you. Leak tests, leakage tests, leak inspections, leak detection, container integrity tests, packaging integrity tests...

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Fukuda Corporation has been pursuing leak detection for 60 years and is dedicated to advancing the future of leak testing. 【 Supporting Various Leak Tests: Air Leak Test / Gas Leak Test (Hydrogen Gas, Helium Gas) 】 We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing performance. We will propose suitable testers and devices for each inspection target. 【 Target Industries and Examples of Inspection Targets 】 - Automotive Industry: Engines, FC components, valves and piping, various parts - Electronic Components Industry: Smartphones, keyless switches, various small sensors - Pharmaceuticals / Food / Cosmetics Industry: Bottle containers, syringes, vials, eye drop containers, pillow packaging, PTP packaging We will propose the most suitable leak testers for each industry. 【 ISO Certification 】JIS Q 9001:2015 (ISO 9001:2015)

Aug 20, 2026

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Fukuda's Technology Column

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This is a collection of links to Fukuda's technical columns. It covers various topics related to leak tests and more... Please check the related links for more information.

Aug 20, 2026

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Hyper CLT flooring panel

CLT flooring boards that can also be used in material yards | Hyper CLT flooring boards

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In a civil engineering site material yard, not only is material storage conducted, but also the frequent movement of trucks and heavy machinery, unloading, and the movement of workers. On unpaved ground, mud and ruts can occur due to rain, which may reduce work efficiency. Hyper CLT mats are civil engineering CLT materials that utilize wood CLT. By laying them in material yards or storage areas, a work space that facilitates the movement of vehicles and heavy machinery can be established while protecting the ground. They can be laid only in necessary locations, and relocation or repurposing in accordance with construction progress is also possible. The 5×10 panel weighs approximately 230 kg, and the 5×20 panel weighs about 460 kg, making them lightweight and easy to install and remove even with small machinery. After use, they can also be utilized as temporary roads, access routes, or heavy machinery work yards. Additionally, they offer unique benefits of wood, such as glare reduction, noise suppression, and CO2 fixation. As a registered technology with the Ministry of Land, Infrastructure, Transport and Tourism under NETIS "TH-250021-A," these wooden mats can also be used for environmental improvement in material yards and innovative public works.

Aug 20, 2026

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AAEON UP Series Board for Embedded Applications with Intel Core Processor (Series 3) [UP WCL]

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Features: ● Equipped with Intel Core Processor (Series 3) ● Onboard LPDDR5 memory: up to 24GB ● Onboard UFS storage: up to 256GB ● 2.5GbE (2.5 Gigabit Ethernet): 1 port ● HDMI 2.1 (TMDS): 1 port ● USB 3.2 Type-A: 3 ports ● 10-pin GPIO: 1 port ● Power input: 12V DC * This model does not include an operating system.

Aug 20, 2026

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