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  4. [Product Catalog] 'GP200 Series' Pressure-Based Gas Mass Flow Controller (Revised Edition)
CATALOG
  • Dec 05, 2025
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Dec 05, 2025

[Product Catalog] 'GP200 Series' Pressure-Based Gas Mass Flow Controller (Revised Edition)

ITWジャパン ITWジャパン
The GP200 series is the first fully pressure-independent PMFC designed specifically for semiconductor applications. With GP200's unique differential pressure technology and state-of-the-art sensor and valve configuration, it eliminates the limitations of traditional pressure-based mass flow controllers, enabling the most extensive and accurate process gas control in the industry. Brooks developed the world's first MFC that allows for the reconfiguration of gas types and flow ranges, and has continued to refresh gas models since its release, with the same functionality incorporated into the GP200. It allows for easy reconfiguration for many gas types and a wide range of flow rates, providing flexible support for a variety of processes. The ultra-fast and highly reproducible valve control of the GP200, along with its resistance to pressure fluctuations, maintains precise flow control to the chamber even in cases of extreme supply pressure variations, enabling tighter process control. The GP200 platform supports a wide range of process conditions and can replace or upgrade many traditional pressure-based mass flow controllers.
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[Official Site] GP200 Series Pressure-Based Metal-Sealed Mass Flow Controller
[Video] Brooks Instrument Pressure-based Mass Flow Controllers - Theory of Operation

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Pressure-based mass flow controller "GP200 series"

Maximize the best performance! The latest pressure-based mass flow for pioneering semiconductor processes.

The GP200 series adopts differential pressure sensors instead of conventional pressure sensors and places the control valve downstream of the sensor, significantly improving the accuracy and reproducibility of flow measurement compared to traditional pressure-based MFCs. 【Features】 ■ Reduction of measurement error ■ Suitable for all process conditions ■ High-precision flow control ■ Reduces valve leakage to 1/100 *For more details, please contact us.

  • Other measurement, recording and measuring instruments

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Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

The thermal mass flow controller/meter "SLA5800 series" is equipped with gas control and measurement functions that are useful for research and development of carbon neutrality, and is compatible with gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. The "SLA5850 mass flow controller with normally closed valve" has obtained certification from the High-Pressure Gas Safety Institute of Japan (KHK), allowing for a very smooth introduction as the completion inspection in prefectures can be completed with just the submission of the certification. (It is also possible to respond with a flow meter.) 【Features】 ■ Obtained type certification for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range that covers a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

  • Flow Meter
  • Flow Control
  • Safety Controller

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Service & Support

Reliable products, highly specialized services! We restore equipment to "like-new condition"!

Our company has experienced technical support members with deep knowledge of flow control, a strong background in electrical and mechanical engineering, and a profound understanding of control systems in the field of biotechnology. With decades of extensive experience, we restore equipment to "like-new condition." Our calibration service experts issue calibration certificates. Please feel free to contact us with your service and installation requests. 【Features】 ■ All repairs use factory-certified new parts ■ All repair services come with a warranty period ■ Calibration service experts issue calibration certificates ■ Global service locations ■ Hardware upgrades are possible via digital protocols *For more details, please refer to the PDF materials or feel free to contact us.

  • Flow Meter
  • Pressure
  • Calibration and repair

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Pressure-based gas mass flow controller "GP200 series"

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【Metal Crack Repair】We repair cracks in metal products without applying heat.

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The "Mechanical Stitch Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact to the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

Mar 20, 2026

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Aluminum casting repair: Metal crack repair without applying heat.

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The "Mechanical Stitching Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact on the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

Mar 20, 2026

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AAEON ArrowLake equipped industrial COM module Type 6 standard

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Features: ● Equipped with Intel Core Ultra 7 255H/7 155H/5 225H/5 125H ● LPDDR5x 16GB/32GB/64GB onboard ● M.2 NVMe 256GB onboard ● USB 2.0 x 8, USB 3.2 (10Gbps) x 4 ● PCIe Gen 4 [x8] x 1, PCIe Gen 3 [x1] x 4, PCIe Gen 3 [x4] x 1 (2 lanes co-lay with SATA; BOM option) ● 2.5GbE x 2 ● COM-HPC Mini standard, size 95mm x 70mm ● Optional items ECB-980A: Development carrier board HPC-ARHm-FAN01: CPU fan HPC-ARHm-HSP01: Heat spreader (Note: heat dissipation is required in the enclosure)

Mar 19, 2026

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AAEON ArrowLake-equipped industrial COM module COM-HPC R1.2 Mini standard

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Features: ● Equipped with Jetson AGX Orin 32GB/64GB ● Gigabit LAN ×1, 10Gigabit LAN ×1 ● USB 3.2 Gen 2 (Type-A) ×4 ● DB-9 connector ×1 (for DIO 8 channels) ● DB-9 connector ×2 (supports RS-232/422/485: Rx/Tx/RTS/CTS) ● Jetpack 6.0.0 pre-installed

Mar 19, 2026

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AAEON Amston Lake equipped industrial COM module NANOCOM-ASL Type 10 standard

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Features: ● Equipped with Intel Atom x7835RE/x7433RE ● LPDDR5x 8GB/16GB onboard ● eMMC 32GB/64GB onboard ● LVDS x 1, DDI x 1 ● USB 2.0 x 8, USB 3.2 Gen 2 x 2 ● PCIe x1 x 4 ● COMe Type 10 standard, 84mm x 55mm size ● Operating temperature -40 to 85℃ ● Optional items ECB-920A-0001: Development carrier board NANOCOM-ADN-FAN01: CPU fan NANOCOM-ADN-HSP01: Heat spreader (※ Heat dissipation is required in the enclosure)

Mar 19, 2026

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